IP Library › Granted Patent US 12,278,080
Granted Patent B2
US 12,278,080 · App. 18/152,973 · Granted Apr 15, 2025

Microfocus x-ray source for generating high flux low energy x-rays

Inventors: Wenbing Yun (Walnut Creek, CA); Janos Kirz (Berkeley, CA)
Assignee: Sigray, Inc.
H01J35/16H01J35/112H01J35/14H01J35/18
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Quick Facts
Patent No.
US 12,278,080
App. No.
18/152,973
Granted
Apr 15, 2025
Kind
B2
Abstract

An x-ray source includes an x-ray transmissive window having an x-ray transmittance greater than or equal to 20% for at least some x-rays having an x-ray energy less than 1 keV. The x-ray source further includes an electron source configured to generate at least one electron beam and an anode assembly configured to generate x-rays in response to electron bombardment by at least some of the electrons of the at least one electron beam from the electron source. The x-ray source further includes at least one x-ray optic is configured to receive at least some of the x-rays from the anode assembly and to direct at least some of the received x-rays to the window to form an x-ray beam.

Claims (36)

1. An x-ray source comprising:

at least one housing configured to contain a first region at a pressure less than one atmosphere and configured to separate the first region from an ambient environment outside the at least one housing, the at least one housing comprising an x-ray transmissive window having an x-ray transmittance greater than or equal to 20% for at least some x-rays having an x-ray energy less than 1 keV;

an electron source within the at least one housing, the electron source configured to generate at least one electron beam;

an anode assembly within the at least one housing and configured to generate x-rays in response to electron bombardment by at least some of the electrons of the at least one electron beam from the electron source;

at least one x-ray optic within the at least one housing, the at least one x-ray optic configured to receive at least some of the x-rays from the anode assembly and to direct at least some of the received x-rays to the window to form an x-ray beam.

2. The x-ray source of claim 1 , wherein a cross-sectional area of the x-ray beam has a local minimum value at a focal point of the at least one x-ray optic.

3. The x-ray source of claim 1 , wherein the x-ray transmissive window has an x-ray transmittance greater than or equal to 20% for at least some x-rays having an x-ray energy less than 0.5 keV.

4. The x-ray source of claim 1 , wherein the x-ray transmissive window has an x-ray transmittance greater than or equal to 20% for at least some x-rays having an x-ray energy less than 0.3 keV.

5. The x-ray source of claim 1 , wherein the x-ray transmissive window comprises a plurality of x-ray transmissive elements, the at least one x-ray optic or the x-ray transmissive window configured to be adjusted to have the x-ray beam impinge a selected x-ray transmissive element of the plurality of x-ray transmissive elements.

6. The x-ray source of claim 1 , wherein the x-ray transmissive window comprises at least one x-ray transmissive element selected from the group consisting of: diamond, graphene, aluminum, aluminum hydroxide, silicon, silicon carbide, silicon nitride, lithium fluoride, boron carbide, beryllium, and beryllium oxide.

7. The x-ray source of claim 1 , wherein the at least one electron beam comprises a focused electron beam and wherein the x-rays generated by the anode assembly comprise a divergent x-ray beam.

8. The x-ray source of claim 1 , wherein the x-ray beam from the at least one x-ray optic comprises a focused x-ray beam.

9. The x-ray source of claim 1 , wherein the x-ray beam from the at least one x-ray optic has a cross-sectional area perpendicular to a propagation direction of the x-ray beam from the at least one x-ray optic, the cross-sectional area is a function of distance from the at least one x-ray optic.

10. The x-ray source of claim 1 , wherein the at least one housing comprises:

a first housing configured to contain the first region at a pressure less than 1 atmosphere and configured to separate the first region from the second region outside the first housing, the first housing containing the electron source, the anode assembly, and the at least one x-ray optic; and

a second housing configured to contain a third region, the window located between the first region and the third region.

11. The x-ray source of claim 1 , wherein a wall of the at least one housing comprises an aperture extending through the wall, and wherein the window is mounted and sealed over the aperture.

