Granted Patent B2

US 12,326,472 · App. 17/813,298 · Granted Jun 10, 2025

Inventors: Scott E. Lindsey (Brentwood, CA); Jovan Jovanovic (Santa Clara, CA); David S. Hendrickson (San Jose, CA); Donald P. Richmond, II (Palo Alto, CA)

Assignee: AEHR TEST SYSTEMS

G01R31/2891G01R31/287G01R31/31908

Abstract

Claims (47)

1. A method of testing an integrated circuit of a device, comprising:

removably mounting a cartridge frame of a cartridge to an apparatus frame, a contactor support structure forming part of the cartridge;

connecting a surface of a connector interface to a surface of a contactor interface;

holding the device against a surface of a holder;

inflating an actuator bladder so that first and second opposing sides of the bladder move the contactor support structure relative to the apparatus frame and urge terminals on the contactor support structure against contacts on the device; and

providing signals through the connector interface, contactor interface, terminals and contacts to the integrated circuit.

2. The method of claim 1 , wherein the cartridge includes a common subassembly and a first unique contactor subassembly, further comprising:

replacing the first unique contactor subassembly with a second unique contactor subassembly.

3. The method of claim 2 , further comprising:

reducing a pressure in an area between the common subassembly and the second unique contactor subassembly.

4. The method of claim 1 , wherein a plurality of conductors is held by a connector body to form a connector, the connector interface being surfaces of the conductors.

5. An apparatus for testing an integrated circuit of a device, comprising:

an apparatus frame;

a holder for the device, secured to the apparatus frame;

a cartridge, including:

a cartridge frame that is removably mountable to the apparatus frame;

a contactor support structure held by the apparatus frame;

a contactor interface on the contactor support structure; and

a plurality of terminals held by the contactor support structure, the holder and contactor support structure being movable relative to one another so that each one of the terminals makes releasable contact with a respective contact of the device; and

a connector interface having a surface for connecting to a surface of the contactor interface;

an inflatable actuator bladder positioned between the apparatus frame and the contactor support structure, having first and second opposing sides that are movable relative to one another to move the contactor support structure relative to the apparatus frame and toward the surface of the holder so that the terminals are urged against contacts of the device;

a pressure and vacuum actuation passage is connected to an internal volume of the actuator bladder;

a power source;

a power electrical path connecting the power source to a power terminal of the terminals held by the support structure;

a signal source; and

a plurality of signal electrical paths, each connecting the signal source to a respective signal terminal of the terminals held by the support structure.

6. The apparatus of claim 5 , wherein the cartridge includes a common subassembly and a first unique contactor subassembly that is replaceable with a second unique contactor subassembly.

7. The apparatus of claim 6 , further comprising:

a pressure reduction passage in communication with an area between the common subassembly and the second unique contactor subassembly and having an outlet on an external side of the cartridge; and

a pump connected to the outlet of the pressure reduction passage so as to reduce a pressure in the area between the common subassembly and the second unique contactor subassembly.

8. The apparatus of claim 5 , further comprising a connector including:

a connector body; and

a plurality of connector conductors held by the connector body, the connector interface being surfaces of the connector conductors.

9. A cartridge, comprising:

a cartridge frame;

formations on the cartridge frame for mounting the cartridge frame in a fixed position to an apparatus frame;

a contactor support structure;

an inflatable actuator bladder positioned between the apparatus frame and the contactor support structure, having first and second opposing sides that are movable relative to one another to move the contactor support structure relative to the apparatus frame and toward the surface of the holder, so that the terminals are urged against contacts of the device;

a contactor interface on the contactor support structure;

a plurality of terminals, held by the contactor support structure, for contacting contacts on a device; and

a plurality of conductors, held by the contactor support structure, connecting the interface to the terminals.

10. The cartridge of claim 9 , wherein the cartridge includes a common subassembly and a first unique contactor subassembly that is replaceable with a second unique contactor subassembly.

11. The cartridge of claim 10 , further comprising:

a pressure reduction passage in communication with an area between the common subassembly and the second unique contactor subassembly and having an outlet on an external side of the cartridge.

12. The cartridge of claim 9 , further comprising a connector including:

a connector body; and

a plurality of connector conductors held by the connector body, the connector interface being surfaces of the connector conductors.

Assignments (1)

Continuity (6)

References Cited (362)