Solid state image sensor, production method thereof and electronic device
A solid state image sensor includes a semiconductor substrate where photoelectric conversion regions for converting light into charges are arranged per pixel planarly arranged; an organic photoelectric conversion film laminated at a light irradiated side of the semiconductor substrate via an insulation film and formed at the regions where the pixels are formed; a lower electrode formed at and in contact with the organic photoelectric conversion film at a semiconductor substrate side; a first upper electrode laminated at a light irradiated side of the organic photoelectric conversion film and formed such that ends of the first upper electrode are substantially conform with ends of the organic photoelectric conversion film when the solid state image sensor is planarly viewed; and a film stress suppressor for suppressing an effect of a film stress on the organic photoelectric conversion film, the film stress being generated on the first upper electrode.
1. A solid state image sensor, comprising:
a semiconductor substrate where photoelectric conversion regions for converting light into charges are arranged per a plurality of pixels planarly arranged;
an organic photoelectric conversion film laminated at a light irradiated side of the semiconductor substrate via a first insulation film and formed at the regions where a plurality of the pixels are formed;
a lower electrode formed at and in contact with the organic photoelectric conversion film at a semiconductor substrate side;
a first upper electrode laminated at a light irradiated side of the organic photoelectric conversion film and formed such that ends of the first upper electrode substantially conform with ends of the organic photoelectric conversion film when the solid state image sensor is planarly viewed; and
a film stress suppressor for suppressing an effect of a film stress on the organic photoelectric conversion film, the film stress being generated on the first upper electrode and provided above the lower electrode at each instance.
2. The solid state image sensor according to claim 1 , wherein the film stress suppressor is a second upper electrode laminated at a light irradiated side of the first upper electrode, and the second upper electrode is formed on the first upper electrode at a region greater than a region where the first upper electrode is formed to connect a peripheral region of the second upper electrode to the first insulation film.
3. The solid state image sensor according to claim 2 , wherein the first upper electrode and the second upper electrode are formed of a same material or a material having a substantially same property.
4. The solid state image sensor according to claim 1 , further comprising:
a second insulation film laminated on the first upper electrode such that ends of the organic photoelectric conversion film and the first upper electrode are substantially conformed.
5. The solid state image sensor according to claim 1 , wherein the film stress suppressor is formed around an outer periphery of the first upper electrode to connect the ends of the first upper electrode and the first insulation film.
6. The solid state image sensor according to claim 1 , wherein the film stress suppressor is a stress adjustment insulation film laminated on the first upper electrode such that ends of the first upper electrode substantially conform with the stress adjustment insulation film, and the stress adjustment insulation film is formed under a condition that the film stress generated on the first upper electrode becomes substantially uniform.
7. The solid state image sensor according to claim 1 , further comprising a wiring connecting the lower electrode to a charge buildup region, wherein the wiring is provided around one side of the photoelectric conversion region for each of the plurality of pixels.
8. The solid state image sensor according to claim 1 , wherein the first upper electrode includes a material that absorbs ultraviolet light having a wavelength of about 400 nm or less.
9. The solid state image sensor according to claim 1 , wherein the organic photoelectric conversion film includes a structure having at least one of an organic p type semiconductor and an organic n type semiconductor.
10. An electronic device, comprising:
a solid state image sensor, comprising:
a semiconductor substrate where photoelectric conversion regions for converting light into charges are arranged per a plurality of pixels planarly arranged;
an organic photoelectric conversion film laminated at a light irradiated side of the semiconductor substrate via a first insulation film and formed at the regions where a plurality of the pixels are formed;
a lower electrode formed at and in contact with the organic photoelectric conversion film at a semiconductor substrate side;
a first upper electrode laminated at a light irradiated side of the organic photoelectric conversion film and formed such that ends of the first upper electrode substantially conform with ends of the organic photoelectric conversion film when the solid state image sensor is planarly viewed; and
a film stress suppressor for suppressing an effect of a film stress on the organic photoelectric conversion film, the film stress being generated on the first upper electrode and provided above the lower electrode at each instance.
11. The electronic device according to claim 10 , wherein the film stress suppressor is a second upper electrode laminated at a light irradiated side of the first upper electrode, and the second upper electrode is formed on the first upper electrode at a region greater than a region where the first upper electrode is formed to connect a peripheral region of the second upper electrode to the first insulation film.
12. The electronic device according to claim 11 , wherein the first upper electrode and the second upper electrode are formed of a same material or a material having a substantially same property.
13. The electronic device according to claim 10 , further comprising:
a second insulation film laminated on the first upper electrode such that ends of the organic photoelectric conversion film and the first upper electrode are substantially conformed.
14. The electronic device according to claim 10 , wherein the film stress suppressor is a stress adjustment insulation film laminated on the first upper electrode such that ends of the first upper electrode substantially conform with the stress adjustment insulation film, and the stress adjustment insulation film is formed under a condition that the film stress generated on the first upper electrode becomes substantially uniform.
15. The electronic device according to claim 10 , further comprising a wiring connecting the lower electrode to a charge buildup region, wherein the wiring is provided around one side of the photoelectric conversion region for each of the plurality of pixels.
16. The electronic device according to claim 10 , wherein the first upper electrode includes a material that absorbs ultraviolet light having a wavelength of about 400 nm or less.
17. The electronic device according to claim 10 , wherein the organic photoelectric conversion film includes a structure having at least one of an organic p type semiconductor and an organic n type semiconductor.
18. The electronic device according to claim 10 , further comprising a first photodiode disposed in the semiconductor substrate.
19. The electronic device according to claim 18 , further comprising a second photodiode disposed between the first photodiode and the lower electrode.
20. A method of producing a solid state image sensor, comprising:
forming and laminating an organic photoelectric conversion film on a semiconductor substrate via a first insulation film at a light irradiated side and at regions where a plurality of pixels are formed, photoelectric conversion regions for converting light into charges being arranged per a plurality of the pixels planarly arranged on the semiconductor substrate;
forming a lower electrode per the pixels in contact with the organic photoelectric conversion film at a semiconductor substrate side;
forming a first upper electrode laminated at a light irradiated side of the organic photoelectric conversion film such that ends of the first upper electrode substantially conform with ends of the organic photoelectric conversion film when the solid state image sensor is planarly viewed; and
forming a film stress suppressor for suppressing an effect of a film stress on the organic photoelectric conversion film, the film stress being generated on the first upper electrode and provided above the lower electrode at each instance.