Holding device and method of manufacturing holding device
A holding device including a ceramic member formed of a sintered ceramic material containing aluminum nitride as a main component, a heating resistor element formed of a metal and disposed in the ceramic member, an electrically conductive electricity supply connection member in contact with the heating resistor element, and an electrically conductive electricity supply terminal electrically connected to the electricity supply connection member. The holding device holds an object on the surface of the ceramic member. In the holding device, at least a portion of the surface of the electricity supply connection member, excluding its contact surface for contact with the heating resistor element and its connection surface for connection with the electricity supply terminal, is covered with a coat layer formed of a nitride containing at least one of Al, Ti, Zr, V, Ta, and Nb. Also disclosed is a method of manufacturing the holding device.
1. A holding device comprising:
a ceramic member having a first surface and formed of a sintered ceramic material containing aluminum nitride as a main component;
a heating resistor element formed of a metal and disposed in the ceramic member;
an electricity supply connection member which is entirely embedded inside the ceramic member, is electrically conductive, and is in contact with the heating resistor element; and
an electricity supply terminal which is electrically conductive, is electrically connected to the electricity supply connection member, and extends to outside of the ceramic member,
the holding device being adapted to hold an object on the first surface of the ceramic member and being characterized in that
at least a portion of a surface of the electricity supply connection member, excluding a contact surface of the electricity supply connection member for contact with the heating resistor element and a connection surface of the electricity supply connection member for connection with the electricity supply terminal, is covered with a second coat layer formed of a nitride selected from the group consisting of AlN, AlTiN, AlTiSiN, AlZrN, AlTiCrN, VN, and NbN,
wherein the electricity supply connection member is in the form of a plate having a circular shape,
the electricity supply terminal is in the form of a column having a circular shape,
at least a portion of the contact surface of the electricity supply connection member for contact with the heating resistor element is covered with a first coat layer formed of a nitride containing at least one selected from the group consisting of Ti, Zr, V, Cr, Ta, and Nb, and
the first coat layer has a thickness of 0.3 μm to 60 μm.
2. The holding device according to claim 1 , wherein at least a portion of a surface of the heating resistor element, excluding its contact surface for contact with the electricity supply connection member, is covered with a third coat layer formed of a nitride containing at least one of Al, Ti, Zr, V, Ta, and Nb.
3. The holding device according to claim 1 , wherein a material of the first coat layer has a different chemical composition than a material of the second coat layer.
4. The holding device of claim 1 , wherein the electricity supply connection member is formed of tungsten or molybdenum.
5. The holding device of claim 4 , wherein the electricity supply terminal is formed of nickel or titanium.
6. The holding device of claim 1 , wherein the electricity supply terminal is formed of nickel or titanium.
7. A method of manufacturing a holding device which comprises a ceramic member having a first surface and formed of a sintered ceramic material containing aluminum nitride as a main component, a heating resistor element formed of a metal and disposed in the ceramic member, an electrically conductive electricity supply connection member which is entirely embedded inside the ceramic member and is in contact with the heating resistor element, and an electrically conductive electricity supply terminal which is electrically connected to the electricity supply connection member and extends outside of the ceramic member, and which holds an object on the first surface of the ceramic member,
the method being characterized by comprising the steps of:
forming a second coat layer which is a nitride selected from the group consisting of AlN, AlTiN, AlTiSiN, AlZrN, AlTiCrN, VN, and NbN on at least a portion of a surface of the electricity supply connection member, excluding a contact surface of the electricity supply connection member for contact with the heating resistor element and a connection surface of the electricity supply connection member for connection with the electricity supply terminal; and
forming, through firing, the ceramic member in which the heating resistor element and the electricity supply connection member having the coat layer formed thereon are disposed,
wherein the electricity supply connection member is in the form of a plate having a circular shape,
the electricity supply terminal is in the form of a column having a circular shape,
wherein the method further comprises forming a first coat layer which is a nitride containing at least one selected from the group consisting of Ti, Zr, V, Cr, Ta, and Nb on at least a portion of the contact surface of the electricity supply connection member for contact with the heating resistor element, and
wherein the first coat layer has a thickness of 0.3 μm to 60 μm.
8. The holding device of claim 7 , wherein the electricity supply connection member is formed of tungsten or molybdenum, and the electricity supply terminal is formed of nickel or titanium.