Semiconductor device containing bit lines separated by air gaps and methods for forming the same
A semiconductor structure includes semiconductor devices located over a substrate, bit lines electrically connected to the semiconductor devices and having a respective reentrant vertical cross-sectional profile within a vertical plane that is perpendicular to a lengthwise direction along which the bit lines laterally extend, and dielectric portions that are interlaced with the bit lines along a horizontal direction that is perpendicular to the lengthwise direction. The dielectric portions may contain air gaps. A bit-line-contact via structure can be formed on top of a bit line. In some embodiments, dielectric cap strips may be located on top surface of the dielectric portions and may cover peripheral regions of the top surfaces of the bit lines without covering middle regions of the top surfaces of the bit lines.
1. A semiconductor structure, comprising:
semiconductor devices located over a substrate;
bit lines electrically connected to the semiconductor devices and having a respective reentrant vertical cross-sectional profile within a vertical plane that is perpendicular to a lengthwise direction along which the bit lines laterally extend;
dielectric rails that are interlaced with the bit lines along a horizontal direction that is perpendicular to the lengthwise direction; and
dielectric cap strips located on top surface of the dielectric rails and covering peripheral regions of the top surfaces of the bit lines and not covering middle regions of the top surfaces of the bit lines;
wherein top surfaces of the dielectric rails are located within a horizontal plane including top surfaces of the bit lines; and
wherein lengthwise edges of the dielectric cap strips are laterally offset by a lateral offset distance from a most proximal lengthwise top edge of lengthwise top edges of the bit lines.
2. The semiconductor structure of claim 1 , wherein each of the dielectric cap strips has a thickness that is the same as the lateral offset distance.
3. A semiconductor structure, comprising:
semiconductor devices located over a substrate;
bit lines electrically connected to the semiconductor devices and having a respective reentrant vertical cross-sectional profile within a vertical plane that is perpendicular to a lengthwise direction along which the bit lines laterally extend;
dielectric rails that are interlaced with the bit lines along a horizontal direction that is perpendicular to the lengthwise direction; and
dielectric cap strips located on top surface of the dielectric rails and covering peripheral regions of the top surfaces of the bit lines and not covering middle regions of the top surfaces of the bit lines;
wherein top surfaces of the dielectric rails are located within a horizontal plane including top surfaces of the bit lines; and
wherein each of the dielectric cap strips has a pair of convex top surface segments that are adjoined to a planar top surface segment and laterally extend along the lengthwise direction.
4. A semiconductor structure, comprising:
semiconductor devices located over a substrate;
bit lines electrically connected to the semiconductor devices and having a respective reentrant vertical cross-sectional profile within a vertical plane that is perpendicular to a lengthwise direction along which the bit lines laterally extend;
dielectric rails that are interlaced with the bit lines along a horizontal direction that is perpendicular to the lengthwise direction;
dielectric cap strips located on top surface of the dielectric rails and covering peripheral regions of the top surfaces of the bit lines and not covering middle regions of the top surfaces of the bit lines;
a via-level dielectric layer overlying the dielectric cap strips; and
a bit-line-contact via structure vertically extending through the via-level dielectric layer and contacting a top surface of one of the bit lines;
wherein the bit-line-contact via structure comprises a straight sidewall segment in contact with the via-level dielectric layer and a pair of concave sidewall segments in contact with convex sidewall segments of a pair of dielectric cap strips of the dielectric cap strips.
5. A semiconductor structure, comprising:
semiconductor devices located over a substrate;
bit lines electrically connected to the semiconductor devices and having a respective reentrant vertical cross-sectional profile within a vertical plane that is perpendicular to a lengthwise direction along which the bit lines laterally extend;
dielectric rails that are interlaced with the bit lines along a horizontal direction that is perpendicular to the lengthwise direction; and
dielectric cap strips located on top surface of the dielectric rails and covering peripheral regions of the top surfaces of the bit lines and not covering middle regions of the top surfaces of the bit lines;
wherein each of the reentrant vertical cross-sectional profiles has a lower taper region in which a width of a respective bit line decreases with a vertical distance from the substrate, a reverse-taper region in which the width of the respective bit line increases with the vertical distance from the substrate, and an upper taper region in which the width of the respective bit line decreases with the vertical distance from the substrate.
6. The semiconductor structure of claim 3 , wherein:
the dielectric rails comprise cavity-containing dielectric rails containing air gaps; and
each of the air gaps is located entirely below the upper taper region of the bit lines.
7. The semiconductor structure of claim 6 , wherein each of the reentrant vertical cross-sectional profiles comprises a pair of concave surface segments of a respective reverse-taper region that is in contact with a pair of convex surface segments of a pair of cavity-containing dielectric portions of the cavity-containing dielectric portions.
8. The semiconductor structure of claim 7 , wherein each of the reentrant vertical cross-sectional profiles further comprises:
a pair of first straight tapered surface segments of a respective lower taper region in contact with a pair of first straight surface segments of the pair of cavity-containing dielectric portions; and
a pair of second straight tapered surface segments of a respective upper taper region in contact with a pair of second straight surface segments of the pair of cavity-containing dielectric portions.
9. The semiconductor structure of claim 7 , wherein each of the reentrant vertical cross-sectional profiles further comprises:
a pair of first straight tapered surface segments of a respective lower taper region exposed to the air gaps; and
a pair of second straight tapered surface segments of a respective upper taper region in contact with a pair of second straight surface segments of the pair of cavity-containing dielectric portions.
10. A semiconductor structure, comprising:
semiconductor devices located over a substrate;
bit lines electrically connected to the semiconductor devices and having a respective reentrant vertical cross-sectional profile within a vertical plane that is perpendicular to a lengthwise direction along which the bit lines laterally extend;
dielectric rails that are interlaced with the bit lines along a horizontal direction that is perpendicular to the lengthwise direction; and
dielectric cap strips located on top surface of the dielectric rails and covering peripheral regions of the top surfaces of the bit lines and not covering middle regions of the top surfaces of the bit lines;
wherein the dielectric rails comprise solid dielectric rails containing no air gaps.