Processing chamber deposition confinement
Exemplary semiconductor processing systems may include a chamber body including sidewalls and a base. The system may include a substrate support extending through the base of the chamber body. The chamber body may define an access circumferentially extending about the substrate support at the base of the chamber body. The system may include one or more isolators disposed within the chamber body. The one or more isolators may define an exhaust path between the one or more isolators and the chamber body. The exhaust path may extend to the base of the chamber body. The systems may include a fluid source fluidly coupled with the chamber body at the access extending about the substrate support.
1. A semiconductor processing system, comprising:
a chamber body comprising sidewalls and a base;
a substrate support extending through the base of the chamber body, wherein the chamber body defines an access circumferentially extending about the substrate support at the base of the chamber body;
one or more isolators disposed within the chamber body, wherein the one or more isolators define an exhaust path between the one or more isolators and the chamber body, and wherein the exhaust path extends to the base of the chamber body; and
a fluid source fluidly coupled with the chamber body at the access extending about the substrate support.
2. The semiconductor processing system of claim 1 , further comprising:
a pumping liner on which the one or more isolators is seated, wherein the pumping liner defines a plurality of apertures providing fluid access to the exhaust path.
3. The semiconductor processing system of claim 2 , wherein the one or more isolators comprises a first isolator seated on the pumping liner.
4. The semiconductor processing system of claim 3 , wherein a gap is maintained between the substrate support and the first isolator proximate a substrate support surface of the substrate support.
5. The semiconductor processing system of claim 4 , wherein the gap is maintained at less than or about 5 mm.
6. The semiconductor processing system of claim 1 , further comprising:
a liner plate seated on the one or more isolators, wherein the liner plate forms a plenum at the base of the chamber body and within the chamber body.
7. The semiconductor processing system of claim 6 , wherein the plenum is fluidly isolated from the access extending about the substrate support at the base of the chamber body.
8. The semiconductor processing system of claim 1 , wherein the fluid source comprises nitrogen or oxygen.
9. A semiconductor processing system, comprising:
a chamber body comprising sidewalls and a base;
a substrate support extending through the base of the chamber body, wherein the chamber body defines an access circumferentially extending about the substrate support at the base of the chamber body;
a pumping liner, wherein the pumping liner is seated on the chamber body;
one or more isolators disposed within the chamber body, wherein the one or more isolators comprises a first isolator seated on the pumping liner, wherein the one or more isolators define an exhaust path between the one or more isolators and the chamber body, and wherein the exhaust path extends to the base of the chamber body; and
a fluid source fluidly coupled with the chamber body at the access extending about the substrate support.
10. The semiconductor processing system of claim 9 , further comprising:
a liner plate seated on the one or more isolators, wherein the liner plate forms a plenum at the base of the chamber body and within the chamber body, wherein the plenum is fluidly isolated from the access extending about the substrate support at the base of the chamber body.