Single crystal semiconductor structure and method of fabricating the same
View Patent ↗A single crystal semiconductor structure includes: an amorphous substrate; a single crystal semiconductor layer provided on the amorphous substrate; and a thin orienting film provided between the amorphous substrate and the single crystal semiconductor layer, wherein the thin orienting film is a single crystal thin film, and the thin orienting film has a non-zero thickness that is equal to or less than 10 times a critical thickness h c .
1. A single crystal semiconductor structure comprising:
an amorphous substrate;
a single crystal film formed directly on the amorphous substrate;
a single crystal semiconductor layer formed directly on the single crystal film, the single crystal semiconductor layer comprising a lower single crystal layer and an upper single crystal layer, and
a mask pattern between the lower single crystal layer and the upper single crystal layer,
wherein a lattice constant of the single crystal film is different from a lattice constant of the single crystal semiconductor layer.
2. The single crystal semiconductor structure of claim 1 , wherein a thickness of the single crystal film is 50 nm or less.
3. The single crystal semiconductor structure of claim 1 , wherein the single crystal film has a (001) direction or a (111) direction.
4. The single crystal semiconductor structure of claim 1 , wherein the single crystal semiconductor layer comprises a Group III-V compound semiconductor layer.
5. The single crystal semiconductor structure of claim 4 , wherein the single crystal semiconductor layer comprises GaN layer having a (001) direction.
6. The single crystal semiconductor structure of claim 1 ,
wherein the lower single crystal layer comprises a nucleation layer for the upper single crystal layer.
7. The single crystal semiconductor structure of claim 6 , wherein a crystallinity of the upper single crystal layer is higher than a crystallinity of the lower single crystal layer.
8. The single crystal semiconductor structure of claim 6 , wherein the single crystal film has a lattice structure that matches a lattice structure of the lower single crystal layer.
9. The single crystal semiconductor structure of claim 1 , wherein the single crystal film comprises a CeO 2 film having the (111) direction or a Sc 2 O 3 film having the (111) direction.