IP Library › Granted Patent US 12,320,983
Granted Patent B1
US 12,320,983 · App. 18/878,954 · Granted Jun 3, 2025

Image projector with polarizing catadioptric collimator

Inventor: Yochay Danziger (Kfar Vradim, IL)
Assignee: Lumus Ltd.
G02B27/0172G02B27/123G02B27/126G02B27/283G02B27/30
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,320,983
App. No.
18/878,954
Granted
Jun 3, 2025
Kind
B1
Abstract

An image projector for injecting a collimated image into an entrance aperture of a lightguide employs collimating optics including a polarizing catadioptric arrangement to provide enhanced proximity of the principal plane of the collimating optics to the entrance aperture of the lightguide, thereby reducing the size of the optics or allowing an enlarged field of view for optics of a given size. Disclosed embodiments employ a front-lit polarization-modifying spatial light modulator (SLM) illuminated via a polarizing beam splitter (PBS) prism with a 30-degree or 45-degree PBS angle, laser scanning illumination arrangements, with or without an SLM, and active-matrix image generators combined via a dichroic combiner cube.

Claims (38)

1. An image projector for injecting a collimated image into an entrance aperture of a lightguide, the image projector comprising:

(a) a polarization-modifying spatial light modulator (SLM) deployed for modifying a polarization of illumination according to image data supplied to said SLM;

(b) an illumination arrangement for illuminating said SLM with polarized illumination;

(c) a polarization-selective element deployed to select light from said SLM corresponding to an image; and

(d) collimating optics for collimating the light corresponding to the image so as to provide the collimated image at the entrance aperture of the lightguide, wherein said collimating optics includes a polarizing catadioptric arrangement comprising, sequentially:

(i) a first quarter-wave plate;

(ii) a first optical surface implemented as a partial reflector;

(iii) a second quarter-wave plate; and

(iv) a second optical surface implemented as a polarization-selective reflector,

wherein at least one of said first and second optical surfaces is implemented as a non-planar surface with optical power which acts twice on the light, once as a refractive lens surface and once as a reflective lens.

2. The image projector of claim 1 , wherein said polarization-selective element is a polarizing beam splitter (PBS) integrated into a prism, and wherein said illumination arrangement directs illumination so as to reflect from said PBS towards said SLM.

3. The image projector of claim 2 , wherein said PBS is inclined at an angle of 30 degrees to a surface of said SLM, the image projector further comprising an angularly-selective reflector deployed parallel to said SLM between said SLM and said PBS, said illumination arrangement directing illumination so as to reflect from said angularly-selective reflector towards said PBS, and to reflect from said PBS towards said SLM, said angularly-selective reflector being reflective for visible light incident at an angle of incidence of 60 degrees and substantially transparent to visible light incident at an angle of incidence less than 30 degrees.

4. The image projector of claim 2 , wherein said PBS is inclined at an angle of 45 degrees to a surface of said SLM, the image projector further comprising a quarter-wave plate and an illumination-optics reflective lens associated with a face of said prism for directing illumination that has passed through said PBS back towards said PBS to be reflected at said PBS towards said SLM.

5. The image projector of claim 4 , wherein said illumination arrangement further comprises a light source associated with an illumination aperture from which light propagates through said prism towards said illumination-optics reflective lens, and wherein said illumination-optics reflective lens and said collimating optics are configured to image said illumination aperture to the entrance aperture of the lightguide.

6. The image projector of claim 4 , wherein said illumination arrangement further comprises a scanning mirror for scanning a beam of illumination through a range of angles about at least one tilt axis, said scanning mirror being deployed to direct the beam of illumination through said prism towards said illumination-optics reflective lens, and wherein said illumination-optics reflective lens and said collimating optics are configured to image said scanning mirror to the entrance aperture of the lightguide.

7. The image projector of claim 2 , wherein said second optical surface is a planar surface that is bonded to an image input surface of the lightguide.

8. The image projector of claim 2 , wherein said first optical surface is a planar surface that is bonded to an output surface of said prism.

9. The image projector of claim 2 , wherein said first optical surface is a non-planar surface that is bonded to a corresponding non-planar output surface of said prism.

