IP Library Granted Patent US 11,469,201
Granted Patent B2
US 11,469,201 · App. 16/721,475 · Granted Oct 11, 2022

Semiconductor package and method for fabricating base for semiconductor package

Inventors: Tzu-Hung Lin (Hsin-Chu, TW); Wen-Sung Hsu (Hsin-Chu, TW); Ta-Jen Yu (Hsin-Chu, TW); Andrew C. Chang (Hsinchu, TW)
Assignee: MediaTek Inc.
H01L24/13H01L21/48H01L23/498H01L23/49541H01L24/05H01L24/14H01L24/16H01L24/29H01L24/32H01L24/73H01L28/00H05K1/111H01L23/49811H01L23/49827H01L24/11H01L24/81H01L2224/0345H01L2224/0346H01L2224/0401H01L2224/05022H01L2224/05073H01L2224/05124H01L2224/05147H01L2224/05562H01L2224/05572H01L2224/05573H01L2224/05647H01L2224/05666H01L2224/11462H01L2224/11849H01L2224/131H01L2224/1308H01L2224/13026H01L2224/13083H01L2224/13147H01L2224/13155H01L2224/16235H01L2224/16237H01L2224/16238H01L2224/3224H01L2224/73204H01L2224/81191H01L2224/81815H01L2924/00014H01L2924/12042H05K3/3436H05K2201/0376H05K2201/09472H05K2201/10674Y02P70/50
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Quick Facts
Patent No.
US 11,469,201
App. No.
16/721,475
Granted
Oct 11, 2022
Kind
B2
Abstract

The invention provides a semiconductor package and a method for fabricating a base for a semiconductor package. The semiconductor package includes a conductive trace embedded in a base. A semiconductor device is mounted on the conductive trace via a conductive structure.

Claims (29)

1. A semiconductor package, comprising:

a base comprising a recess;

a copper trace embedded in the recess such that a top surface of the copper trace is below a top surface of the base, wherein the top surface of the copper trace is exposed within the recess; and

a semiconductor device mounted on the copper trace via a conductive structure that is in direct contact with the top surface of the copper trace, wherein

at least a portion of the conductive structure at or above the top surface of the base has a width that is greater than a width of the copper trace.

2. The semiconductor package of claim 1 , wherein a bottom surface of the recess and at least one side wall of the recess are formed of a same insulative material.

3. The semiconductor package of claim 1 , wherein the base covers an entirety of a bottom surface of the copper trace underneath the conductive structure.

4. The semiconductor package of claim 1 , wherein the copper trace is elongated and carries a signal or a ground across at least a portion of the base.

5. The semiconductor package of claim 1 , wherein the conductive structure is in contact with a portion of the top surface of the base and with a side wall of the recess.

6. The semiconductor package of claim 1 , wherein the conductive structure comprises a conductive pillar structure comprising an under bump metallurgy (UBM) layer, a copper layer, a solder cap and a conductive buffer layer between the copper layer and the solder cap.

7. The semiconductor package of claim 6 , wherein the UBM layer contacts an exposed portion of a metal pad of the semiconductor device, and wherein the solder cap is in contact with at least a portion of the top surface of the base, at least one side wall of the recess and the top surface of the copper trace.

8. A semiconductor package, comprising:

a base comprising a top surface and a recess having an insulative bottom surface below the top surface;

a conductive trace embedded in the recess such that the conductive trace is in contact with the insulative bottom surface, wherein a top surface of the conductive trace is below the top surface of the base; and

a semiconductor device mounted on the conductive trace via a conductive structure, wherein at least a portion of the conductive structure at or above the top surface of the base has a width that is greater than a width of the conductive trace,

wherein the conductive trace is elongated and carries a signal or a ground across at least a portion of the base.

9. The semiconductor package of claim 8 , wherein the conductive structure is in contact with an entire width of the top surface of the conductive trace.

10. The semiconductor package of claim 8 , wherein the insulative bottom surface of the recess and at least one side wall of the recess are formed of a same insulative material.

11. The semiconductor package of claim 8 , wherein the semiconductor device comprises a body having a first surface, a metal pad on the first surface, and an insulation layer covering at least a portion of the first surface of the body and a portion of the metal pad, wherein an exposed portion of the metal pad is mounted on the conductive trace via the conductive structure.

12. The semiconductor package of claim 8 , and wherein the top surface of the conductive trace and a bottom surface of the conductive trace have a same width.

13. The semiconductor package of claim 12 , wherein the width of the top surface of the conductive trace and the bottom surface of the conductive trace is the same as a width of a bottom surface of the recess.

14. The semiconductor package of claim 8 , wherein the conductive trace is a single layer.

15. The semiconductor package of claim 14 , wherein the base covers an entirety of a bottom surface of the conductive trace underneath the conductive structure.

16. The semiconductor package of claim 8 , further comprising:

an underfill between the semiconductor device and the base.

17. The semiconductor package of claim 16 , wherein the underfill comprises capillary underfill (CUF), molded underfill (MUF), nonconductive paste (NCP), nonconductive film (NCF) or a combination thereof.

18. The semiconductor package of claim 8 , wherein the conductive structure comprises a conductive pillar structure comprising an under bump metallurgy (UBM) layer, a copper layer, a solder cap and a conductive buffer layer between the copper layer and the solder cap.

19. The semiconductor package of claim 18 , wherein the copper layer has a width that is greater than a width of the conductive trace.

20. The semiconductor package of claim 18 , wherein the UBM layer contacts an exposed portion of a metal pad of the semiconductor device, and wherein the solder cap is in contact with at least a portion of the top surface of the base, at least one side wall of the recess and the top surface of the conductive trace.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 19, 2019
From: LIN, TZU-HUNG; HSU, WEN-SUNG; YU, TA-JEN; CHANG, ANDREW C.
To: MEDIATEK, INC.
Reel/Frame 051337/0981 →
Continuity (5)
Continuation 15194658 · Jun 28, 2016
Continuation 14173976 · Feb 6, 2014
Division 13721983 · Dec 20, 2012
Provisional Application 61677835 · Jul 31, 2012
Related Publication 20200176408A1 · Jun 4, 2020