Semiconductor manufacturing apparatus and method for manufacturing semiconductor device
Provided is a semiconductor manufacturing apparatus including: a container in which a processing chamber is installed; a stage installed in the processing chamber and configured to hold a semiconductor substrate; a gas supply line configured to supply reactive gas to the processing chamber; and a vacuum line configured to exhaust the processing chamber, wherein the semiconductor substrate includes a high-k insulating film, and as the reactive gas, mixed gas including complex-forming gas forming a volatile organometallic complex by reacting with a metal element included in the high-k insulating film and complex stabilizing material gas that increases stability of the organometallic complex is supplied.
1. A semiconductor manufacturing apparatus, comprising: a container in which a processing chamber is installed; a stage installed in the processing chamber and configured to hold a semiconductor substrate; a gas supply line configured to supply reactive gas to the processing chamber; a vacuum line configured to exhaust the processing chamber; a trap installed in the vacuum line and configured to recover the reactive gas and organometallic complex exhausted from the processing chamber, wherein the semiconductor substrate includes a high-k insulating film, and as the reactive gas, mixed gas including complex-forming gas forming a volatile organometallic complex by reacting with a metal element included in the high-k insulating film and complex stabilizing material gas that increases stability of the organometallic complex is supplied, and a collecting and sorting device configured to react the reactive gas and the organometallic complex collected by the trap with an acid treatment liquid to regenerate a raw material for the complex-forming gas and a raw material for the complex stabilizing material gas.
2. The semiconductor manufacturing apparatus according to claim 1 , wherein the metal element included in the high-k insulating film is a metal element classified in a fifth period and the following periods of a periodic table.
3. The semiconductor manufacturing apparatus according to claim 1 , wherein the metal element included in the high-k insulating film is a rare earth element.
4. The semiconductor manufacturing apparatus according to claim 1 , further comprising:
a first vaporizer connected to the gas supply line,
wherein the first vaporizer vaporizes a mixed chemical liquid of a chemical stock solution of the complex-forming gas and a chemical stock solution of the complex stabilizing material gas under a predetermined temperature and pressure condition.
5. The semiconductor manufacturing apparatus according to claim 4 , further comprising:
a chemical liquid tank connected to the first vaporizer and filled with the mixed chemical liquid; and
a mixed chemical liquid composition adjustment unit configured to monitor a composition of the mixed chemical liquid filled in the chemical liquid tank and adjust the composition of the mixed chemical liquid.
6. The semiconductor manufacturing apparatus according to claim 4 , further comprising:
a second vaporizer connected to the gas supply line,
wherein the second vaporizer vaporizes a chemical stock solution different from that of the first vaporizer under the predetermined temperature and pressure condition.