10. The image projector of claim 1 , wherein said illumination arrangement comprises a lightguide having a pair of mutually-parallel major surfaces for supporting propagation of illumination by internal reflection at said major surfaces, and a plurality of mutually-parallel partially-reflecting coupling-out surfaces internal to said lightguide and oriented obliquely to said major surfaces so as to couple out illumination towards said SLM.

11. An image projector for injecting a collimated image into an entrance aperture of a lightguide, the image projector comprising:

(a) a beam splitter integrated into a prism;

(b) an image generator configured for generating an image at an image plane associated with a third face of said prism; and

(c) collimating optics for collimating light of the image so as to provide a collimated image at the entrance aperture of the lightguide, wherein said collimating optics includes a polarizing catadioptric arrangement comprising, sequentially:

(i) a first quarter-wave plate;

(ii) a first optical surface implemented as a partial reflector;

(iii) a second quarter-wave plate; and

(iv) a second optical surface implemented as a polarization-selective reflector,

wherein at least one of said first and second optical surfaces is implemented as a non-planar surface with optical power which acts twice on the light, once as a refractive lens surface and once as a reflective lens.

12. The image projector of claim 11 , wherein said beam splitter is a polarizing beam splitter (PBS), the image projector further comprising:

(a) an illumination arrangement comprising at least one light source for generating a modulated intensity beam of light and a scanning mirror for scanning the beam of light through a range of angles about at least one tilt axis, said scanning mirror being deployed to direct the beam of light into a first face of said prism;

(b) an illumination-optics reflective lens and a first quarter-wave plate associated with a second face of said prism for directing light that has passed through said prism back towards said PBS;

(c) a beam-spreading reflector and a second quarter-wave plate associated with the third face of said prism; and

(d) a controller for synchronously modulating an intensity of said light source and controlling said scanning mirror so as to generate a time-averaged intensity distribution of light at said beam-spreading reflector corresponding to an image.

13. The image projector of claim 11 , wherein said beam splitter is a dichroic mirror, and wherein said image generator is a first active-matrix image generator generating an image emitted as light of at least a first wavelength that is reflected by said dichroic mirror, the image projector further comprising a second active-matrix image generator associated with a second face of said prism, said second active-matrix image generator generating an image emitted as light of at least a second wavelength that is transmitted by said dichroic mirror so as to be combined with the light of said first wavelength on reaching said collimating optics.

14. The image projector of claim 13 , further comprising a second dichroic mirror deployed within said prism non-parallel to said dichroic mirror, said second dichroic mirror being transparent to light of said first and second wavelengths and reflective to light of a third wavelength, the image projector further comprising a third active-matrix image generator associated with a first face of said prism, said third active-matrix image generator generating an image emitted as light of at least the third wavelength that is reflected by said second dichroic mirror so as to be combined with the light of said first and second wavelengths on reaching said collimating optics.

15. The image projector of claim 11 , wherein said second optical surface is a planar surface that is bonded to an image input surface of the lightguide.

16. The image projector of claim 11 , wherein said first optical surface is a planar surface that is bonded to an output surface of said prism.

