Process kit for a substrate support
Methods and apparatus for processing substrates are provided herein. In some embodiments, a process kit for a substrate support includes: an upper edge ring made of quartz and having an upper surface and a lower surface, wherein the upper surface is substantially planar and the lower surface includes a stepped lower surface to define a radially outermost portion and a radially innermost portion of the upper edge ring.
1. A process kit for a substrate support, comprising:
an upper edge ring made of quartz and having an upper surface and a lower surface, wherein the upper surface is substantially planar from an innermost diameter of the upper edge ring to proximate an outer diameter of the upper edge ring, and the lower surface includes a stepped lower surface to define a radially outermost portion and a radially innermost portion of the upper edge ring; and
a lower edge ring, wherein the lower edge ring is configured to interface with the stepped lower surface of the upper edge ring,
wherein the upper edge ring includes a curved upper peripheral edge connecting the upper surface to an outer peripheral wall of the upper edge ring or to the lower surface of the upper edge ring, and wherein the curved upper peripheral edge curves in a vertical direction between the upper surface and the lower surface.
2. The process kit of claim 1 , wherein the lower edge ring is comprised of aluminum or an aluminum alloy having an anodized coating.
3. The process kit of claim 1 , wherein the lower edge ring has a notch along an upper and radially outer peripheral edge, wherein the stepped lower surface of the upper edge ring is configured to interface with the notch.
4. The process kit of claim 1 , wherein the upper edge ring has an inner diameter that is less than that of the lower edge ring and an outer diameter that is greater than that of the lower edge ring.
5. The process kit of claim 1 , wherein the lower edge ring is conductive.
6. The process kit of claim 1 , wherein the radially outermost portion has a thickness greater than a thickness of the radially innermost portion.
7. The process kit of claim 1 , wherein the upper edge ring has a width of about 1.5 inches to about 2.0 inches.
8. The process kit of claim 1 , wherein the radially innermost portion of the upper edge ring has an outer diameter of about 13.5 inches to about 14.5 inches.
9. The process kit of claim 1 , wherein the stepped lower surface has one or more steps that progressively reduce the thickness of the upper edge ring from the radially outermost portion of the upper edge ring to the radially innermost portion of the upper edge ring.
10. A process kit for a substrate support, comprising:
a lower edge ring, wherein the lower edge ring is conductive; and
an upper edge ring having a contoured lower surface configured to interface with the lower edge ring, the upper edge ring further having an inner diameter that is less than that of the lower edge ring and an outer diameter that is greater than that of the lower edge ring, the upper edge ring further having an upper surface that is substantially planar, wherein the upper edge ring is fabricated from quartz,
wherein the upper edge ring includes a curved upper peripheral edge connecting the upper surface to an outer peripheral wall of the upper edge ring or to the contoured lower surface of the upper edge ring, wherein the curved upper peripheral edge curves in a vertical direction between the upper surface and the lower surface.
11. The process kit of claim 10 , wherein the contoured lower surface of the upper edge ring includes a stepped lower surface that generally reduces a thickness of the upper edge ring from a radially outermost portion to a radially innermost portion.
12. The process kit of claim 11 , wherein the stepped lower surface includes one step to define the radially outermost portion and the radially innermost portion, wherein the radially innermost portion of the upper edge ring is configured to interface with the lower edge ring.
13. The process kit of claim 10 , wherein the lower edge ring is made of aluminum or an aluminum alloy.
14. The process kit of claim 10 , wherein the lower edge ring is comprised of aluminum or an aluminum alloy having an anodized coating.
15. The process kit of claim 10 , wherein the lower edge ring has a notch along an upper and radially outer peripheral edge, wherein the contoured lower surface of the upper edge ring is configured to interface with the notch.
16. The process kit of claim 10 , wherein the contoured lower surface has one or more steps that progressively reduce the thickness of the upper edge ring from a thickest radially outermost portion of the upper edge ring to a thinnest radially innermost portion of the upper edge ring.
17. A substrate support, comprising:
a base supporting a substrate support surface configured to support a substrate having a given diameter; and
a process kit disposed atop the substrate support and comprising:
a lower edge ring having an upper surface positioned at a height above the upper surface of the base and below the substrate support surface; and
an upper edge ring disposed atop the lower edge ring, the upper edge ring having an inner diameter that is less than the given diameter and an outer diameter that is greater than that of the base, the upper edge ring further having an upper surface that is substantially planar, and wherein the upper surface of the upper edge ring is below the substrate support surface.
18. The substrate support of claim 17 , further comprising:
an upper portion of the substrate support disposed above the base, wherein an upper surface of the upper portion of the substrate support comprises the substrate support surface.
19. The substrate support of claim 18 , wherein the upper portion of the substrate support includes an outer peripheral ledge extending radially outward, and wherein the upper edge ring has a lower surface configured to rest on the outer peripheral ledge.
20. The substrate support of claim 17 , wherein the lower edge ring is comprised of aluminum or an aluminum alloy having an anodized coating.