Methods for depositing tungsten or molybdenum films
Described are vapor deposition methods for depositing metal films or layers onto a substrate, wherein the metal is molybdenum or tungsten; the methods involve organometallic precursor compounds that contain the metal and one or more carbon-containing ligands, and include depositing a metal layer formed from the metal of the precursor, onto a substrate, followed by introducing oxidizer to the formed metal layer.
1. A deposition method for forming a metal film on a substrate, wherein the method is a pulsed chemical vapor deposition method comprising:
continuously flowing a gaseous precursor produced from an organometallic precursor and a reducing gas co-reactant into a deposition chamber,
exposing the substrate to the gaseous precursor and the reducing gas co-reactant, the substrate having a temperature that is below 400 degrees Celsius, to form a deposited metal layer thereon, the organometallic precursor comprising a metal and one or more carbon-containing ligands, wherein the metal is molybdenum or tungsten,
flowing an oxidizer into the deposition chamber by a pulsed flow wherein the oxidizer is present in the deposition chamber with the continuously flowing gaseous precursor, and
exposing the deposited metal layer to the oxidizer, forming the metal film.
2. The method of claim 1 wherein the method forms a metal film having a thickness that does not exceed 50 angstroms.
3. The method of claim 1 further comprising, after exposing the deposited metal and the carbon to the oxidizer, flowing hydrogen gas into the deposition chamber.