17. The image projector of claim 11 , wherein said first optical surface is a non-planar surface that is bonded to a corresponding non-planar output surface of said prism.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 4, 2025
From: DANZIGER, YOCHAY
To: LUMUS LTD.
Reel/Frame 070098/0975 →
Continuity (2)
Provisional Application 63405945 · Sep 13, 2022
Provisional Application 63398921 · Aug 18, 2022
References Cited (299)
US 2748659A · Geffcken et al. · 1956 [cited by applicant]
US 2795069A · Hardesty · 1957 [cited by applicant]
US 2886911A · Hardesty · 1959 [cited by applicant]
US 3491245A · Hardesty · 1970 [cited by applicant]
US 3667621A · Barlow · 1972 [cited by applicant]
US 3677621A · Smith · 1972 [cited by applicant]
US 3737212A · Antonson et al. · 1973 [cited by applicant]
US 3802763A · Cook et al. · 1974 [cited by applicant]
US 3829197A · Thelen · 1974 [cited by applicant]
US 3857109A · Pilloff · 1974 [cited by applicant]
US 3940204A · Withrington · 1976 [cited by applicant]
US 3969023A · Brandt et al. · 1976 [cited by applicant]
US 4084883A · Eastman et al. · 1978 [cited by applicant]
US 4191446A · Arditty et al. · 1980 [cited by applicant]
US 4309070A · St Leger Searle · 1982 [cited by applicant]
US 4331387A · Wentz · 1982 [cited by applicant]
US 4516828A · Steele · 1985 [cited by applicant]
US 4613216A · Herbec et al. · 1986 [cited by applicant]
US 4662717A · Yamada et al. · 1987 [cited by applicant]
US 4711512A · Upatnieks · 1987 [cited by applicant]
US 4715684A · Gagnon · 1987 [cited by applicant]
US 4775217A · Ellis · 1988 [cited by applicant]
US 4798448A · Van Raalte · 1989 [cited by applicant]
US 4805988A · Dones · 1989 [cited by applicant]
US 4932743A · Isobe et al. · 1990 [cited by applicant]
US 4978952A · Irwin · 1990 [cited by applicant]
US 5033828A · Haruta · 1991 [cited by applicant]
US 5076664A · Migozzi · 1991 [cited by applicant]
US 5096520A · Faris · 1992 [cited by applicant]
US 5157526A · Kondo et al. · 1992 [cited by applicant]
US 5208800A · Isobe et al. · 1993 [cited by applicant]
US 5231642A · Scifres et al. · 1993 [cited by applicant]
US 5235589A · Yokomori et al. · 1993 [cited by applicant]
US 5301067A · Bleier et al. · 1994 [cited by applicant]
US 5353134A · Michel et al. · 1994 [cited by applicant]
US 5367399A · Kramer · 1994 [cited by applicant]
US 5369415A · Richard et al. · 1994 [cited by applicant]
US 5453877A · Gerbe et al. · 1995 [cited by applicant]
US 5543877A · Takashi et al. · 1996 [cited by applicant]
US 5619601A · Akashi et al. · 1997 [cited by applicant]
US 5650873A · Gal et al. · 1997 [cited by applicant]
US 5680209A · Meinrad · 1997 [cited by applicant]
US 5712694A · Taira et al. · 1998 [cited by applicant]
US 5724163A · David · 1998 [cited by applicant]
US 5745199A · Suzuki et al. · 1998 [cited by applicant]
US 5751480A · Kitagishi · 1998 [cited by applicant]
US 5764412A · Suzuki et al. · 1998 [cited by applicant]
US 5829854A · Jones · 1998 [cited by applicant]
US 5883684A · Millikan et al. · 1999 [cited by applicant]
US 5896232A · Budd et al. · 1999 [cited by applicant]
US 5919601A · Nguyen et al. · 1999 [cited by applicant]
US 5966223A · Yaakov et al. · 1999 [cited by applicant]
US 5982536A · Swan · 1999 [cited by applicant]
US 6021239A · Minami et al. · 2000 [cited by applicant]
US 6052500A · Takano et al. · 2000 [cited by applicant]
