Granted Patent B2

US 12,312,673 · App. 17/775,129 · Granted May 27, 2025

Inventor: Robert Ian Joseph Gruar (Swindon, GB)

Assignee: Dyson Technology Limited

C23C14/08C23C14/3471C23C14/562H01M4/0426H01M4/131H01M4/505H01M4/525H01M2004/028

Abstract

Claims (28)

1. A method of manufacturing a layer of cathode, the method comprising:

providing a substrate, wherein the substrate is in a form of a continuous flexible web, and comprises a polymer;

generating a plasma remote from one or more cathode material sputter targets;

confining the plasma in a space between the substrate and the one or more cathode material sputter targets;

controlling a sputter rate from the one or more cathode material sputter targets by curving a geometric surface of the plasma at a location substantially near to the one or more targets;

generating sputtered material from the target using the plasma; and

depositing sputtered material on the substrate, thereby forming a layer of crystalline cathode on the substrate.

2. The method according to claim 1 , further comprising moving the substrate, and depositing a layer of crystalline cathode onto the moving substrate.

3. The method according to claim 1 , wherein the polymer is polyethylene terephthalate (PET) or polyethylene naphthalate (PEN).

4. The method according to claim 3 , wherein a first portion of the continuous flexible web that is upstream of the plasma deposition process is held on an upstream roller or drum, and a second portion of the continuous flexible web that is downstream of the plasma deposition process is held on a downstream roller or drum.

5. The method according to claim 1 , in which the substrate does not exceed its temperature corrected yield strength.

6. The method according to claim 4 , in which the substrate does not exceed its temperature corrected yield strength as it passes from the upstream roller or drum to the downstream roller or drum.

7. The method according to claim 1 , wherein the cathode material comprises one or more alkali metals, one or more transition metals, and optionally aluminium.

8. The method according to claim 7 , wherein the cathode material comprises lithium and one or more transition metal, each selected from the group consisting of Co, Ni and Mn.

9. The method according to claim 1 , in which the maximum temperature reached at any given time by any given square of substrate material having an area of 1 cm 2 as measured on the surface opposite to said surface on which the material is deposited and as averaged over a period of 1 second, is less than 200 degrees C.

10. The method according to claim 1 , in which one or more target(s) comprises the cathode material.

11. The method according to claim 1 , in which the thickness of the deposited cathode material on completion of deposition is no more than 10 microns.

12. The method according to claim 1 , in which the thickness of the substrate is no more than 1.6 microns.

13. The method according to claim 1 , in which the power density associated with the bias applied to at least one target is at least 1.0 Wcm −2 .

14. The method according to claim 1 , in which the power density associated with the bias applied to the target is up to 100 Wcm −2 .

15. The method according to claim 1 , in which the ratio of the power supplied to generate the remote plasma to the power associated with the bias of the target is more than 1:1.

16. The method according to claim 15 , in which the ratio of the power supplied to generate the remote plasma to the power associated with the bias of the target is no more than 7:2.

17. The method according to claim 1 , wherein the working distance between the target and the substrate may be within +/−50% of the theoretical mean free path of the system.

18. The method according to claim 1 , wherein the working pressure is from 0.00065 mBar to 0.02 mBar.

19. The method according to claim 1 , in which the substrate comprises a current collecting layer.

20. A method of manufacturing a cathodic half-cell of a battery, the method comprising: making a battery cathode for a solid state battery using the method according to claim 1 ; and depositing electrolyte onto said battery cathode.

21. A method of making a solid state battery cell, the method comprising making a cathodic half cell in accordance with the method of claim 20 ; and contacting said cathodic half cell with an anode or depositing anode-forming material on the electrolyte.

22. A method of making a solid state battery comprising a plurality of solid state battery cells, the method comprising: making a plurality of solid state battery cells in accordance with the method of claim 21 .

Assignments (1)

Priority Claims (1)

Continuity (1)

References Cited (181)

Cited By (1)

US 12,548,755