Reverse-conducting semiconductor device
A semiconductor device, including a semiconductor substrate having a diode portion, wherein the diode portion includes: an anode region which is provided on a front surface of the semiconductor substrate and is of a second conductivity type; a trench portion provided so as to extend in a predetermined extending direction on the front surface of the semiconductor substrate; a trench contact portion provided on the front surface of the semiconductor substrate; and a plug region which is provided at a lower end of the trench contact portion and is of a second conductivity type, and which has a doping concentration higher than that of the anode region, wherein a plurality of plug regions, each of which being the plug region, is provided separately from each other along the extending direction, is provided.
1. A semiconductor device, comprising:
a semiconductor substrate having a diode portion, wherein
the diode portion includes,
an anode region which is provided on a front surface of the semiconductor substrate and is of a second conductivity type, and
a trench portion provided so as to extend in a predetermined extending direction on the front surface of the semiconductor substrate,
a trench contact portion provided on the front surface of the semiconductor substrate, and
a plug region which is provided at a lower end of the trench contact portion and is of a second conductivity type, and which has a doping concentration higher than that of the anode region, wherein
ones of the plug region are provided separately from each other along the extending direction; and
a transistor portion having an emitter region which is provided on the front surface of the semiconductor substrate; wherein
the lower end of the trench contact portion is positioned deeper than a lower end of the emitter region.
2. The semiconductor device according to claim 1 , wherein a plurality of the trench contact portions is provided separately from each other.
3. The semiconductor device according to claim 2 , wherein the plug region is provided so as to cover the lower end of the trench contact portion.
4. The semiconductor device according to claim 3 , wherein a length of the trench contact portion is from 0.6 μm to 50 μm inclusive, and a distance between trench contact portions being adjacent to each other is from 1 μm to 50 μm inclusive in the extending direction.
5. The semiconductor device according to claim 1 , wherein the trench contact portion is configured to extend in the extending direction, and the anode region and the plug region are provided at the lower end of the trench contact portion.
6. The semiconductor device according to claim 5 , wherein the anode region and the plug region are alternately provided along the extending direction at the lower end of the trench contact portion.
7. The semiconductor device according to claim 1 , wherein:
the transistor portion has a base region which is provided on the front surface of the semiconductor substrate and is of a second conductivity type, wherein
a doping concentration of the anode region is lower than a doping concentration of the base region.
8. The semiconductor device according to claim 7 , wherein the doping concentration of the anode region is from 1E16 cm −3 to 1E17 cm −3 inclusive, and the doping concentration of the base region is from 1E17 cm −3 to 1E18 cm −3 inclusive.
9. The semiconductor device according to claim 7 , wherein
the emitter region is of a first conductivity type.
10. The semiconductor device according to claim 8 , wherein
the emitter region is of a first conductivity type.
11. The semiconductor device according to claim 9 , wherein the lower end of the trench contact portion is positioned at a depth of from 0.35 μm to 0.6 μm inclusive from the front surface of the semiconductor substrate.
12. The semiconductor device according to claim 7 , wherein the trench contact portion is also provided in the transistor portion.
13. The semiconductor device according to claim 8 , wherein the trench contact portion is also provided in the transistor portion.
14. The semiconductor device according to claim 12 , wherein
the plug region is also provided at the lower end of the trench contact portion in the transistor portion, and
a length of the plug region in the transistor portion is longer than a length of the plug region in the diode portion in the extending direction.
15. The semiconductor device according to claim 1 , wherein the diode portion further has an accumulation region which is provided on the semiconductor substrate and is of a first conductivity type.
16. The semiconductor device according to claim 1 , wherein a doping concentration of the plug region is from 1E20 cm −3 to 1E21 cm −3 inclusive.
17. The semiconductor device according to claim 1 , wherein a front surface side of the semiconductor substrate is not provided with a lifetime control region including a lifetime killer.