Vertical inductor for WLCSP
Embodiments of the invention include a microelectronic device and methods of forming a microelectronic device. In an embodiment the microelectronic device includes a semiconductor die and an inductor that is electrically coupled to the semiconductor die. The inductor may include one or more conductive coils that extend away from a surface of the semiconductor die. In an embodiment each conductive coils may include a plurality of traces. For example, a first trace and a third trace may be formed over a first dielectric layer and a second trace may be formed over a second dielectric layer and over a core. A first via through the second dielectric layer may couple the first trace to the second trace, and a second via through the second dielectric layer may couple the second trace to the third trace.
1. An inductor structure, comprising:
a first contact pad laterally spaced apart from a second contact pad;
a conductive coil coupling the first contact pad to the second contact pad; and
a molding compound over the first contact pad, over the second contact pad, and over the conductive coil, the molding compound completely laterally surrounding the first contact pad, completely laterally surrounding the second contact pad, and laterally surrounding the conductive coil, wherein the molding compound has a bottommost surface at a same level as a bottommost surface of the first contact pad and a bottommost surface of the second contact pad.
2. The inductor structure of claim 1 , wherein the conductive coil is a wire.
3. The inductor structure of claim 1 , further comprising:
a first solder ball coupled to the first contact pad on a side of the first contact pad opposite the conductive coil; and
a second solder ball coupled to the second contact pad on a side of the second contact pad opposite the conductive coil.
4. The inductor structure of claim 1 , wherein the molding compound comprises an epoxy compound.
5. An integrated circuit structure, comprising:
a semiconductor die; and
an inductor structure coupled to the semiconductor die, the inductor structure comprising:
a first contact pad laterally spaced apart from a second contact pad;
a conductive coil coupling the first contact pad to the second contact pad; and
a molding compound over the first contact pad, over the second contact pad, and over the conductive coil, the molding compound completely laterally surrounding the first contact pad, completely laterally surrounding the second contact pad, and laterally surrounding the conductive coil, wherein the molding compound has a bottommost surface at a same level as a bottommost surface of the first contact pad and a bottommost surface of the second contact pad.
6. The integrated circuit structure of claim 5 , wherein the conductive coil is a wire.
7. The integrated circuit structure of claim 5 , the inductor structure further comprising:
a first solder ball coupled to the first contact pad on a side of the first contact pad opposite the conductive coil; and
a second solder ball coupled to the second contact pad on a side of the second contact pad opposite the conductive coil.
8. The integrated circuit structure of claim 5 , wherein the molding compound comprises an epoxy compound.
9. A computing device, comprising:
a board; and
a component coupled to the board, the component including an integrated circuit structure, the integrated circuit structure comprising:
a semiconductor die; and
an inductor structure coupled to the semiconductor die, the inductor structure comprising:
a first contact pad laterally spaced apart from a second contact pad;
a conductive coil coupling the first contact pad to the second contact pad; and
a molding compound over the first contact pad, over the second contact pad, and over the conductive coil, the molding compound completely laterally surrounding the first contact pad, completely laterally surrounding the second contact pad, and laterally surrounding the conductive coil, wherein the molding compound has a bottommost surface at a same level as a bottommost surface of the first contact pad and a bottommost surface of the second contact pad.
10. The computing device of claim 9 , further comprising:
a memory coupled to the board.
11. The computing device of claim 9 , further comprising:
a communication chip coupled to the board.
12. The computing device of claim 9 , further comprising:
a battery coupled to the board.
13. The computing device of claim 9 , wherein the component is a packaged integrated circuit die.