Display device
To suppress a variation in characteristics of a transistor due to a released gas from an organic insulating film so that reliability of a display device is increased. The display device includes a transistor, an organic insulating film which is provided over the transistor in order to reduce unevenness due to the transistor, and a capacitor over the organic insulating film. An entire surface of the organic insulating film is not covered with components (a transparent conductive layer and an inorganic insulating film) of the capacitor, and a released gas from the organic insulating film can be released to the outside from exposed part of an upper surface of the organic insulating film.
1. A display device comprising:
a pixel portion comprising:
a transistor comprising:
a gate electrode layer over a glass substrate;
a gate insulating layer over the gate electrode layer;
a first oxide semiconductor layer over the gate insulating layer;
a second oxide semiconductor layer over the first oxide semiconductor layer;
a first conductive layer over the second oxide semiconductor layer; and
a second conductive layer over the second oxide semiconductor layer,
wherein a first inorganic insulating film is provided over the first conductive layer and the second conductive layer,
wherein an organic insulating film is provided over the first inorganic insulating film,
wherein a first transparent conductive layer is provided over the organic insulating film,
wherein a second inorganic insulating film is provided over the first transparent conductive layer,
wherein a second transparent conductive layer is provided over the second inorganic insulating film,
wherein the second transparent conductive layer is provided in an opening provided in the first inorganic insulating film,
wherein the second conductive layer extends beyond the opening provided in the first inorganic insulating film,
wherein the gate electrode layer comprises a metal element selected from aluminum, chromium, copper, tantalum, titanium, molybdenum, and tungsten,
wherein the gate insulating layer comprises any one of silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, aluminum oxide, hafnium oxide, gallium oxide, and a Ga—Zn-based metal oxide,
wherein the first oxide semiconductor layer comprises indium, gallium, zinc, and tin,
wherein the second oxide semiconductor layer comprises indium, gallium, and zinc,
wherein the first conductive layer comprises a metal element selected from aluminum, chromium, copper, tantalum, titanium, molybdenum, and tungsten,
wherein the second conductive layer comprises a metal element selected from aluminum, chromium, copper, tantalum, titanium, molybdenum, and tungsten,
wherein the first inorganic insulating film is an oxide insulating layer comprising silicon oxide,
wherein the first transparent conductive layer comprises indium and zinc, and
wherein the second transparent conductive layer comprises indium and zinc.
2. The display device according to claim 1 , wherein the first transparent conductive layer and the second transparent conductive layer overlap with each other.
3. The display device according to claim 1 , wherein edge portions of the second oxide semiconductor layer are in contact with the first conductive layer and the second conductive layer.
4. The display device according to claim 1 , further comprising a third inorganic layer over the first conductive layer and the second conductive layer and below the organic insulating film.
5. The display device according to claim 1 , wherein the second inorganic insulating film is in contact with the organic insulating film.
6. The display device according to claim 1 , wherein at least one of the first oxide semiconductor layer and the second oxide semiconductor layer comprises a nanocrystal.
7. A display device comprising:
a pixel portion comprising:
a transistor comprising:
a gate electrode layer over a glass substrate;
a gate insulating layer over the gate electrode layer;
a first oxide semiconductor layer over the gate insulating layer;
a second oxide semiconductor layer over the first oxide semiconductor layer;
a first conductive layer over the second oxide semiconductor layer; and
a second conductive layer over the second oxide semiconductor layer,
wherein a first inorganic insulating film is provided over the first conductive layer and the second conductive layer,
wherein an organic insulating film is provided over the first inorganic insulating film,
wherein a first transparent conductive layer is provided over the organic insulating film,
wherein a second transparent conductive layer is provided over the organic insulating film,
wherein the second transparent conductive layer is in direct contact with the second conductive layer,
wherein the second transparent conductive layer comprises a region which does not overlap with a channel formation region of the transistor,
wherein the gate electrode layer comprises a metal element selected from aluminum, chromium, copper, tantalum, titanium, molybdenum, and tungsten,
wherein the gate insulating layer comprises any one of silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, aluminum oxide, hafnium oxide, gallium oxide, and a Ga—Zn-based metal oxide,
wherein the first oxide semiconductor layer comprises indium, gallium, zinc, and tin,
wherein the second oxide semiconductor layer comprises indium, gallium, and zinc,
wherein the first conductive layer comprises a metal element selected from aluminum, chromium, copper, tantalum, titanium, molybdenum, and tungsten,
wherein the second conductive layer comprises a metal element selected from aluminum, chromium, copper, tantalum, titanium, molybdenum, and tungsten,
wherein the first inorganic insulating film is an oxide insulating layer comprising silicon oxide, gallium oxide, aluminum oxide, silicon oxynitride, silicon nitride oxide, hafnium oxide, or tantalum oxide,
wherein the first transparent conductive layer comprises indium and zinc, and
wherein the second transparent conductive layer comprises indium and zinc.
