Silicon carbide wafer and method of preparing the same
The method of preparing a silicon carbide ingot includes: disposing a raw material and a silicon carbide seed crystal to be separated in a reactor having an internal space; adjusting a temperature, a pressure, and an atmosphere of the internal space for sublimating the raw material and growing the silicon carbide ingot on the silicon carbide seed crystal; and cooling the reactor and retrieving the silicon carbide ingot, wherein the adjusting proceeds in a first inert gas atmosphere having a flow quantity of 100 sccm to 300 sccm, the cooling proceeds in a second inert gas atmosphere having a flow quantity of 1 sccm to 250 sccm, and the reactor has a thermal conductivity of 120 W/mK or less.
1. A method of preparing a silicon carbide ingot comprising:
disposing a raw material and a silicon carbide seed crystal to be separated in a reactor having an internal space;
adjusting a temperature, a pressure, and an atmosphere of the internal space for sublimating the raw material and growing the silicon carbide ingot on the silicon carbide seed crystal; and
cooling the reactor and retrieving the silicon carbide ingot,
wherein the adjusting proceeds in a first inert gas atmosphere having a flow quantity of 100 sccm to 300 sccm, the cooling proceeds in a second inert gas atmosphere having a flow quantity of 1 sccm to 250 sccm, and the reactor has a thermal conductivity of 120 W/mK or less.
2. The method of claim 1 , wherein the reactor has a thermal conductivity of 85 W/mK or more.
3. The method of claim 1 , wherein the reactor comprises:
a heat insulating material surrounding the reactor;
a reacting chamber disposed in the internal space; and
a heating means disposed in an external space of the reacting chamber,
wherein the heat insulating material has a thermal conductivity of 1.24 W/mK or less at 2000° C.
4. The method of claim 1 , wherein the silicon carbide seed crystal has a diameter of four inches or more and comprises a 4H-silicon carbide structure.
5. A method of preparing a silicon carbide wafer comprising:
disposing a raw material and a silicon carbide seed crystal to be separated in a reactor having an internal space;
adjusting a temperature, a pressure, and an atmosphere of the internal space for sublimating the raw material and growing a silicon carbide ingot on the silicon carbide seed crystal;
cooling the reactor and retrieving the silicon carbide ingot; and
cutting the silicon carbide ingot to prepare the silicon carbide wafer,
wherein the adjusting proceeds in a first inert gas atmosphere having a flow quantity of 100 sccm to 300 sccm, the cooling proceeds in a second inert gas atmosphere having a flow quantity of 1 sccm to 250 sccm, and the reactor has a thermal conductivity of 120 W/mK or less.
6. The method of claim 5 , further comprising wrapping and surface polishing the silicon carbide wafer after the cutting.
7. A silicon carbide wafer prepared from the method of claim 5 .
8. The silicon carbide wafer of claim 7 , wherein the silicon carbide wafer has a diameter of four inches or more, comprises a 4H-silicon carbide structure, and comprises: a Si surface as a first side, where a silicon atom layer is exposed on the Si surface; and a C surface as a second side, where a carbon atom layer is exposed on the C surface.
9. The silicon carbide wafer of claim 7 , wherein the silicon carbide wafer has a crack occurrence dropping weight height of 100 mm or more, which is measured by a DuPont impact tester with a sample having a thickness of 360 μm and a weight of 25 g.
10. The silicon carbide wafer of claim 7 , wherein the silicon carbide wafer is a bare wafer, which does not comprise an epitaxial layer on its surface.
11. The silicon carbide wafer of claim 7 , wherein the silicon carbide wafer has a diameter of four inches or more and comprises a 4H-silicon carbide.
12. The silicon carbide wafer of claim 7 , wherein the silicon carbide wafer comprises, a first side where a silicon atom layer is exposed on a surface of the first side and a second side where a carbon atom layer is exposed on a surface of the second side, and, when a nanoindentation test is performed, an indenter in a trigonal pyramid shape adds indentation to the silicon carbide wafer, and indentation quantity (x) depending on load (y) is regressed as y=ax 2 +bx+c type quadratic polynomial from beginning of indentation to 10 mN, where a is 0.37 to 0.6, and b is 10 to 33.
13. A semiconductor device comprising:
the silicon carbide wafer of claim 7 ;
an epitaxial layer disposed on a first side of the silicon carbide wafer;
a barrier area disposed on the epitaxial layer;
a source electrode disposed in contact with the epitaxial layer;
a gate electrode disposed on the barrier area; and
a drain electrode disposed on a second side of the silicon carbide wafer.
14. The silicon carbide wafer of claim 7 , wherein the silicon carbide wafer has a reduced elastic modulus of 300 GPa to 370 GPa, and a hardness of 35 GPa to 48 GPa, where the reduced elastic modulus and the hardness are measured according to a nanoindentation test, in which an indenter in a trigonal pyramid (Berkovich) shape is added in a load of 10 mN, and the nanoindentation test measures arbitrary ten points, except for a ring area occupying a width of 10 mm in a direction from an outermost edge to a center of the silicon carbide wafer.
15. The silicon carbide wafer of claim 14 , wherein the reduced elastic modulus has a standard deviation of 5.5 GPa or less, and the hardness has a standard deviation of 1.1 GPa or less.
16. The silicon carbide wafer of claim 7 , wherein the silicon carbide wafer comprises, a first side where more silicon atoms than carbon atoms are exposed on a surface of the first side and a second side where more carbon atoms than silicon atoms are exposed on a surface of the second side, wherein a second reduced elastic modulus of the second side Ec and a first reduced elastic modulus of the first side Esi has a ratio Ec/Esi of 0.8 to 1.15, a second hardness of the second side Hc and a first hardness of the first side His has a ratio of Hc/His of 0.85 to 1.15, the second reduced elastic modulus of the second side, the first reduced elastic modulus of the first side, the second hardness of the second side, and the first hardness of the first side are measured according to a nanoindentation test, in which an indenter in a trigonal pyramid shape is added in a load of 10 mN, and the nanoindentation test has an average value of values measured at arbitrary ten points, except for a ring area occupying a width of 10 mm in a direction from an outermost edge to a center of the silicon carbide wafer.
17. The silicon carbide wafer of claim 16 , wherein the first side has a micropipe density of 1/cm 2 or less, a Threading Edge Dislocation (TED) density of 9000/cm 2 or less, and a Basal Plane Dislocation (BPD) density of 4000/cm 2 or less.
18. The silicon carbide wafer of claim 16 , wherein the first side has the first reduced elastic modulus Esi of 300 GPa to 350 GPa, and wherein the first reduced elastic modulus has a standard deviation of 5.5 GPa or less, and the first hardness has a standard deviation of 1.1 GPa or less.
19. The silicon carbide wafer of claim 16 , wherein the indenter is a trigonal pyramid having a base plane in an equilateral triangle shape, one side plane having an angle of 24.7° with the base plane among three side planes, remaining two side planes having an angle of 12.95° with the base plane, respectively, a height of 1 μm based on the base plane, a Young's modulus of 1140 GPa, and a Poisson's ratio of 0.07.
20. The silicon carbide wafer of claim 16 , wherein a hardness of the first side and a hardness of the second side are 35 GPa to 45 GPa, respectively.