High-speed light sensing apparatus II
An optical apparatus including a semiconductor substrate; a first light absorption region supported by the semiconductor substrate, the first light absorption region including germanium and configured to absorb photons and to generate photo-carriers from the absorbed photons; a first layer supported by at least a portion of the semiconductor substrate and the first light absorption region, the first layer being different from the first light absorption region; one or more first switches controlled by a first control signal, the one or more first switches configured to collect at least a portion of the photo-carriers based on the first control signal; and one or more second switches controlled by a second control signal, the one or more second switches configured to collect at least a portion of the photo-carriers based on the second control signal, wherein the second control signal is different from the first control signal.
1. An optical apparatus, comprising:
a first pixel including a first absorption region;
a second pixel including a second absorption region;
wherein the first pixel, in a first plane, forms a first rectangular shape having a first length and a first width;
the second pixel, in the first plane, forms a second rectangular shape having a second length and a second width;
a direction of the first length and a direction of the second length are substantially perpendicular to each other;
a first isolation structure surrounding the first pixel; and
a second isolation structure surrounding the second pixel.
2. The optical apparatus of claim 1 , wherein the first absorption region includes SixGe(1−x), wherein 0≤x<1.
3. The optical apparatus of claim 1 , wherein the first absorption region is supported by a semiconductor substrate.
4. The optical apparatus of claim 3 , further comprising:
a first switch having a first control terminal and a first collection terminal; and
a second switch having a second control terminal and a second collection terminal;
wherein the first control terminal and the second control terminal are respectively configured to receive a first control signal and a second control signal; and the first collection terminal and the second collection terminal are respectively configured to collect a plurality of photo-carrier generated inside the first absorption region.
5. The optical apparatus of claim 4 , wherein the first control terminal, the second control terminal, the first collection terminal, and the second collection terminal are coupled to the first absorption region.
6. The optical apparatus of claim 4 , wherein the first control terminal and the second control terminal are coupled to the first absorption region; and the first collection terminal and the second collection terminal are coupled to the semiconductor substrate.
7. The optical apparatus of claim 4 , wherein the first control terminal, the second control terminal, the first collection terminal, and the second collection terminal are coupled to the semiconductor substrate.
8. The optical apparatus of claim 4 , wherein the first control terminal and the second control terminal are respectively formed as a Schottky contact, an Ohmic contact, an insulating layer, or a combination thereof having an intermediate characteristic between the two.
9. The optical apparatus of claim 4 , wherein the first collection terminal and the second collection terminal are respectively formed as an Ohmic contact.
10. A method for forming an optical apparatus, comprising:
forming a first pixel including a first absorption region;
forming a second pixel including a second absorption region;
forming a first isolation structure surrounding the first pixel; and
forming a second isolation structure surrounding the second pixel,
wherein the first pixel, in a first plane, forms a first rectangular shape having a first length and a first width,
the second pixel, in the first plane, forms a second rectangular shape having a second length and a second width, and
a direction of the first length and a direction of the second length are substantially perpendicular to each other.
11. The method of claim 10 , wherein the first absorption region includes SixGe(1−x), wherein 0≤x<1.
12. The method of claim 10 , wherein the first absorption region is supported by a semiconductor substrate.
13. The method of claim 12 , further comprising:
forming a first switch having a first control terminal and a first collection terminal; and
forming a second switch having a second control terminal and a second collection terminal;
wherein the first control terminal and the second control terminal are respectively configured to receive a first control signal and a second control signal; and the first collection terminal and the second collection terminal are respectively configured to collect a plurality of photo-carrier generated inside the first absorption region.
14. The method of claim 13 , wherein the first control terminal, the second control terminal, the first collection terminal, and the second collection terminal are coupled to the first absorption region.
15. The method of claim 13 , wherein the first control terminal and the second control terminal are coupled to the first absorption region; and the first collection terminal and the second collection terminal are coupled to the semiconductor substrate.
16. The method of claim 13 , wherein the first control terminal, the second control terminal, the first collection terminal, and the second collection terminal are coupled to the semiconductor substrate.
17. The method of claim 13 , wherein the first control terminal and the second control terminal are respectively formed as a Schottky contact, an Ohmic contact, insulating layer, or a combination thereof having an intermediate characteristic between the two.
18. The method of claim 13 , wherein the first collection terminal and the second collection terminal are respectively formed as an Ohmic contact.
19. The optical apparatus of claim 1 , wherein the first pixel further comprises a first layer supported by the first absorption region.
20. The optical apparatus of claim 1 , wherein the first pixel further comprises a well region surrounding the first absorption region.