Different height cell subregions, semiconductor device having the same, and method of generating a layout diagram corresponding to the same
A method (of generating a layout diagram, the layout diagram being stored on a non-transitory computer-readable medium) includes: selecting first and second standard cells from a standard-cell-library; the first and second standard cells having corresponding first and second heights that are different from each other; stacking the first standard cell on the second standard cell to form a third cell; and including the third cell in a layout diagram. At least one aspect of the method is executed by a processor of a computer.
1. A semiconductor device comprising:
a first cell region having a first height,
wherein:
a first portion of the first cell region includes a first active region having a first conductivity type, the first active region extending in a first direction and having a second height less than the first height,
a second portion of the first cell region includes a second active region having a second conductivity type, the second active region extending in the first direction and having a third height less than the second height,
a third portion of the first cell region includes a third active region extending in the first direction having the second conductivity type and the third height,
the first, second, and third heights are determined in a second direction which is substantially perpendicular to the first direction, and
the first portion is a central portion of the first cell region, and is between the second portion and the third portion relative to the second direction.
2. The semiconductor device of claim 1 , wherein:
the first active region includes a sequence of three or more consecutive active fins,
the second active region includes one or more active fins, and between the first active region and a first edge of the first cell region, and
the third active region includes one or more active fins; and
the semiconductor device further comprises:
a first dummy fin between the first active region and the second active region; and
a second dummy fin between the first active region and the third active region.
3. The semiconductor device of claim 2 , wherein:
the first cell region is a double height cell region.
4. The semiconductor device of claim 2 , wherein:
a sum of the active fins in the second active region equals a sum of the active fins in the third active region.
5. The semiconductor device of claim 4 , wherein:
the sum of the active fins in the second active region is an odd number.
6. The semiconductor device of claim 2 , wherein:
a sum of the active fins in the second active region is less than a sum of the active fins in the third active region.
7. The semiconductor device of claim 6 , wherein:
a sum of the active fins in the third active region is an even number.
8. The semiconductor device of claim 2 , wherein:
a sum of the active fins in the second active region is an odd number;
the second active region has an axis of symmetry extending substantially parallel to the first direction; and
the second and third active regions are asymmetric with respect to the axis of symmetry.
9. The semiconductor device of claim 2 , wherein:
a sum of the active fins in the second active region is an even number;
the second active region has an axis of symmetry extending substantially parallel to the first direction; and
the second and third active regions are symmetric with respect to the axis of symmetry.
10. The semiconductor device of claim 1 , wherein:
the first cell region is symmetric about a line extending in the first direction at half-height of the first cell region.
11. The semiconductor device of claim 1 , wherein:
the first cell region is asymmetric about a line extending in the first direction at half-height of the first cell region.
12. The semiconductor device of claim 1 , wherein:
the first active region is symmetric about a line extending in the first direction at half-height of the first cell region.
13. A semiconductor device comprising:
a first cell region having a first height, wherein:
a first portion of the first cell region includes a first active region having a first conductivity type, the first active region extending in a first direction and having a second height less than the first height,
a second portion of the first cell region includes a second active region having a second conductivity type, the second active region extending in the first direction and having a third height less than the second height,
a third portion of the first cell region includes a third active region extending in the first direction having the second conductivity type and the third height,
the first, second, and third heights are determined in a second direction which is substantially perpendicular to the first direction, and
the first portion is a central portion of the first cell region, and is between the second portion and the third portion relative to the second direction; and
a second cell region,
wherein:
the first cell region is immediately adjacent to the second cell region in the second direction, and
the third portion faces a second conductivity type active region in the second cell region.
14. The semiconductor device of claim 13 , wherein:
the second active region and the third active region each have a same first number of fins, and
the first active region has a second number of fins that is greater than the first number of fins.
15. The semiconductor device of claim 13 , wherein:
the second active region and the third active region each have one or more fins, and
the first active region has three or more fins.
16. The semiconductor device of claim 13 , wherein:
at least one first dummy fin is between the first portion and the second portion, and
at least one second dummy fin is between the first portion and the third portion.
17. The semiconductor device of claim 16 , wherein:
the number of first dummy fins between the first portion and the second portion is less than the number of second dummy fins between the first portion and the third portion.
18. The semiconductor device of claim 16 , wherein:
the number of first dummy fins is one or more, and
the number of second dummy fins is two or more.
19. The semiconductor device of claim 16 , wherein:
a sum of active fins in the second portion and first dummy fins between the first portion and the second portion is less than a sum of active fins in the third portion and second dummy fins between the first portion and the third portion.
20. A semiconductor device comprising:
a first cell region having a first height; and
a second cell region adjacent to the first cell region, wherein:
a first portion of the first cell region includes a first active region having a first conductivity type, the first active region extending in a first direction and having a second height less than the first height,
a second portion of the first cell region includes a second active region having a second conductivity type, the second active region extending in the first direction and having a third height less than the second height,
a third portion of the first cell region includes a third active region extending in the first direction having the second conductivity type and the third height,
the first, second, and third heights are determined in a second direction which is substantially perpendicular to the first direction,
the first portion is a central portion of the first cell region, and is between the second portion and the third portion relative to the second direction,
the first cell region is immediately adjacent to the second cell region in the second direction,
the third portion faces a second conductivity type active region in the second cell region,
the first active region has a first number of fins, and
the second active region and the third active region each have a same second number of fins, different from the first number of fins.