US 6091548A · Chen · 2000 [cited by applicant]
US 6144347A · Mizoguchi et al. · 2000 [cited by applicant]
US 6222676B1 · Togino et al. · 2001 [cited by applicant]
US 6222677B1 · Budd et al. · 2001 [cited by applicant]
US 6239092B1 · Papasso et al. · 2001 [cited by applicant]
US 6322256B1 · Inada et al. · 2001 [cited by applicant]
US 6324330B1 · Stites · 2001 [cited by applicant]
US 6349001B1 · Spitzer · 2002 [cited by applicant]
US 6362861B1 · Hertz et al. · 2002 [cited by applicant]
US 6384982B1 · Spitzer · 2002 [cited by applicant]
US 6388814B2 · Tanaka · 2002 [cited by applicant]
US 6404550B1 · Yajima · 2002 [cited by applicant]
US 6404947B1 · Matsuda · 2002 [cited by applicant]
US 6483113B1 · Sealy et al. · 2002 [cited by applicant]
US 6509982B2 · Steiner · 2003 [cited by applicant]
US 6542307B2 · Gleckman · 2003 [cited by applicant]
US 6556282B2 · Jamieson et al. · 2003 [cited by applicant]
US 6577411B1 · David · 2003 [cited by applicant]
US 6671100B1 · McRuer · 2003 [cited by applicant]
US 6690513B2 · Hulse et al. · 2004 [cited by applicant]
US 6710902B2 · Takeyama · 2004 [cited by applicant]
US 6799859B1 · Ida et al. · 2004 [cited by applicant]
US 6762801B2 · Weiss et al. · 2004 [cited by applicant]
US 6775432B2 · Basu · 2004 [cited by applicant]
US 6791760B2 · Janeczko et al. · 2004 [cited by applicant]
US 6798579B2 · Robinson et al. · 2004 [cited by applicant]
US 6829095B2 · Amitai · 2004 [cited by applicant]
US 6880931B2 · Moliton et al. · 2005 [cited by applicant]
US 6942925B1 · Lazarev et al. · 2005 [cited by applicant]
US 7016113B2 · Choi et al. · 2006 [cited by applicant]
US 7021777B2 · Amitai · 2006 [cited by applicant]
US 7088664B2 · Kim et al. · 2006 [cited by applicant]
US 7175304B2 · Wadia et al. · 2007 [cited by applicant]
US 7205960B2 · David · 2007 [cited by applicant]
US 7339742B2 · Amitai et al. · 2008 [cited by applicant]
US 7355795B1 · Yamazaki et al. · 2008 [cited by applicant]
US 7384159B2 · Takeda · 2008 [cited by applicant]
US 7391573B2 · Amitai · 2008 [cited by applicant]
US 7418170B2 · Mukawa et al. · 2008 [cited by applicant]
US 7430355B2 · Heikenfeld et al. · 2008 [cited by applicant]
US 7448170B2 · Milovan et al. · 2008 [cited by applicant]
US 7457040B2 · Amitai · 2008 [cited by applicant]
US 7577326B2 · Amitai · 2009 [cited by applicant]
US 7612879B2 · Stumpe et al. · 2009 [cited by applicant]
US 7643214B2 · Amitai · 2010 [cited by applicant]
US 7672055B2 · Amitai · 2010 [cited by applicant]
US 7724443B2 · Amitai · 2010 [cited by applicant]
US 7751122B2 · Amitai · 2010 [cited by applicant]
US 7778508B2 · Hirayama · 2010 [cited by applicant]
US 7808625B2 · Nakamura et al. · 2010 [cited by applicant]
US 7949214B2 · Dejong · 2011 [cited by applicant]
US 7995275B2 · Maeda et al. · 2011 [cited by applicant]
US 8000020B2 · Amitai · 2011 [cited by applicant]
US 8035872B2 · Ouchi · 2011 [cited by applicant]
US 8098439B2 · Amitai et al. · 2012 [cited by applicant]
US 8187481B1 · Hobbs · 2012 [cited by applicant]
US 8405573B2 · Lapidot et al. · 2013 [cited by applicant]
US 8432614B2 · Amitai · 2013 [cited by applicant]
US 8433172B2 · Pascal et al. · 2013 [cited by applicant]
US 8643948B2 · Amitai et al. · 2014 [cited by applicant]
US 8666208B1 · Amirparviz et al. · 2014 [cited by applicant]
US 8718437B2 · Coe-Sullivan · 2014 [cited by applicant]
