IP Library › Granted Patent US 12,218,664
Granted Patent B2
US 12,218,664 · App. 17/076,549 · Granted Feb 4, 2025

Backside power supply techniques

Inventors: Sriram Thyagarajan (Austin, TX); Yew Keong Chong (Austin, TX); Andy Wangkun Chen (Austin, TX); Ayush Kulshrestha (New Delhi, IN); Sony (Noida, IN); Rajiv Kumar Sisodia (Bangalore, IN)
Assignee: Arm Limited
H03K19/0016G11C11/417H03K19/0013G06F2113/04
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Quick Facts
Patent No.
US 12,218,664
App. No.
17/076,549
Granted
Feb 4, 2025
Kind
B2
Abstract

Various implementations described herein are related to a device having logic that operates in multiple voltage domains. The device may include a backside power network with rows of segmented supply rails coupled to the logic. The rows of segmented supply rails may include alternating rail breaks that define an interchanging directional supply of power to the logic in the multiple voltage domains.

Claims (41)

1. A device, comprising:

logic that operates in multiple voltage domains; and

a backside power network having rows of segmented supply rails coupled to the logic,

wherein the rows of segmented supply rails have alternating rail breaks that define an interchanging directional supply of power to the logic in the multiple voltage domains.

2. The device of claim 1 , wherein the logic refers to powergate logic that operates with one or more transistors having a source, a drain and a gate.

3. The device of claim 1 , wherein the segmented supply rails refer to buried power rails that are separated and detached into multiple segments with the rail breaks, and wherein the segmented supply rails are formed with buried backside metal.

4. The device of claim 1 , wherein the alternating rail breaks characterize an alternating positional orientation of the rail breaks so as to interchangeably provide multiple directional power supplies to the logic in the multiple voltage domains.

5. The device of claim 1 , wherein the alternating rail breaks are disposed to successively alternate positions on either side of the logic from side-to-side.

6. The device of claim 5 , wherein successively alternating positional orientation of the rail breaks allows for transposing the directional supply of power from row-to-row and from side-to-side along a length of the logic.

7. The device of claim 1 , wherein the rows of segmented supply rails include:

a first row having a first segmented supply rail with multiple segments separated by a first rail break disposed on a first side of the logic,

a second row having a second segmented supply rail with multiple segments separated by a second rail break disposed on a second side of the logic that is opposite to the first side, and

a third row having a third segmented supply rail with multiple segments separated by a third rail break disposed on the first side of the logic.

8. The device of claim 1 , wherein:

the multiple segments of the first segmented supply rail include a first segment that supplies a first voltage domain and a second segment that is coupled to ground,

the multiple segments of the second segmented supply rail include a third segment that is coupled to ground and a fourth segment that supplies a second voltage domain that is different than the first voltage domain, and

the multiple segments of the third segmented supply rail include a fifth segment that supplies the first voltage domain and a sixth segment that is coupled to ground.

9. The device of claim 1 , wherein the multiple voltage domains refer to an internal core voltage domain (VDDC) and an external core voltage domain (VDDCE).

10. The device of claim 1 , wherein the multiple voltage domains refer to an internal periphery voltage domain (VDDP) and an external periphery voltage domain (VDDPE).

11. A power distribution network, comprising:

multiple rows of buried power rails coupled to logic, wherein the multiple rows of buried power rails include:

a first row having a first power rail with multiple segments separated by a first rail break disposed on a first side of the logic, and

a second row having a second power rail with multiple segments separated by a second rail break disposed on a second side of the logic opposite to the first side.

12. The network of claim 11 , wherein the multiple rows of buried power rails include:

a third row having a third segmented supply rail with multiple segments separated by a third rail break disposed on the first side of the logic.

13. The network of claim 12 , wherein:

the multiple segments of the first segmented supply rail include a first segment that is coupled to ground and a second segment that supplies a first voltage domain,

the multiple segments of the second segmented supply rail include a third segment that supplies a second voltage domain that is different than the first voltage domain and a fourth segment that is coupled to ground, and

the multiple segments of the third segmented supply rail include a fifth segment that is coupled to ground and a sixth segment that supplies the first voltage domain.

14. The network of claim 11 , wherein the multiple rows of buried power rails are disposed with alternating rail breaks so as to define an interchanging directional supply of power to the logic in multiple voltage domains.

15. The network of claim 11 , wherein the multiple voltage domains refer to an internal core voltage domain (VDDC) and an external core voltage domain (VDDCE).

16. The network of claim 11 , wherein the multiple voltage domains refer to an internal periphery voltage domain (VDDP) and an external periphery voltage domain (VDDPE).

17. A method, comprising:

fabricating logic that operates in multiple voltage domains;

fabricating a backside power network with rows of segmented supply rails coupled to the logic; and

providing the rows of segmented supply rails with alternating rail breaks that define an interchanging directional supply of power to the logic in the multiple voltage domains.

18. The method of claim 17 , wherein:

the alternating rail breaks are disposed to successively alternate positions on either side of the logic from side-to-side, and

successively alternating positional orientation of the rail breaks allows for transposing the directional supply of power from row-to-row and from side-to-side along a length of the logic.

19. The method of claim 17 , wherein the multiple voltage domains refer to an internal core voltage domain (VDDC) and an external core voltage domain (VDDCE).

20. The method of claim 17 , wherein the multiple voltage domains refer to an internal periphery voltage domain (VDDP) and an external periphery voltage domain (VDDPE).

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 21, 2022
From: THYAGARAJAN, SRIRAM; CHONG, YEW KEONG; CHEN, ANDY WANGKUN; KULSHRESTHA, AYUSH; SONY; SISODIA, RAJIV KUMAR
To: ARM LIMITED
Reel/Frame 060267/0874 →
Continuity (1)
Related Publication 20220123751A1 · Apr 21, 2022
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