Ultrathin solid state dies and methods of manufacturing the same
Various embodiments of SST dies and solid state lighting (“SSL”) devices with SST dies, assemblies, and methods of manufacturing are described herein. In one embodiment, a SST die includes a substrate material, a first semiconductor material and a second semiconductor material on the substrate material, an active region between the first semiconductor material and the second semiconductor material, and a support structure defined by the substrate material. In some embodiments, the support structure has an opening that is vertically aligned with the active region.
1. A solid state transducer (SST) die, comprising:
a growth substrate;
a continuous layer of a first semiconductor material coupled to the growth substrate;
a plurality of SST structures on the growth substrate, each SST structure including:
a portion of the continuous layer of the first semiconductor material,
a second semiconductor material, and
a light emitting material between the portion of the continuous layer of the first semiconductor material and the second semiconductor material;
a first contact in contact with the continuous layer of the first semiconductor material; and
a second contact in contact with the second semiconductor material of each of the plurality of SST structures,
wherein the growth substrate includes a plurality of openings, each opening aligned with the light emitting material of a corresponding one of the plurality of SST structures.
2. The SST die of claim 1 , wherein the growth substrate includes a support layer and a buffer layer.
3. The SST die of claim 2 , wherein the first semiconductor material is in direct contact with the buffer layer.
4. The SST die of claim 2 , wherein the first contact is aligned with a region of the support layer in which no opening is formed.
5. The SST die of claim 2 , wherein the support layer is opaque to light emitted by the light emitting material.
6. The SST die of claim 2 , wherein the support layer comprises poly-aluminum nitride.
7. The SST die of claim 2 , wherein the buffer layer comprises aluminum nitride (AlN), GaN, zinc nitride (ZnN), zinc oxide (ZnO 2 ), or a combination thereof.
8. The SST die of claim 1 , further comprising a gap between the first contact and the second semiconductor material of each of the plurality of SST structures.
9. The SST die of claim 8 , further comprising an insulating material on the SST structure, the first contact and the second contact.
10. The SST die of claim 9 , wherein the insulating material extends into the gap.
11. The SST die of claim 9 , wherein the insulating material comprises silicon dioxide (SiO 2 ), silicon nitride (SiN), hafnium silicate (HfSiO 4 ), zirconium silicate (ZrSiO 4 ), hafnium dioxide (HfO 2 ), zirconium dioxide (ZrO 2 ), aluminum oxide (Al 2 O 3 ), or a combination thereof.
12. The SST die of claim 9 , wherein the insulating material has a dielectric constant higher than about 1.0 at 20° C. under 1 kHz.
13. The SST die of claim 9 , further comprising a conductive material on the insulating material and in contact with the first contact and the second contact.
14. The SST die of claim 13 , wherein the conductive material comprises indium tin oxide (“ITO”), aluminum zinc oxide (“AZO”), fluorine-doped tin oxide (“FTO”), copper (Cu), aluminum (Al), silver (Ag), gold (Au), platinum (Pt), or a combination thereof.
15. The SST die of claim 13 , wherein the conductive material is separated by one or more channels into a first terminal in electrical contact with the first contact and a second terminal in electrical contact with the second contact.
16. The SST die of claim 1 , wherein the growth substrate has a thickness of about 20 to about 50 microns.
17. A solid state transducer (SST) die, comprising:
a growth substrate comprising a plurality of openings;
a continuous layer of a first semiconductor material coupled to the growth substrate and extending over the plurality of openings;
a plurality of SST structures on the growth substrate, each SST structure aligned with a corresponding one of the plurality of openings and including:
a portion of the continuous layer of the first semiconductor material,
a second semiconductor material, and
a light emitting material between the portion of the continuous layer of the first semiconductor material and the second semiconductor material;
a first contact in contact with the continuous layer of the first semiconductor material; and
a second contact in contact with the second semiconductor material of each of the plurality of SST structures.
18. The SST die of claim 17 , wherein the first contact and the second contact are on an opposite side of the continuous layer of the first semiconductor material from the growth substrate.
19. The SST die of claim 17 , wherein each of the plurality of openings has a generally polygonal cross-section.
20. The SST die of claim 17 , wherein each of the plurality of openings has a generally circular cross-section.