Method for manufacturing semiconductor structure having raised via contacts
View Patent ↗Semiconductor structures and method for manufacturing the same are provided. The method includes forming a first conductive structure over a substrate and forming a second conductive structure through a dielectric layer over the first conductive structure. The method further includes partially removing the dielectric layer to reduce a thickness of the dielectric layer along a first direction and forming a third conductive structure over the second conductive structure. In addition, a first portion of the third conductive structure is within a projection area of the second conductive structure along the first direction, and a second portion of the third conductive structure is outside the projection area of the second conductive structure along the first direction, and a first bottom surface of the first portion is spaced apart from a second bottom surface of the second portion by a distance along the first direction.
1. A method of manufacturing a semiconductor structure, comprising:
forming a first conductive structure over a substrate;
forming a second conductive structure through a dielectric layer over the first conductive structure;
partially removing the dielectric layer to reduce a thickness of the dielectric layer along a first direction; and
forming a third conductive structure over the second conductive structure, wherein a first portion of the third conductive structure is within a projection area of the second conductive structure along the first direction, and a second portion of the third conductive structure is outside the projection area of the second conductive structure along the first direction, and a first bottom surface of the first portion is spaced apart from a second bottom surface of the second portion by a distance along the first direction,
wherein a first sidewall of the second conductive structure and a second sidewall of the second conductive structure opposite to the first sidewall of the second conductive structure are both in contact with the third conductive structure in a second direction that is different from the first direction.
2. The method of manufacturing the semiconductor structure as claimed in claim 1 , wherein the third conductive structure includes a first sidewall and a second sidewall both outside the projection area of the second conductive structure.
3. The method of manufacturing the semiconductor structure as claimed in claim 1 , wherein the first portion and the second portion of the third conductive structure have different thicknesses along the first direction.
4. The method of manufacturing the semiconductor structure as claimed in claim 1 , wherein the first bottom surface is substantially level with a top surface of the second conductive structure.
5. The method of manufacturing the semiconductor structure as claimed in claim 1 , further comprising:
forming a material layer over the dielectric layer after partially removing the dielectric layer and before forming the third conductive structure, wherein the material layer has an opening exposing a top surface of the second conductive structure, and the third conductive structure is formed in the opening of the material layer.
6. The method of manufacturing the semiconductor structure as claimed in claim 5 , wherein a thickness of the third conductive structure along the first direction is greater than a thickness of the material layer along the first direction.
7. The method of manufacturing the semiconductor structure as claimed in claim 1 , wherein a first sidewall and a second sidewall of the third conductive structure are at opposite sides of the first sidewall and the second sidewall of the second conductive structure and are in contact with a top surface of the dielectric layer.
8. A method of manufacturing a semiconductor structure, comprising:
forming a first conductive structure over a substrate;
forming a second conductive structure through a dielectric layer and electrically connected to the first conductive structure;
thinning the dielectric layer to form a recess;
forming a material layer in the recess; and
forming a third conductive structure over the second conductive structure,
wherein the third conductive structure has a central portion in contact with a top surface of the second conductive structure, a first protruding portion at a first side of the central portion and protruding from a first sidewall of the second conductive structure, and a second protruding portion at a second side of the central portion opposite to the first protruding portion, and a bottom surface of the second protruding portion of the third conductive structure is substantially level with a bottom surface of the material layer.
9. The method of manufacturing the semiconductor structure as claimed in claim 8 , wherein an interface between the material layer and the third conductive structure is outside a projection area of the second conductive structure.
10. The method of manufacturing the semiconductor structure as claimed in claim 8 , wherein the central portion, the first protruding portion, and the second protruding portion of the third conductive structure have substantially flat top surfaces.
11. The method of manufacturing the semiconductor structure as claimed in claim 8 , wherein the first protruding portion of the third conductive structure vertically overlaps the dielectric layer.
12. The method of manufacturing the semiconductor structure as claimed in claim 8 , wherein a bottom surface of the first protruding portion of the third conductive structure is lower than a bottom surface of the central portion of the third conductive structure.
13. The method of manufacturing the semiconductor structure as claimed in claim 8 , wherein a first sidewall of the first protruding portion and a second sidewall of the second protruding portion are at opposite sides of the second conductive structure.
14. A method of manufacturing a semiconductor structure, comprising:
forming a first dielectric layer;
forming a first conductive structure in the first dielectric layer;
forming a second dielectric layer over the first dielectric layer;
forming a second conductive structure through the second dielectric layer, wherein a bottom surface of the second conductive structure is in contact with the first conductive structure; and
forming a third conductive structure over the second conductive, wherein the third conductive structure has first portion having a first thickness between a first top surface and a first bottom surface, a second portion having a second thickness between a second top surface and a second bottom surface, and a third portion having a third thickness between a third top surface and a third bottom surface, and the first portion, the second portion, and the third portion are all laterally surrounded by a third dielectric layer, and the first portion is laterally sandwiched between the second portion and the third portion, and the first thickness is different from the second thickness and the third thickness, and a first sidewall of the third conductive structure is outside a projection area of the second conductive structure.
15. The method of manufacturing the semiconductor structure as claimed in claim 14 , wherein the first bottom surface of the first portion of the third conductive structure is not level with the second bottom surface of the second portion of the third conductive structure.
16. The method of manufacturing the semiconductor structure as claimed in claim 14 , wherein the first bottom surface of the first portion of the third conductive structure is higher than a top surface of the second dielectric layer, and the second bottom surface of the second portion of the third conductive structure is substantially level with the top surface of the second dielectric layer.
17. The method of manufacturing the semiconductor structure as claimed in claim 14 , further comprising:
forming a material layer over the second dielectric layer, wherein the
third dielectric layer is formed over the material layer.
18. The method of manufacturing the semiconductor structure as claimed in claim 17 , wherein a bottom surface of the material layer is substantially level with a top surface of the second dielectric layer.
19. The method of manufacturing the semiconductor structure as claimed in claim 14 , wherein the second thickness and the third thickness are both greater than the first thickness.
20. The method of manufacturing the semiconductor structure as claimed in claim 14 , further comprising:
forming a fourth conductive structure through the second dielectric layer,
wherein the fourth conductive structure has a third sidewall facing the first sidewall of the third conductive structure, and a first lateral distance between a bottom edge of the first sidewall of the third conductive structure and the third sidewall of the fourth conductive structure is greater than a second lateral distance between a top edge of the third sidewall of the fourth conductive structure and the first sidewall of the third conductive structure.