Methods of forming memory cells and memory devices
A memory cell comprising a threshold switching material over a first electrode on a substrate. The memory cell includes a second electrode over the threshold switching material and at least one dielectric material between the threshold switching material and at least one of the first electrode and the second electrode. A memory material overlies the second electrode. The dielectric material may directly contact the threshold switching material and each of the first electrode and the second electrode. Memory cells including only one dielectric material between the threshold switching material and an electrode are disclosed. A memory device including the memory cells and methods of forming the memory cells are also described.
1. A method of forming a memory cell, the method comprising:
forming a first electrode comprising a metal, a metal silicide, or polysilicon;
forming a threshold switching material comprising amorphous silicon doped with p-type dopants or n-type dopants proximate the first electrode;
forming a first dielectric material between the threshold switching material and the first electrode;
forming a second electrode adjacent to the threshold switching material; and
forming a memory material adjacent to the second electrode.
2. The method of claim 1 , further comprising forming a second dielectric material between the threshold switching material and the second electrode.
3. The method of claim 2 , wherein forming a second dielectric material between the threshold switching material and the second electrode comprises forming a second dielectric material having the same composition as the first dielectric material.
4. The method of claim 1 , wherein forming a first dielectric material comprises forming a first dielectric material comprising titanium dioxide.
5. The method of claim 1 , wherein forming a first dielectric material comprises forming a first dielectric material having a thickness between about 3 Å and about 50 Å.
6. The method of claim 1 , wherein forming a first electrode comprising a metal, a metal silicide, or polysilicon comprises forming a first electrode comprising polysilicon.
7. The method of claim 1 , wherein forming a first electrode comprising a metal, a metal silicide, or polysilicon comprises forming a first electrode comprising at least one of tungsten silicide, cobalt silicide, tantalum silicide, manganese silicide, ruthenium silicide, or nickel silicide.
8. A method of forming a memory cell, the method comprising:
forming, between a pair of electrodes, a threshold switching material comprising amorphous silicon and between about 1 atomic percent and about 30 atomic percent of at least one of carbon, oxygen, or nitrogen;
forming a dielectric material between the threshold switching material and at least one electrode of the pair of electrodes; and
forming a memory material adjacent at least one of the electrodes of the pair of electrodes.
9. The method of claim 8 , wherein forming a threshold switching material comprises forming the threshold switching material by atomic layer deposition, chemical vapor deposition, plasma-enhanced chemical vapor deposition, low pressure chemical vapor deposition, or physical vapor deposition.
10. The method of claim 8 , further comprising forming another dielectric material adjacent to the threshold switching material on a side of the threshold switching material opposite the dielectric material.
11. The method of claim 10 , wherein forming another dielectric material comprises forming the another dielectric material comprising the same composition as the dielectric material.
12. The method of claim 8 , wherein forming a dielectric material comprises forming a dielectric material comprising aluminum oxide.
13. The method of claim 8 , wherein forming a dielectric material comprises forming a dielectric material comprising aluminum oxynitride.
14. The method of claim 8 , wherein forming a dielectric material comprises forming a dielectric material to comprise oxygen, sulfur, carbon, fluorine, a metal, or combinations thereof.
15. A method of forming a memory device, the method comprising:
forming a threshold switching material comprising amorphous silicon between a first electrode and a second electrode;
forming a dielectric material comprising titanium dioxide between the threshold switching material and the first electrode; and
forming a memory material adjacent the second electrode.
16. The method of claim 15 , wherein forming a threshold switching material comprises forming a threshold switching material doped with at least one of carbon, oxygen, or nitrogen.
17. The method of claim 15 , further comprising forming a third electrode adjacent to the memory material opposite the second electrode.
18. The method of claim 15 , further comprising forming another dielectric material between the threshold switching material and the second electrode.