High-yield tunable radio frequency (RF) filter with auxiliary capacitors and non-volatile RF switches
A high-yield, tunable radio frequency (RF) filter includes a plurality of process-dependent capacitors and a plurality of non-volatile RF switches. Each of the plurality of process-dependent capacitors is connected to at least one of the plurality of non-volatile RF switches. An auxiliary capacitor in the plurality of process-dependent capacitors is engaged by an ON-state non-volatile RF switch in the plurality of non-volatile RF switches. A primary capacitor in the plurality of process-dependent capacitors is disengaged by an OFF-state non-volatile RF switch in the plurality of non-volatile RF switches. The auxiliary capacitor substitutes for the primary capacitor.
1. A high-yield tunable radio frequency (RF) filter comprising:
a plurality of process-dependent capacitors;
a plurality of non-volatile RF switches, wherein each of said plurality of process-dependent capacitors is connected to at least one of said plurality of non-volatile RF switches;
wherein said at least one of said plurality of non-volatile RF switches is a phase-change material (PCM) RF switch including a PCM and a heating element underlying said PCM;
first electrical connectors above said PCM coupled to said PCM;
second electrical connectors below said heating element coupled to said heating element;
an auxiliary capacitor in said plurality of process-dependent capacitors being engaged by an ON-state non-volatile RF switch in said plurality of non-volatile RF switches;
a primary capacitor in said plurality of process-dependent capacitors being disengaged by an OFF-state non-volatile RF switch in said plurality of non-volatile RF switches.
2. The high-yield tunable RF filter of claim 1 , wherein said PCM RF switch further comprises a contact uniformity support layer situated on said PCM.
3. The high-yield tunable RF filter of claim 1 , wherein said heating element is transverse to said PCM, said heating element approximately underlying an active segment of said PCM.
4. The high-yield tunable RF filter of claim 1 , wherein said PCM is selected from the group consisting of germanium telluride (Ge X Te Y ), germanium antimony telluride (Ge X Sb Y Te Z ), germanium selenide (Ge X Se Y ), and any other chalcogenide.
5. The high-yield tunable RF filter of claim 1 , wherein said PCM RF switch further comprises PCM contacts situated on top of passive segments of said PCM and not situated on sides of said PCM;
wherein said heating element is transverse to said PCM such that said PCM contacts situated on top of said passive segments of said PCM do not overlie said heating element.
6. The high-yield tunable RF filter of claim 1 , wherein said auxiliary capacitor engaged by said ON-state non-volatile RF switch causes said high-yield tunable RF filter to substantially reject an undesired frequency and to substantially admit a desired frequency.
7. The high-yield tunable RF filter of claim 6 , wherein said desired frequency corresponds to a first wireless communication standard and said undesired frequency corresponds to a second wireless communication standard.
8. The high-yield tunable RF filter of claim 6 , wherein said desired frequency is between approximately 2.1 GHz and approximately 2.5 GHz, and said undesired frequency is between approximately 3.3 GHz and approximately 5.8 GHz.
9. The high-yield tunable RF filter of claim 1 , wherein said auxiliary capacitor is approximately ten percent (10%) greater than said primary capacitor.
10. The high-yield tunable RF filter of claim 1 , wherein said auxiliary capacitor is approximately ten percent (10%) less than said primary capacitor.
11. The high-yield tunable RF filter of claim 1 , wherein said plurality of process-dependent capacitors comprise a parallel plate capacitor.
12. The high-yield tunable RF filter of claim 1 , wherein said plurality of process-dependent capacitors comprise a metal-insulator-metal (MIM) capacitor formed with a top capacitor plate and a high-k film below said top capacitor plate, wherein an interconnect metal is a bottom capacitor plate.
13. The high-yield tunable RF filter of claim 1 , wherein said plurality of process-dependent capacitors comprise a vertical metal-oxide-metal (MOM) capacitor, wherein a first interconnect metal is a bottom capacitor plate, and a second interconnect metal is a top capacitor plate.
14. A high-yield tunable radio frequency (RF) filter comprising:
a plurality of capacitors;
a plurality of non-volatile RF switches, wherein each of said plurality of capacitors is connected to at least one of said plurality of non-volatile RF switches;
wherein said at least one of said plurality of non-volatile RF switches is a phase-change material (PCM) RF switch including a PCM and a heating element underlying said PCM;
first electrical connectors above said PCM coupled to said PCM;
second electrical connectors below said heating element coupled to said heating element;
a first capacitor in said plurality of capacitors engaged by a first non-volatile RF switch in said plurality of non-volatile RF switches;
a second capacitor in said plurality of capacitors disengaged by a second non-volatile RF switch in said plurality of non-volatile RF switches.
15. The high-yield tunable RF filter of claim 14 , wherein said PCM RF switch further comprises a contact uniformity support layer situated on said PCM.
16. The high-yield tunable RF filter of claim 14 , wherein said heating element is transverse to said PCM, said heating element approximately underlying an active segment of said PCM.
17. The high-yield tunable RF filter of claim 14 , wherein said PCM is selected from the group consisting of germanium telluride (Ge X Te Y ), germanium antimony telluride (Ge X Sb Y Te Z ), germanium selenide (Ge X Se Y ), and any other chalcogenide.
18. The high-yield tunable RF filter of claim 14 , wherein each of said PCM RF switches further comprises PCM contacts situated on top of passive segments of said PCM and not situated on sides of said PCM;
wherein said heating element is transverse to said PCM such that said PCM contacts situated on top of said passive segments of said PCM do not overlie said heating element.
19. The high-yield tunable RF filter of claim 14 , wherein said first capacitor engaged by said first non-volatile RF switch causes said high-yield tunable RF filter to substantially reject an undesired frequency and to substantially admit a desired frequency.