US 8870384B2 · Imai et al. · 2014 [cited by applicant]
US 8913865B1 · Bennett · 2014 [cited by applicant]
US 9025253B2 · Hadad et al. · 2015 [cited by applicant]
US 9523852B1 · Brown et al. · 2016 [cited by applicant]
US 9541762B2 · Mukawa et al. · 2017 [cited by applicant]
US 9551880B2 · Amitai · 2017 [cited by applicant]
US 9709809B2 · Miyawaki et al. · 2017 [cited by applicant]
US 10222535B2 · Remhof et al. · 2019 [cited by applicant]
US 10302957B2 · Sissom · 2019 [cited by applicant]
US 10437068B2 · Weng · 2019 [cited by applicant]
US 10466479B2 · Shih et al. · 2019 [cited by applicant]
US 10571636B2 · Gelberg · 2020 [cited by applicant]
US 10739598B2 · Ofir · 2020 [cited by applicant]
US 10809528B2 · Amitai · 2020 [cited by applicant]
US 10795156B2 · Marshall · 2020 [cited by applicant]
US 10830938B2 · Ronen et al. · 2020 [cited by applicant]
US 10908426B2 · Amitai · 2021 [cited by applicant]
US 10951867B2 · Pappas et al. · 2021 [cited by applicant]
US 10969590B1 · Danziger et al. · 2021 [cited by applicant]
US 11262564B2 · Tanaka · 2022 [cited by applicant]
US 11523092B2 · Greenstein et al. · 2022 [cited by applicant]
US 20010000124A1 · Kollin et al. · 2001 [cited by applicant]
US 20010030860A1 · Kimura et al. · 2001 [cited by applicant]
US 20020015233A1 · Park · 2002 [cited by applicant]
US 20020097762A1 · Yoshimura et al. · 2002 [cited by applicant]
US 20020176173A1 · Song · 2002 [cited by applicant]
US 20020191297A1 · Gleckman et al. · 2002 [cited by applicant]
US 20030007157A1 · Hulse et al. · 2003 [cited by applicant]
US 20030020006A1 · Janeczko et al. · 2003 [cited by applicant]
US 20030063042A1 · Friesem et al. · 2003 [cited by applicant]
US 20030072160A1 · Kuepper et al. · 2003 [cited by applicant]
US 20030090439A1 · Spitzer et al. · 2003 [cited by applicant]
US 20030165017A1 · Amitai · 2003 [cited by applicant]
US 20030169504A1 · Kaminsky et al. · 2003 [cited by applicant]
US 20030197938A1 · Schmidt et al. · 2003 [cited by applicant]
US 20030218718A1 · Moliton et al. · 2003 [cited by applicant]
US 20030235768A1 · Fincher et al. · 2003 [cited by applicant]
US 20040013068A1 · Aastuen et al. · 2004 [cited by applicant]
US 20040085649A1 · Repetto et al. · 2004 [cited by applicant]
US 20040137189A1 · Tellini et al. · 2004 [cited by applicant]
US 20040233534A1 · Nakanishi et al. · 2004 [cited by applicant]
US 20050012842A1 · Miyagawa et al. · 2005 [cited by applicant]
US 20050018308A1 · Cassarly et al. · 2005 [cited by applicant]
US 20050024849A1 · Parker et al. · 2005 [cited by applicant]
US 20050084210A1 · Cha · 2005 [cited by applicant]
US 20050174641A1 · Greenberg · 2005 [cited by applicant]
US 20050174658A1 · Long et al. · 2005 [cited by applicant]
US 20050180687A1 · Amitai et al. · 2005 [cited by applicant]
US 20050265044A1 · Chen et al. · 2005 [cited by applicant]
US 20060126182A1 · Levola · 2006 [cited by applicant]
US 20060171046A1 · Recco et al. · 2006 [cited by applicant]
US 20060268421A1 · Shimizu et al. · 2006 [cited by applicant]
US 20070035707A1 · Margulis · 2007 [cited by applicant]
US 20070070859A1 · Hirayama · 2007 [cited by applicant]
US 20070159673A1 · Freeman et al. · 2007 [cited by applicant]
US 20070188837A1 · Shimizu et al. · 2007 [cited by applicant]
US 20080025667A1 · Amitai · 2008 [cited by applicant]
US 20080094586A1 · Hirayama · 2008 [cited by applicant]
