Single-crystal transistors for memory devices
Methods, systems, and devices for single-crystal transistors for memory devices are described. In some examples, a cavity may be formed through at least a portion of one or more dielectric materials, which may be deposited above a deck of memory cells. The cavity may include a taper, such as a taper toward a point, or a taper having an included angle that is within a range, or a taper from a cross-sectional area to some fraction of the cross-sectional area, among other examples. A semiconductor material may be deposited in the cavity and above the one or more dielectric materials, and formed in a single crystalline arrangement based on heating and cooling the deposited semiconductor material. One or more portions of a transistor, such as a channel portion of a transistor, may be formed at least in part by doping the single crystalline arrangement of the semiconductor material.
1. An apparatus, comprising:
a dielectric portion;
a semiconductor portion in contact with a top surface of the dielectric portion and extending into the dielectric portion with a tapered projection, the semiconductor portion comprising a single-grain crystalline arrangement;
a first transistor terminal in contact with a top surface of the semiconductor portion at a first location;
a second transistor terminal in contact with the top surface of the semiconductor portion at a second location;
a transistor gate dielectric in contact with the top surface of the semiconductor portion at a third location between the first location and the second location; and
a transistor gate conductor in contact with a top surface of the transistor gate dielectric.
2. The apparatus of claim 1 , wherein the semiconductor portion comprises:
a first doped region in contact with the first transistor terminal; and
a second doped region in contact with the second transistor terminal.
3. The apparatus of claim 1 , wherein the dielectric portion comprises:
a first dielectric layer having a first thermal conductivity; and
a second dielectric layer over the first dielectric layer, the second dielectric layer having a second thermal conductivity that is less than the first thermal conductivity.
4. The apparatus of claim 3 , wherein:
the first dielectric layer comprises an oxide material; and
the second dielectric layer comprises a nitride material.
5. The apparatus of claim 1 , further comprising:
a material portion between an end of the tapered projection of the semiconductor portion and the dielectric portion, the material portion comprising silicon-germanium, nickel, a metal silicide, or polysilicon.
6. An apparatus, comprising:
a deck of memory cells;
a dielectric portion above the deck of memory cells; and
a plurality of transistors coupled with the deck of memory cells, wherein each transistor of the plurality of transistors comprises:
a semiconductor portion in contact with a top surface of the dielectric portion, the semiconductor portion comprising a single-grain crystalline arrangement and having a tapered extension into the dielectric portion;
a first terminal in contact with a first portion of a top surface of the semiconductor portion;
a second terminal in contact with a second portion of the top surface of the semiconductor portion; and
a gate conductor operable to modulate a conductivity of the semiconductor portion between the first terminal and the second terminal.
7. The apparatus of claim 6 , further comprising:
a second dielectric material between each of the plurality of transistors, wherein each sidewall of the second dielectric material is in contact with a sidewall of the semiconductor portion and a bottom surface of the second dielectric material is in contact with a top surface of the dielectric portion.
8. The apparatus of claim 6 , wherein, for each of the plurality of transistors, the semiconductor portion comprises:
a first doped region in contact with the first terminal; and
a second doped region in contact with the second terminal.
9. The apparatus of claim 6 , wherein the dielectric portion comprises:
a first dielectric layer having a first thermal conductivity; and
a second dielectric layer over the first dielectric layer, the second dielectric layer having a second thermal conductivity that is less than the first thermal conductivity.
10. The apparatus of claim 9 , wherein:
the first dielectric layer comprises an oxide material; and
the second dielectric layer comprises a nitride material.
11. The apparatus of claim 6 , further comprising:
a material portion between an end of the tapered extension of the semiconductor portion and the dielectric portion, the material portion comprising silicon-germanium, nickel, a metal silicide, or polysilicon.
12. A transistor formed by a process of:
forming a cavity extending through at least a portion of one or more dielectric materials, wherein the cavity includes a taper from a first cross-sectional area toward a point;
depositing a semiconductor material in the cavity and above the one or more dielectric materials;
forming the semiconductor material in a single crystalline arrangement based at least in part on heating and cooling the semiconductor material; and
forming a channel portion of the transistor based at least in part on doping the single crystalline arrangement of the semiconductor material.
13. The transistor of claim 12 , wherein the single crystalline arrangement of the semiconductor material is formed by the process comprising:
nucleating the single crystalline arrangement of the semiconductor material at a nucleation site at an end of the cavity opposite from an opening of the cavity.
14. The transistor of claim 12 , wherein heating the semiconductor material comprises:
applying a laser to the semiconductor material.
15. The transistor of claim 12 , wherein the taper of the cavity is associated with an included angle that is between 35 degrees and 55 degrees.
16. The transistor of claim 12 , wherein a cross-sectional area of the cavity at an end opposite from an opening of the cavity has a width of less than or equal to 7 nanometers.
17. The transistor of claim 12 , formed by the process comprising:
depositing the semiconductor material with an amorphous arrangement or a polycrystalline arrangement.
18. The transistor of claim 12 , formed by the process further comprising:
depositing, in the cavity, a second material before depositing the semiconductor material, wherein forming the single crystalline arrangement of the semiconductor material is based at least in part on a nucleation of the single crystalline arrangement at an interface between the second material and the semiconductor material.
19. The transistor of claim 12 , formed by the process further comprising:
forming the one or more dielectric materials based at least in part on depositing a first dielectric material and depositing a second dielectric material over the first dielectric material, wherein forming the cavity comprises forming the cavity with the taper through at least a portion of the first dielectric material.
20. The transistor of claim 19 , wherein:
the first dielectric material has a first thermal conductivity; and
the second dielectric material has a second thermal conductivity that is less than the first thermal conductivity.