Optical sensing apparatus
An optical sensing apparatus including: a substrate including a first material; an absorption region including a second material different from the first material; an amplification region formed in the substrate and configured to collect at least a portion of the photo-carriers from the absorption region and to amplify the portion of the photo-carriers; an interface-dopant region formed in the substrate between the absorption region and the amplification region; a buffer layer formed between the absorption region and the interface-dopant region; one or more field-control regions formed between the absorption region and the interface-dopant region and at least partially surrounding the buffer layer; and a buried-dopant region formed in the substrate and separated from the absorption region, where the buried-dopant region is configured to collect at least a portion of the amplified portion of the photo-carriers from the amplification region.
1. An optical sensing apparatus comprising:
a substrate comprising a first material;
an absorption region comprising a second material different from the first material, the absorption region configured to receive an optical signal and generate photo-carriers in response to receiving the optical signal;
an amplification region formed in the substrate configured to collect at least a portion of the photo-carriers from the absorption region and to amplify the portion of the photo-carriers;
a buried-dopant region formed in the substrate configured to collect at least a portion of the amplified portion of the photo-carriers from the amplification region, wherein the amplification region is between the absorption region and the buried-dopant region; and
an interface-dopant region formed between the absorption region and the buried-dopant region in the substrate,
wherein the buried-dopant region comprises one or more first buried-dopant regions and one or more second buried-dopant regions at least partially surrounding the one or more first buried-dopant regions,
wherein the one or more first buried-dopant regions and the one or more second buried-dopant regions are doped with a dopant having a first conductivity type,
wherein a property associated with the one or more first buried-dopant regions is different from the property associated with the second buried-dopant regions so as to form, under a reverse bias breakdown voltage, one or more punch-through regions and one or more blocking regions in the amplification region, wherein the one or more punch-through regions are adjacent to the one or more first buried-dopant regions and the one or more blocking regions are adjacent to the one or more second buried-dopant regions, and
wherein the property comprises a peak doping concentration or a depth.
2. The optical sensing apparatus of claim 1 , wherein the one or more first buried-dopant regions have a first peak doping concentration and a first depth, and the one or more second buried-dopant regions have a second peak doping concentration and a second depth, wherein at least one or more of (i) the second peak doping concentration is lower than the first peak doping concentration, or (ii) the second depth is shallower than the first depth.
3. The optical sensing apparatus of claim 1 ,
wherein the interface-dopant region is of a second conductivity type different from the first conductivity type, and
wherein the interface-dopant region further comprises:
one or more first interface-dopant regions having a third peak doping concentration and a third depth; and
one or more second interface-dopant regions having a fourth peak doping concentration and a fourth depth, wherein the one or more second interface-dopant regions are at least partially surrounding the one or more first interface-dopant regions,
wherein at least one or more of (i) the fourth peak doping concentration is higher than the third peak doping concentration, or (ii) the fourth depth is shallower than the third depth.
4. The optical sensing apparatus of claim 3 , wherein the interface-dopant region further comprises:
one or more doped guard-rings surrounding the one or more second interface-dopant regions.
5. The optical sensing apparatus of claim 1 , wherein the absorption region has a gradient doping profile.
6. The optical sensing apparatus of claim 1 , wherein the substrate comprises a first interface and a second interface opposite to the first interface, wherein the substrate is substantially devoid of metal material between the first interface and the second interface.
7. A single-photon avalanche detector (SPAD) device comprising:
a silicon substrate including a recess in a first surface of the silicon substrate;
a p-type interface-dopant region arranged in the silicon substrate below a lower surface of the recess;
an n-type avalanche breakdown region arranged in the silicon substrate meeting the p-type interface-dopant region,
an n-type buried-dopant region comprising one or more first buried-dopant regions and one or more second buried-dopant regions at least partially surrounding the one or more first buried-dopant regions; and
a germanium region disposed within the recess,
wherein a property associated with the one or more first buried-dopant regions is different from the property associated with the second buried-dopant regions so as to form, under a reverse bias breakdown voltage, one or more punch-through regions and one or more blocking regions in the n-type avalanche breakdown region, wherein the one or more punch-through regions are adjacent to the one or more first buried-dopant regions and the one or more blocking regions are adjacent to the one or more second buried-dopant regions, and
wherein the property comprises a peak doping concentration or a depth.
8. The SPAD device of claim 7 , further comprising sidewall-dopant regions and a buffer layer, wherein the sidewall-dopant regions and the buffer layer are defined where outer sidewalls and a lower surface of the germanium region meet inner sidewalls and a recessed upper surface, respectively, of the silicon substrate.
9. The SPAD device of claim 7 ,
wherein the n-type buried-dopant region extends laterally from outer edges of the n-type avalanche breakdown region past outer sidewalls of the germanium region; and
wherein the SPAD device further comprises an n-type conductive region extending upwardly from outer edges of the n-type buried dopant region to the first surface of the silicon substrate.
10. The SPAD device of claim 9 , wherein the n-type avalanche breakdown region, the n-type buried-dopant region, and the n-type conductive region collectively establish a substantially U-shaped profile that enclose the p-type interface-dopant region and the germanium region.
11. The SPAD device of claim 7 , further comprising:
a buffer layer comprising intrinsic silicon disposed between an upper extent of the p-type interface-dopant region and a lower surface of the germanium region.
12. The SPAD device of claim 11 , further comprising:
a p-type sidewall-dopant region extending upwards along inner sidewalls of the recess in the silicon substrate and along outer sidewalls of the germanium region.
13. The SPAD device of claim 7 , wherein the germanium region has a step-like gradient doping profile where a doping concentration near an upper surface of the germanium region is higher than a doping concentration near a lower surface of the germanium region.
14. The SPAD device of claim 13 , further comprising:
a sidewall-dopant region that extends continuously along an outer sidewall of the germanium region.
15. The SPAD device of claim 7 , further comprising:
a silicon passivation layer disposed an upper surface of the germanium region.
16. The SPAD device of claim 15 , further comprising:
a sidewall-dopant region that is arranged in an outer edge of the recess and that has an upper surface that meets a bottom surface of the silicon passivation layer.
17. A semiconductor structure, comprising:
a semiconductor substrate;
a silicon-based multiplication region formed in the semiconductor substrate;
a germanium-based absorption region formed in the semiconductor substrate, the germanium-based absorption region being located above the silicon-based multiplication region;
a buried-dopant region comprising one or more first buried-dopant regions and one or more second buried-dopant regions at least partially surrounding the one or more first buried-dopant regions; and
a buffer layer between the silicon-based multiplication region and the germanium-based absorption region,
wherein a property associated with the one or more first buried-dopant regions is different from the property associated with the second buried-dopant regions so as to form, under a reverse bias breakdown voltage, one or more punch-through regions and one or more blocking regions in the silicon-based multiplication region, wherein the one or more punch-through regions are adjacent to the one or more first buried-dopant regions and the one or more blocking regions are adjacent to the one or more second buried-dopant regions, and
wherein the property comprises a peak doping concentration or a depth.
18. The semiconductor structure of claim 17 , wherein the silicon-based multiplication region comprises:
a p-type region in the semiconductor substrate; and
an n-type avalanche breakdown region in the semiconductor substrate.
19. The semiconductor structure of claim 17 , wherein the germanium-based absorption region comprises:
an epitaxial bulk germanium region buried in the semiconductor substrate; and
a p-type sidewall-dopant region extending along outer edges of the epitaxial bulk germanium region and separating epitaxial bulk germanium region from the semiconductor substrate.