Mirror image of geometrical patterns in stacked integrated circuit dies
An electronic device includes a first integrated circuit (IC) die and a second IC die. The first IC die includes a first set of contact pads arranged in a first geometrical pattern on a first surface of the first IC die, the second IC die includes a second set of the contact pads that are arranged, on a second surface of the second IC die, in a second geometrical pattern that is a mirror image of the first geometrical pattern. The second surface of the second IC die is facing the first surface of the first IC die, and the contact pads of the first and second sets are aligned with one another and mounted on one another.
1. A. A set of reticles, the set comprising:
at least a first mask for producing a first integrated circuit (IC) die, the first mask comprising a first set of elements that are arranged in a first geometrical pattern and are configured to attenuate a beam impinging thereon; and
at least a second mask for producing a second IC die, the second mask comprising a second set of the elements that are (i) arranged in a second geometrical pattern that is a mirror image of the first geometrical pattern and (ii) configured to attenuate the beam impinging thereon.
2. The set of reticles according to claim 1 , wherein the first and second masks are located in first and second different reticles in the set.
3. The set of reticles according to claim 1 , wherein the first and second masks are located in first and second different sections of a same reticle in the set.
4. A method for producing an electronic device, the method comprising:
producing, on a first surface of a first integrated circuit (IC) die, a first set of contact pads arranged in a first geometrical pattern, wherein producing the first IC die comprises using at least a first mask comprising a first set of elements that are arranged in the first geometrical pattern and are configured to attenuate a beam impinging thereon;
producing, on a second surface of a second IC die, a second set of the contact pads that are arranged in a second geometrical pattern, which is a mirror image of the first geometrical pattern, wherein producing the second IC die comprises using at least a second mask comprising a second set of the elements that are (i) arranged in the second geometrical pattern that is a mirror image of the first geometrical pattern and (ii) configured to attenuate the beam impinging thereon;
positioning the second surface of the second IC die opposite the first surface of the first IC die, such that the contact pads of the first and second sets are aligned with one another; and
coupling the contact pads of the first and second sets with one another.
5. The method according to claim 4 , wherein producing the first set comprises arranging the first geometrical pattern in a non-symmetrical pattern under reflection about a given axis in a plain of the first IC die, and wherein producing the second set comprises arranging the second geometrical pattern in the mirror image of the first geometrical pattern with respect to the given axis.
6. The method according to claim 4 , wherein producing the first and second IC dies comprises applying the beam to the first and second masks, respectively, for producing the first and second geometrical patterns on the first and second surfaces.
7. The method according to claim 6 , wherein the first and second masks are located in first and second different reticles, and wherein applying the beam comprises applying a first beam to the first reticle using a first lithography process and applying a second beam to the second reticle using a second lithography process, other than the first lithography process.
8. The method according to claim 7 , wherein a plurality of the first IC dies are produced on a first substrate, and a plurality of the second IC dies are produced on a second substrate, different from the first substrate, and comprising identifying: (i) in the first substrate, a known good site (KGS), which is qualified for producing the electronic device and is intended to be the first IC die, and (ii) in the second substrate, a known good die (KGD), which is qualified for producing the electronic device and is intended to be the second IC die.
9. The method according to claim 8 , wherein coupling the contact pads of the first and second sets comprises separating the KGD from the second substrate for producing the second IC die and coupling between the contact pads of the second set and the contact pads of the first set that are located together with the first IC die on the first substrate.
10. The method according to claim 6 , wherein the first and second masks are located in first and second different sections of a same reticle, and wherein applying the beam comprises applying the beam to the same reticle while preforming a same lithography process.
11. The method according to claim 10 , wherein a first plurality of the first and second IC dies are produced on a first substrate, and a second plurality of the first and second IC dies are produced on a second substrate, different from the first substrate, and comprising identifying: (i) in the first substrate, a known good site (KGS), which is qualified for producing the electronic device and is intended to be the first IC die, and (ii) in the second substrate, a known good die (KGD), which is qualified for producing the electronic device and is intended to be the second IC die.