US 20080151375A1 · Lin · 2008 [cited by applicant]
US 20080151379A1 · Amitai · 2008 [cited by applicant]
US 20080192239A1 · Otosaka · 2008 [cited by applicant]
US 20080198471A1 · Amitai · 2008 [cited by applicant]
US 20080247150A1 · Itoh et al. · 2008 [cited by applicant]
US 20080259429A1 · Kamm et al. · 2008 [cited by applicant]
US 20080278812A1 · Amitai · 2008 [cited by applicant]
US 20090010023A1 · Kanade et al. · 2009 [cited by applicant]
US 20090122414A1 · Amitai · 2009 [cited by applicant]
US 20090190222A1 · Simmonds et al. · 2009 [cited by applicant]
US 20100053148A1 · Khazeni et al. · 2010 [cited by applicant]
US 20100067110A1 · Yaakov et al. · 2010 [cited by applicant]
US 20100111472A1 · DeJong · 2010 [cited by applicant]
US 20100201128A1 · Saccomammo · 2010 [cited by applicant]
US 20100202048A1 · Amitai et al. · 2010 [cited by applicant]
US 20100202128A1 · Saccomanno · 2010 [cited by applicant]
US 20100214635A1 · Sasaki et al. · 2010 [cited by applicant]
US 20100278480A1 · Vasylyev et al. · 2010 [cited by applicant]
US 20100291489A1 · Moskovits et al. · 2010 [cited by applicant]
US 20110096566A1 · Tsai et al. · 2011 [cited by applicant]
US 20110176218A1 · Noui · 2011 [cited by applicant]
US 20110227661A1 · Numata et al. · 2011 [cited by applicant]
US 20110242661A1 · Simmonds · 2011 [cited by applicant]
US 20120039576A1 · Dangel et al. · 2012 [cited by applicant]
US 20120062998A1 · Schultz et al. · 2012 [cited by applicant]
US 20120147361A1 · Mochizuki et al. · 2012 [cited by applicant]
US 20120194781A1 · Agurok · 2012 [cited by applicant]
US 20120206817A1 · Totani et al. · 2012 [cited by applicant]
US 20120274751A1 · Smith et al. · 2012 [cited by applicant]
US 20120306940A1 · Machida · 2012 [cited by applicant]
US 20130007833A1 · Kitazato et al. · 2013 [cited by applicant]
US 20130016292A1 · Mlao et al. · 2013 [cited by applicant]
US 20130022316A1 · Pelletier et al. · 2013 [cited by applicant]
US 20130027655A1 · Blum et al. · 2013 [cited by applicant]
US 20130135749A1 · Akutsu et al. · 2013 [cited by applicant]
US 20130321432A1 · Burns et al. · 2013 [cited by applicant]
US 20130334504A1 · Thompson et al. · 2013 [cited by applicant]
US 20140003762A1 · Macnamara · 2014 [cited by applicant]
US 20140043688A1 · Schrader et al. · 2014 [cited by applicant]
US 20140160577A1 · Dominici et al. · 2014 [cited by applicant]
US 20140185142A1 · Gupta et al. · 2014 [cited by applicant]
US 20140226215A1 · Komatsu et al. · 2014 [cited by applicant]
US 20140226361A1 · Vasylyev · 2014 [cited by applicant]
US 20140334777A1 · Dubroca et al. · 2014 [cited by applicant]
US 20140374377A1 · Schulz et al. · 2014 [cited by applicant]
US 20150016777A1 · Abovitz et al. · 2015 [cited by applicant]
US 20150081313A1 · Boross et al. · 2015 [cited by applicant]
US 20150138646A1 · Tatsugi · 2015 [cited by applicant]
US 20150153569A1 · Yonekubo · 2015 [cited by applicant]
US 20150160529A1 · Popovich et al. · 2015 [cited by applicant]
US 20150182348A1 · Siegal et al. · 2015 [cited by applicant]
US 20150219834A1 · Nichol et al. · 2015 [cited by applicant]
US 20150241619A1 · Richards et al. · 2015 [cited by applicant]
US 20150331546A1 · Craven-Bartle et al. · 2015 [cited by applicant]
US 20160062119A1 · Fitch et al. · 2016 [cited by applicant]
US 20160202048A1 · Meng · 2016 [cited by applicant]