12. The x-ray source of claim 1 , wherein the electron source comprises an electron optic column having at least one cathode configured to emit electrons and an electron optics subsystem configured to direct, accelerate, and/or shape the electrons emitted from the at least one cathode to form the at least one electron beam and to adjust a position and/or orientation of the at least one electron beam relative to the anode assembly.

13. The x-ray source of claim 1 , wherein the anode assembly comprises at least one anode comprising at least one x-ray generating target structure and an electrically conductive substrate in thermal communication with the at least one target structure, wherein the at least one x-ray generating target structure is configured to generate x-rays when bombarded by the at least one electron beam, and wherein the substrate is configured to dissipate and/or transfer thermal energy away from the at least one target structure.

14. The x-ray source of claim 1 , wherein the at least one x-ray optic comprises at least one x-ray reflective surface having at least one segment of a quadric shape, and wherein the at least one x-ray reflective surface extends at least partially around an axis by an axial angle greater than or equal to 30 degrees.

15. The x-ray source of claim 2 , wherein the local minimum value at the focal point is in a range of 100 square microns to 5 square millimeters.

16. The x-ray source of claim 2 , wherein the focal point is within 30 millimeters from the window.

17. The x-ray source of claim 2 , wherein the focal point is within the first region.

18. The x-ray source of claim 2 , wherein the focal point is coincident with the window.

19. The x-ray source of claim 2 , wherein the focal point is outside of the at least one housing.

20. The x-ray source of claim 10 , further comprising at least one second x-ray optic within the third region and configured to receive x-rays of the x-ray beam transmitted through the window and to direct at least some of the received x-rays from the window to form a second x-ray beam.

21. The x-ray source of claim 10 , wherein the second housing further comprises at least one vacuum valve configured to controllably separate the third region from the second region.

22. The x-ray source of claim 11 , wherein the window comprises a substrate and an x-ray transmissive element, wherein the substrate affixed to a portion of the wall surrounding the aperture, and wherein the x-ray transmissive and the element is affixed to the substrate over the aperture.

23. The x-ray source of claim 22 , wherein the at least one housing comprises a bellows between a first portion and a second portion of the at least one housing, the first portion comprising the aperture and in mechanical communication with a stage configured to adjust a position of the aperture and the window relative to the x-ray beam.

24. The x-ray source of claim 12 , wherein the electron optic column is configured to focus the at least one electron beam onto a surface of the anode assembly with a focal spot size in at least one direction substantially perpendicular to an electron beam propagation direction, the focal spot size in a range less than or equal to 200 microns.

25. The x-ray source of claim 13 , wherein the at least one anode has an electrically conductive path from the at least one x-ray generating target structure to the substrate, and wherein the substrate has an electrically conductive path to ground.

26. The x-ray source of claim 13 , wherein the at least one x-ray generating target structure comprises at least one ceramic layer in thermal communication with the substrate, and wherein the at least one ceramic layer has a thickness in a range of 0.1 micron to 10 microns.

27. The x-ray source of claim 13 , wherein the at least one x-ray generating target structure comprises a first target structure comprising at least one x-ray generating material selected from the group consisting of: BeO, B 4 C, MgO, Al 2 O 3 , SiC, CaB 6 , diamond/graphite, LiF, and TiB 2 .

28. The x-ray source of claim 26 , wherein the at least one ceramic layer comprises at least one element selected from the group consisting of: lithium, beryllium, boron, carbon, nitrogen, oxygen, and fluorine.

29. The x-ray source of claim 27 , wherein the at least one x-ray generating target structure further comprises a second target structure spaced from the first target structure, the second target structure comprising at least one metal selected from the group consisting of: Ti, Sc, V, Cr, Cu, Fe, Co, Ni, Zr, and Mo.

30. The x-ray source of claim 14 , wherein at least one x-ray reflective surface comprises a first material, wherein the at least one x-ray optic further comprises at least one layer on the at least one x-ray reflective surface, and wherein the at least one layer comprises a second material different from the first material.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 16, 2023
From: YUN, WENBING; KIRZ, JANOS
To: SIGRAY, INC.
Reel/Frame 063003/0423 →
Continuity (2)
Provisional Application 63299341 · Jan 13, 2022
Related Publication 20230218247A1 · Jul 13, 2023
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