8. The display device according to claim 7 , wherein the first transparent conductive layer and the second transparent conductive layer overlap with each other.
9. The display device according to claim 7 , wherein edge portions of the second oxide semiconductor layer are in contact with the first conductive layer and the second conductive layer.
10. The display device according to claim 7 , further comprising a third inorganic layer over the first conductive layer and the second conductive layer and below the organic insulating film.
11. The display device according to claim 7 , wherein a second inorganic insulating film is in contact with the organic insulating film.
12. The display device according to claim 7 , wherein at least one of the first oxide semiconductor layer and the second oxide semiconductor layer comprises a nanocrystal.
13. A display device comprising:
a pixel portion comprising:
a transistor comprising:
a gate electrode layer over a glass substrate;
a gate insulating layer over the gate electrode layer;
a first oxide semiconductor layer over the gate insulating layer;
a second oxide semiconductor layer over the first oxide semiconductor layer;
a first conductive layer over the second oxide semiconductor layer; and
a second conductive layer over the second oxide semiconductor layer,
wherein a first inorganic insulating film is provided over the first conductive layer and the second conductive layer,
wherein an organic insulating film is provided over the first inorganic insulating film,
wherein a first transparent conductive layer is provided over the organic insulating film,
wherein a second inorganic insulating film is provided over the first transparent conductive layer,
wherein a second transparent conductive layer is provided over the second inorganic insulating film,
wherein a liquid crystal layer is provided over the second transparent conductive layer,
wherein the gate electrode layer comprises a metal element selected from aluminum, chromium, copper, tantalum, titanium, molybdenum, and tungsten,
wherein the gate insulating layer comprises any one of silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, aluminum oxide, hafnium oxide, gallium oxide, and a Ga—Zn-based metal oxide,
wherein the first oxide semiconductor layer comprises indium, gallium, zinc, and tin,
wherein the second oxide semiconductor layer comprises indium, gallium, and zinc,
wherein the first conductive layer comprises a metal element selected from aluminum, chromium, copper, tantalum, titanium, molybdenum, and tungsten,
wherein the second conductive layer comprises a metal element selected from aluminum, chromium, copper, tantalum, titanium, molybdenum, and tungsten,
wherein the first inorganic insulating film is an oxide insulating layer comprising silicon oxide,
wherein the first transparent conductive layer comprises indium and zinc, and
wherein the second transparent conductive layer comprises indium and zinc.
14. The display device according to claim 13 , wherein the first transparent conductive layer and the second transparent conductive layer overlap with each other.
15. The display device according to claim 13 , wherein edge portions of the second oxide semiconductor layer are in contact with the first conductive layer and the second conductive layer.
16. The display device according to claim 13 , further comprising a third inorganic layer over the first conductive layer and the second conductive layer and below the organic insulating film.
17. The display device according to claim 13 , wherein the second inorganic insulating film is in contact with the organic insulating film.
18. The display device according to claim 13 , wherein at least one of the first oxide semiconductor layer and the second oxide semiconductor layer comprises a nanocrystal.
19. The display device according to claim 13 , wherein the liquid crystal layer is driven in a fringe field switching mode.