US 20160234485A1 · Robbins et al. · 2016 [cited by applicant]
US 20160238844A1 · Dobschal · 2016 [cited by applicant]
US 20160370693A1 · Watanabe · 2016 [cited by applicant]
US 20170004574A1 · Deats et al. · 2017 [cited by applicant]
US 20170045743A1 · Dobschal et al. · 2017 [cited by applicant]
US 20170045744A1 · Amitai · 2017 [cited by applicant]
US 20170075119A1 · Schultz et al. · 2017 [cited by applicant]
US 20170097506A1 · Schowengerdt et al. · 2017 [cited by applicant]
US 20170242249A1 · Wall · 2017 [cited by applicant]
US 20170285346A1 · Pan · 2017 [cited by applicant]
US 20170293140A1 · Cai et al. · 2017 [cited by applicant]
US 20170336636A1 · Amitai et al. · 2017 [cited by applicant]
US 20170343822A1 · Border et al. · 2017 [cited by applicant]
US 20170357095A1 · Amitai · 2017 [cited by applicant]
US 20170357100A1 · Ouderkirk et al. · 2017 [cited by applicant]
US 20170363799A1 · Ofir · 2017 [cited by applicant]
US 20180039082A1 · Amitai · 2018 [cited by applicant]
US 20180067315A1 · Amitai et al. · 2018 [cited by applicant]
US 20180157057A1 · Gelberg et al. · 2018 [cited by applicant]
US 20180210202A1 · Danziger · 2018 [cited by applicant]
US 20180267295A1 · Dalrymple et al. · 2018 [cited by applicant]
US 20180292599A1 · Ofir et al. · 2018 [cited by applicant]
US 20180335629A1 · Cheng et al. · 2018 [cited by applicant]
US 20190170327A1 · Eisenfeld et al. · 2019 [cited by applicant]
US 20190187482A1 · Lanman · 2019 [cited by applicant]
US 20190212487A1 · Danziger et al. · 2019 [cited by applicant]
US 20190227215A1 · Danziger et al. · 2019 [cited by applicant]
US 20190293856A1 · Danziger · 2019 [cited by applicant]
US 20190377187A1 · Sharlin et al. · 2019 [cited by applicant]
US 20190378044A1 · Jeffery et al. · 2019 [cited by applicant]
US 20190391408A1 · Mansharof · 2019 [cited by applicant]
US 20200026072A1 · Brown et al. · 2020 [cited by applicant]
US 20200089001A1 · Amitai et al. · 2020 [cited by applicant]
US 20200183170A1 · Amitai et al. · 2020 [cited by applicant]
US 20200192101A1 · Ayres et al. · 2020 [cited by applicant]
US 20200225484A1 · Takagi et al. · 2020 [cited by applicant]
US 20200278557A1 · Greenstein et al. · 2020 [cited by applicant]
US 20200292819A1 · Danziger et al. · 2020 [cited by applicant]
US 20200360879A1 · Arnold et al. · 2020 [cited by applicant]
US 20200371311A1 · Lobachinsky et al. · 2020 [cited by applicant]
US 20200371354A1 · Ouderkirk et al. · 2020 [cited by applicant]
US 20210018755A1 · Amitai · 2021 [cited by applicant]
US 20210033872A1 · Rubin et al. · 2021 [cited by applicant]
US 20210072553A1 · Danziger et al. · 2021 [cited by applicant]
US 20210149199A1 · Guan et al. · 2021 [cited by applicant]
US 20220004014A1 · Ronen et al. · 2022 [cited by applicant]
US 20220030205A1 · Danziger · 2022 [cited by applicant]
US 20220113549A1 · Danziger et al. · 2022 [cited by applicant]
US 20220269098A1 · Danziger et al. · 2022 [cited by applicant]
US 20220342216A1 · Danziger et al. · 2022 [cited by applicant]
US 20230296899A1 · Ronen et al. · 2023 [cited by applicant]
JP 2011028141 · 2011 [cited by applicant]
Salter, P. S. and Booth, M. J. et al. “Designing and aligning optical systems incorporating Liquid crystal spatial light modulators (SLMs)”, Department of Engineering, University of Oxford, vr1.0, doi: 10.5281/zenodo.45… [cited by applicant]
