Transistor array panel, manufacturing method thereof, and display device including the same
A transistor display panel according to an exemplary embodiment includes: a substrate; a first transistor disposed on the substrate; and a pixel electrode connected to the first transistor, wherein the first transistor includes a lower electrode disposed on the substrate, a first semiconductor overlapping the lower electrode, a first insulating layer covering the first semiconductor, a first gate electrode disposed on the first insulating layer and overlapping the first semiconductor, and a first source connecting member and a first drain connecting member disposed on the same layer as the first gate electrode and connected to the first semiconductor, wherein the first gate electrode is formed as a triple layer, the first source connecting member and first drain connecting member are formed as a double layer, and the first source connecting member is connected to the lower electrode.
1. A transistor display panel comprising:
a substrate;
a lower electrode disposed on the substrate;
a buffer layer disposed on the lower electrode;
a transistor disposed on the substrate; and
a pixel electrode electrically connected to the transistor,
wherein the transistor includes:
a semiconductor layer disposed on the substrate;
a gate electrode overlapping a part of the semiconductor layer; and
a first electrode and a second electrode disposed on the gate electrode,
wherein the lower electrode is electrically connected to the pixel electrode, and
wherein the lower electrode is disposed between the substrate and the transistor along a thickness direction of the substrate.
2. The transistor display panel of claim 1 , wherein the gate electrode includes a main gate layer and a lower gate layer under the main gate layer.
3. The transistor display panel of claim 2 , wherein the first electrode includes a main first layer and a lower first layer disposed thereunder, and the second electrode includes a main second layer and a lower second layer disposed thereunder.
4. The transistor display panel of claim 1 , wherein the pixel electrode is electrically connected to the first electrode.
5. The transistor display panel of claim 1 , further comprising:
a light-emitting diode element electrically connected to the transistor and comprising the pixel electrode, an emission layer, and a common electrode.
6. A transistor display panel comprising:
a substrate;
a lower electrode disposed on the substrate;
a buffer layer disposed on the lower electrode;
a transistor disposed on the substrate;
a pixel electrode electrically connected to the transistor;
a scan line disposed on the substrate;
a data line crossing the scan line; and
a second transistor electrically connected to the scan line and the data line,
wherein the transistor includes:
a semiconductor layer disposed on the substrate;
a gate electrode overlapping a part of the semiconductor layer; and
a first electrode and a second electrode disposed on the gate electrode,
wherein the lower electrode is electrically connected to the pixel electrode, and
wherein the second transistor includes a second semiconductor layer disposed on a same layer as the semiconductor layer, and a second gate electrode overlapping a part of the second semiconductor layer.
7. The transistor display panel of claim 6 , wherein the second gate electrode includes at least two layers.
8. The transistor display panel of claim 6 , wherein the semiconductor layer and the second semiconductor layer include an oxide semiconductor material.
9. The transistor display panel of claim 1 , wherein the lower electrode includes a metal having at least one among copper (Cu), copper alloys, aluminum (Al), aluminum alloys, molybdenum (Mo) and molybdenum alloys.
10. The transistor display panel of claim 9 , wherein the gate electrode includes a metal layer having at least one of molybdenum (Mo) and titanium (Ti).
11. The transistor display panel of claim 9 , wherein the lower first layer and lower second layer include a metal layer having titanium (Ti).
12. The transistor display panel of claim 9 , wherein the lower gate layer includes a metal layer having titanium (Ti).
13. The transistor display panel of claim 9 , wherein the pixel electrode includes a transparent conductive material having an indium tin oxide (ITO).
14. The transistor display panel of claim 1 , further comprising:
a storage capacitor electrically connected to the gate electrode,
wherein one electrode of the storage capacitor is disposed on a same layer as the gate electrode.
15. The transistor display panel of claim 14 , wherein the one electrode of the storage capacitor and the gate electrode are formed as one body.
16. The transistor display panel of claim 14 , wherein the one electrode of the storage capacitor extends from the gate electrode.
17. A display device comprising:
a substrate;
a lower electrode disposed on the substrate;
a semiconductor layer disposed on the lower electrode;
a gate electrode disposed on the semiconductor layer;
a first electrode and a second electrode disposed on the gate electrode and respectively electrically connected to a first region and a second region of the semiconductor layer; and
a pixel electrode electrically connected to the first electrode,
wherein the lower electrode is electrically connected to the first electrode and the pixel electrode, and
wherein the lower electrode is disposed between the substrate and the transistor along a thickness direction of the substrate.
18. The display device of claim 17 , further comprising:
a buffer layer disposed on the lower electrode;
a first insulating layer disposed on the semiconductor layer; and
a second insulating layer disposed on the gate electrode,
wherein the first electrode is connected to the lower electrode through an opening in the buffer layer, the first insulating layer, and the second insulating layer.
19. The display device of claim 17 , further comprising:
a scan line disposed on the substrate;
a data line crossing the scan line; and
a second transistor electrically connected to the scan line and the data line,
wherein the second transistor includes:
a second semiconductor layer disposed on a same layer as the semiconductor layer,
a second gate electrode overlapping a part of the second semiconductor layer, and
a second first electrode and a second electrode disposed on the same layer as the first electrode and the second electrode.
20. The display device of claim 17 , wherein the lower electrode overlaps at least a part of a channel of the semiconductor layer in a plan view.