IP Library Granted Patent US 11,056,534
Granted Patent B2
US 11,056,534 · App. 16/460,820 · Granted Jul 6, 2021

One selector one resistor MRAM crosspoint memory array fabrication methods

Inventors: Lei Wan (San Jose, CA); Tsai-Wei Wu (San Jose, CA); Jordan A. Katine (Mountain View, CA)
Assignee: SanDisk Technologies LLC
H01L27/222H01L27/224H01L27/2427H01L43/12H01L43/10
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Quick Facts
Patent No.
US 11,056,534
App. No.
16/460,820
Granted
Jul 6, 2021
Kind
B2
Abstract

A memory array is provided that includes a first memory level having a plurality of memory cells each including a corresponding magnetic memory element coupled in series with a corresponding selector element, and a plurality of vias, each of the vias coupled in series with a corresponding one of the memory cells.

Claims (32)

1. A memory array comprising:

a first memory level comprising:

a plurality of memory cells each comprising a corresponding magnetic memory element coupled in series with a corresponding selector element;

a plurality of vias, each of the vias coupled in series with a corresponding one of the memory cells;

a plurality of word lines and a plurality of bit lines, wherein each memory cell is disposed between one of the plurality of word lines and one of the plurality of bit lines,

wherein the plurality of memory cells comprise:

a first memory cell disposed below a corresponding one of the vias; and

a second memory cell disposed above a corresponding one of the vias.

2. The memory array of claim 1 , wherein each memory cell is disposed above or below a corresponding one of the vias.

3. The memory array of claim 1 , wherein the plurality of memory cells comprises a first layer of memory cells and a second layer of memory cells disposed above the first layer of memory cells.

4. The memory array of claim 1 , wherein each selector element comprises one or more of a threshold selector device, a conductive bridge threshold selector device, an ovonic threshold switch, and a Metal Insulator Transition of a Phase Transition Material type threshold selector device.

5. The memory array of claim 1 , wherein each selector element comprises one or more of SiTe, CTe, BTe, AlTe, SiAsTe, GeAsSe, GeAsSeSi, V 0 2 , and NbO 2 .

6. The memory array of claim 1 , wherein each selector element comprises HfOx doped with one or more of Cu, Ag, or similar metallic ion.

7. The memory array of claim 1 , wherein each memory cell is vertically-oriented.

8. The memory array of claim 1 , comprising a cross-point memory array.

9. The memory array of claim 1 , further comprising a second memory level disposed above the first memory level.

10. The memory array of claim 9 , wherein the first memory level and the second memory level share one of the plurality of word lines and the plurality of bit lines.

11. A method of forming a memory array, the method comprising:

forming a plurality of first memory cell pillars, each first memory cell pillar comprising a corresponding first magnetic material layer structure and a corresponding first selector element;

forming a first dielectric material layer around each first memory cell pillar;

forming first interstices between adjacent first memory cell pillars;

forming first vias in the first interstices;

forming a plurality of second memory cell pillars, each second memory cell pillar comprising a corresponding second magnetic material layer structure and a corresponding second selector element;

forming a second dielectric material layer around each second memory cell pillar;

forming second interstices between adjacent second memory cell pillars; and

forming second vias in the second interstices,

wherein each second memory cell pillar is disposed over a corresponding one of the first vias, and each first memory cell pillar is disposed under a corresponding one of the second vias.

12. The method of claim 11 , wherein the first selector elements comprise one or more of SiTe, CTe, BTe, AlTe, SiAsTe, GeAsSe, GeAsSeSi, VO 2 , and NbO 2 .

13. The method of claim 11 , wherein the first selector elements comprise a volatile conductive bridge type of selector with HfOx doped with one or more of Cu, Ag, or similar ions.

14. The method of claim 11 , wherein each first memory cell pillar is vertically-oriented.

15. The method of claim 11 , wherein each second memory cell pillar is vertically-oriented.

16. The method of claim 11 , wherein the memory array comprises a cross-point memory array.

Assignments (4)
SECURITY AGREEMENT Recorded Apr 25, 2025
From: SANDISK TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 071050/0001 →
PARTIAL RELEASE OF SECURITY INTERESTS Recorded Apr 25, 2025
From: JPMORGAN CHASE BANK, N.A., AS AGENT
To: SANDISK TECHNOLOGIES, INC.
Reel/Frame 071382/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 31, 2024
From: SANDISK TECHNOLOGIES LLC
To: SANDISK TECHNOLOGIES, INC.
Reel/Frame 069796/0423 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 2, 2019
From: WAN, LEI; WU, TSAI-WEI; KATINE, JORDAN A.
To: SANDISK TECHNOLOGIES LLC
Reel/Frame 049658/0561 →
Continuity (2)
Provisional Application 62867590 · Jun 27, 2019
Related Publication 20200411589A1 · Dec 31, 2020
Cited By (4)
US 12,402,324 US 12,414,307 US 12,543,508 US 12,581,665