R. J. Weiblen, C. R. Menyuk, L. E. Busse, L. B. Shaw, J. S. Sanghera, and I. D. Aggarwal, “Optimized moth-eye anti-reflective structures for As2S3 chalcogenide optical fibers,” Opt. Express 24, 10172-10187 (2016). [cited by applicant]
Qiao, DY., Wang, SJ. & Yuan, Wz. A continuous-membrane micro deformable mirror based on anodic bonding of SOI to glass wafer. Microsyst Technol 16, 1765-1769 (2010). https://doi.org/10.1007/s00542-010-1102-0. [cited by applicant]
J. Wei, S.M.L. Nai, C.K. Wong, L.C. Lee, “Glass-to-glass anodic bonding process and electrostatic force” Thin Solid Films, vols. 462-463, 2004, pp. 487-491, ISSN 0040-6090, https://doi.org/10.1016/j.tsf.2004.05.067. (ht… [cited by applicant]
Halifoux B.D. et al., “Compensating film stress in thin silicon substrates using ion implantation,” Opt. Express 27, 11182-11195 (Jan. 21, 2019) Chalifoux B.D et al. Jan. 21, 2019 (Jan. 21, 2019). [cited by applicant]
Jinying Li et al “Improvement of pointing accuracy for Risley prisms by parameter identification”, Sep. 2017Applied Optics 56(26):7358; DOI:10.1364/AO.56.007358. [cited by applicant]
Klaus Ehrmann et al “Optical power mapping using paraxial laser scanning”, Proceedings vol. 7163, Ophthalmic Technologies XIX; 71631E (2009) https://doi.org/10.1117/12.806765 Event: SPIE BiOS, 2009, San Jose, California… [cited by applicant]
Erhui Qi et al “The Application of Pentaprism Scanning Technology on the Manufacturing of M3MP”,Proc. of SPIE vol. 9682 96821A-1 Downloaded From: http://proceedings.spiedigitallibrary.org/ on Dec. 8, 2016 Terms of Use: … [cited by applicant]
Wei Chen et al“An Image Quality Evaluation Method of near-eye display” , First published: May 25, 2016 https://doi.org/10.1002/sdtp.10935. [cited by applicant]
Da-Yong et al., “A Continuous Membrance Micro Deformable Mirror Based on Anodic Bonding of SOI to Glass Water”, Microsystem Technologies, Micro and Nanosystems Information Storage and Processing Systems, vol. 16, No. 10… [cited by applicant]
Amotchkina T. et al; “Stress compensation with antireflection coatings for ultrafast laser applications: from theory to practice,” Opt. Express 22, 30387-30393 (2014) Amotchkina T. et al. Dec. 31, 2014 (Dec. 31, 2014). [cited by applicant]
Mori H. et al., “Reflective coatings for the future x-ray mirror substrates”, Proc. SPIE 10699, Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray, 1069941 (Jul. 6, 2018); available at URL <http://doi.o… [cited by applicant]
Chalifoux B.D. et al., “Compensating film stress in thin silicon substrates using ion implantation,” Opt. Express 27, 11182-11195 (Jan. 21, 2019) Chalifoux B.D. et al. Jan. 21, 2019 (Jan. 21, 2019). [cited by applicant]
Petros I. Stavroulakis, Stuart A. Boden, Thomas Johnson, and Darren M. Bagnall, “Suppression of backscattered diffraction from sub-wavelength ‘moth-eye’ arrays,” Opt. Express 21, 1-11 (2013). [cited by applicant]
Qiaoyin Yang et al. “Antireflection effects at nanostructured material interfaces and the suppression of thin-film interference” 2013 Nanotechnology, vol. 24, No. 23 May 15, 2013. [cited by applicant]
S. Chattopadhyay et al. “Anti-reflecting and photonic nanostructures,” Materials Science and Engineering: R: Reports, vol. 69, Issues 1-3, 2010, pp. 1-35, ISSN 0927-796X, https://doi.org/10.1016/j.mser.2010.04.001. [cited by applicant]