Semiconductor devices
A semiconductor device includes a substrate, a bit line structure on the substrate, a contact plug structure being adjacent to the bit line structure and extending in a vertical direction perpendicular to an upper surface of the substrate, and a capacitor electrically connected to the contact plug structure. The contact plug structure includes a lower contact plug, a metal silicide pattern, and an upper contact plug that are sequentially stacked on the substrate. The metal silicide pattern has an L-shaped cross section.
1. A semiconductor device comprising:
a substrate;
a bit line structure disposed on the substrate;
a contact plug structure adjacent to the bit line structure, and extending in a vertical direction perpendicular to an upper surface of the substrate; and
a capacitor electrically connected to the contact plug structure,
wherein the contact plug structure includes a lower contact plug, a metal silicide pattern, and an upper contact plug that are sequentially stacked on the substrate, the upper contact plug having an outer sidewall on a side opposite the bit line structure, and the outer sidewall of the upper contact plug is further from the bit line structure than an outer sidewall on a side opposite the bit line structure of the lower contact plug, and
the metal silicide pattern has an L-shaped cross section.
2. The semiconductor device according to claim 1 , wherein a sidewall and a lower surface of the metal silicide pattern contact the lower contact plug.
3. The semiconductor device according to claim 1 , wherein the metal silicide pattern includes a first portion extending in a horizontal direction parallel to the upper surface of the substrate and a second portion extending in the vertical direction from the first portion, and
the upper contact plug contacts an upper surface of the first portion of the metal silicide pattern and a sidewall of the second portion of the metal silicide pattern.
4. The semiconductor device according to claim 3 , wherein the upper contact plug at least partially contacts an upper surface of the second portion of the metal silicide pattern.
5. The semiconductor device according to claim 1 , further comprising an active pattern defined by a device isolation pattern disposed in the substrate,
wherein the contact plug contacts an upper surface of the active pattern.
6. The semiconductor device according to claim 5 , further comprising a gate structure disposed on the active pattern and the device isolation pattern,
wherein the bit line structure is disposed on the active pattern, the device isolation pattern, and the gate structure.
7. The semiconductor device according to claim 1 , further comprising a spacer structure disposed on a sidewall of the bit line structure.
8. The semiconductor device according to claim 7 , wherein the spacer structure includes:
a first spacer contacting the sidewall of the bit line structure;
a second spacer contacting a sidewall of the first spacer; and
a third spacer contacting an upper portion of the first spacer and covering an upper surface and a sidewall of the second spacer.
9. The semiconductor device according to claim 7 , wherein the spacer structure includes first, second, and third spacers that are sequentially stacked from the sidewall of the bit line structure, and
the second spacer is an air spacer.
10. The semiconductor device according to claim 7 , wherein the metal silicide pattern includes a first portion extending in a horizontal direction parallel to the upper surface of the substrate and a second portion extending in the vertical direction from the first portion, and
the first portion of the metal silicide pattern contacts the spacer structure.
11. The semiconductor device according to claim 10 , wherein the second portion of the metal silicide pattern contacts the spacer structure.
12. The semiconductor device according to claim 7 , wherein the upper contact plug contacts an upper surface of the bit line structure and an upper surface of the spacer structure, and
the upper contact plug includes tungsten (W), aluminum (Al), copper (Cu), and/or impurity doped polysilicon.
13. The semiconductor device according to claim 1 , wherein the bit line structure includes a conductive pattern, a barrier pattern, a metal pattern, and a capping pattern that are sequentially stacked, and
a lower surface of the metal silicide pattern is disposed higher than an upper surface of the metal pattern.
14. A semiconductor device comprising:
a substrate;
a first bit line structure disposed on the substrate;
a second bit line structure disposed on the substrate;
a contact plug disposed between the first bit line structure and the second bit line structure; and
a capacitor disposed on the contact plug and electrically connected to the contact plug,
wherein the contact plug includes a lower contact plug, a metal silicide pattern, and an upper contact plug that are sequentially stacked on the substrate, the upper contact plug contacting the second bit line structure, and
the metal silicide pattern is disposed on an inner surface of a recess in an upper surface of the lower contact plug.
15. The semiconductor device according to claim 14 , wherein the metal silicide pattern includes a curved first portion and a second portion extending from the curved first portion.
16. The semiconductor device according to claim 15 , wherein the upper contact plug contacts an upper surface of the first portion of the metal silicide pattern and a sidewall and an upper surface of the second portion of the metal silicide pattern.
17. The semiconductor device according to claim 15 , further comprising a spacer structure disposed on a sidewall of the first bit line structure,
wherein a sidewall of the first portion of the metal silicide pattern contacts the spacer structure.
18. A semiconductor device comprising:
a substrate including a first active pattern and a device isolation pattern surrounding the first active pattern;
a first gate structure disposed on the substrate;
a first bit line structure disposed on the substrate;
a first contact plug structure disposed on the first active pattern, and extending in a vertical direction perpendicular to an upper surface of the substrate; and
a capacitor electrically connected to the first contact plug structure,
wherein the first contact plug structure includes a first lower contact plug, a first metal silicide pattern, and a first upper contact plug that are sequentially stacked on the first active pattern, the upper contact plug having an outer sidewall on a side opposite the bit line structure, and the outer sidewall of the upper contact plug is further from the bit line structure than an outer sidewall on a side opposite the bit line structure of the lower contact plug, and
the first metal silicide pattern has an L-shaped cross section.
19. The semiconductor device according to claim 18 , further comprising:
a second gate structure disposed on the substrate;
a second bit line structure disposed on the substrate; and
a second active pattern disposed in the substrate.
20. The semiconductor device according to claim 19 , further comprising a second contact plug that is disposed between the first bit line structure and the second bit line structure, and includes a second lower contact plug, a second metal silicide pattern, and a second upper contact plug that are sequentially stacked on the second active pattern.