IP Library › Granted Patent US 12,209,306
Granted Patent B2
US 12,209,306 · App. 18/172,668 · Granted Jan 28, 2025

Optically-finished thin diamond substrate or window of high aspect ratio and a method of production thereof

Inventors: Wen-Qing Xu (Medfield, MA); Thomas E. Anderson (Morristown, NJ); Giovanni Barbarossa (Saratoga, CA); Elgin E. Eissler (Renfrew, PA); Chao Liu (Butler, PA); Charles D. Tanner (Saxonburg, PA)
Assignee: II-VI DELAWARE, INC.
C23C16/274C23C16/01C23C16/511C23C16/56Y10T428/30
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Quick Facts
Patent No.
US 12,209,306
App. No.
18/172,668
Granted
Jan 28, 2025
Kind
B2
Abstract

In a method of forming a diamond film, substrate, or window, a substrate is provided and the diamond film, substrate, or window is CVD grown on a surface of the substrate. The grown diamond film, substrate, or window has a thickness between 150-999 microns and an aspect ratio≥100, wherein the aspect ratio is a ratio of a largest dimension of the diamond film, substrate or window divided by a thickness of the diamond film. The substrate can optionally be removed or separated from the grown diamond film, substrate, or window.

Claims (16)

1. A composite substrate comprising: a diamond film CVD grown on a substrate to form a composite substrate, the substrate having a polished surface and a thickness>2 mm, the diamond film having a thickness≥150 microns and a diameter≥50 mm, wherein the diamond film has an aspect ratio≥100, wherein the polished surface of the substrate has an optical finish having a surface roughness (Ra)<10 nm,

wherein the diamond film has a nucleation side surface connected to the polished surface of the substrate and the diamond film has a growth side surface opposite the nucleation side surface, and the nucleation side surface has an optical finish having surface roughness (Ra)<50 nm when connected to the substrate, and the growth side surface has an optical finish having a surface roughness (Ra)≤20 nm.

2. The composite substrate of claim 1 , wherein the substrate has a thickness>10 mm.

3. The composite substrate of claim 2 , wherein for an Ra of the polished surface of the substrate<10 nm, the Ra of the nucleation side of the diamond film is <20 nm.

4. The composite substrate of claim 1 , wherein a side of the diamond film that is connected to the polished surface of the substrate has a surface roughness (Ra)<50 nm.

5. The composite substrate of claim 1 , wherein the polished surface of the substrate and a nucleation side of the diamond film are non-planar, and a shape of the nucleation side of the diamond film is a conformal negative of the shape of the polished surface of the substrate.

6. The composite substrate of claim 1 , wherein a shape of a nucleation side of the diamond film includes at least one of a dome, a cone, a pyramid, a sphere, a parabola, and a hyperbola.

7. The composite substrate of claim 1 , wherein the substrate has been removed from the diamond film.

8. The composite substrate of claim 1 , wherein a growth side of the diamond film has a greater thermal conductivity than a nucleation side of the diamond film, substrate, or window.

9. The composite substrate of claim 1 , further comprising at least one of the following: a light management coating on a growth surface of the diamond film, substrate, or window; and a light management coating on a nucleation side of the diamond film, substrate, or window.

10. The composite substrate of claim 1 , wherein the substrate comprises one or more pieces.

11. The composite substrate of claim 1 , wherein the diamond film is CVD grown in an atmosphere that includes at least one of the following: oxygen, carbon monoxide, carbon dioxide, nitrogen, and boron.

12. The composite substrate of claim 1 , wherein the diamond film includes diamond particle seeds.

13. The composite substrate of claim 1 , wherein a largest dimension of the substrate is ≥30 mm.

14. The composite substrate of claim 1 , wherein a largest dimension of the substrate is a diameter of the substrate.

15. The composite substrate of claim 1 , wherein the diamond film has a 1.06 micron light scattering coefficient, measured at a distance of 34 cm from a blocking lens, of ≤20/cm.

Assignments (3)
SECURITY INTEREST Recorded Oct 6, 2025
From: II-VI DELAWARE, INC.; COHERENT, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 072853/0806 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 22, 2023
From: XU, WEN-QING; ANDERSON, THOMAS E; BARBAROSSA, GIOVANNI; EISSLER, ELGIN E; LIU, CHAO; TANNER, CHARLES D
To: II-VI INCORPORATED
Reel/Frame 062769/0079 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 22, 2023
From: II-VI INCORPORATED
To: II-VI DELAWARE, INC.
Reel/Frame 062769/0134 →
Continuity (4)
Division 16663423 · Oct 25, 2019
Division 15093160 · Apr 7, 2016
Provisional Application 62148339 · Apr 16, 2015
Related Publication 20230193457A1 · Jun 22, 2023
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