Granted Patent B2

US 12,343,554 · App. 17/486,351 · Granted Jul 1, 2025

Inventors: Maysamreza Chamanzar (Pittsburgh, PA); Jay W. Reddy (Pittsburgh, PA)

Assignee: CARNEGIE MELLON UNIVERSITY

A61N5/0601A61N5/0622A61N5/067G02B6/0031G02B6/4214G03F7/0005A61N2005/063A61N2005/0643A61N2005/0666

Abstract

Claims (56)

1. A device comprising:

a flexible substrate composed of a first polymer having one or more trenches defined therein;

one or more optical waveguides disposed in the one or more trenches, the one or more optical waveguides composed of a second polymer;

one or more pairs of out-of-plane input and output coupling mechanisms integrally formed in the flexible substrate to redirect a direction of travel of light in an out-of-plane direction;

a light source integrated with the input coupling mechanism; and

one or more metal traces disposed along a portion of a length of the device and separated from the one or more optical waveguides by a layer of the first polymer;

wherein the first polymer has a lower refractive index than the second polymer; and

wherein a reflective surface of each micromirror is a formed of a reflective metal.

2. The device of claim 1 wherein the first polymer is PDMS and the second polymer is Parylene C.

3. The device of claim 1 wherein the input coupling mechanism is an input micromirror disposed at one end of each optical waveguide and wherein the output coupling mechanism is an output micromirror disposed at an opposite end of each optical waveguide.

4. The device of claim 3 wherein each micromirror is angled at a 45° angle with respect to a longitudinal axis of each waveguide, such as to direct light transmitted through the waveguide in a direction perpendicular to the longitudinal axis of each waveguide.

5. The device of claim 3 wherein a reflective surface of each micromirror is composed of Aluminum.

6. The device of claim 2 wherein each waveguide is coated with a conformal coating of Parylene C.

7. The device of claim 2 wherein each waveguide is surrounded by a layer of PDMS cladding.

8. The device of claim 1 wherein the device is a neural probe.

9. A method of fabricating a photonic platform comprising:

providing a substrate;

defining one or more trenches in the substrate;

depositing a sacrificial oxide layer covering the one or more trenches;

depositing a first layer of a first polymer on the oxide layer;

depositing a layer of a second polymer over the first polymer;

etching the layer of second polymer to define one or more optical waveguides in the one or more trenches;

depositing a layer of a reflective metal on an angled wall defined in the first layer of the first polymer at each end of each optical waveguide, forming input micromirrors at one end of each optical waveguides and output micromirrors at an opposite end of each optical waveguide;

depositing a second layer of the first polymer to cover the one or more waveguides;

bonding one or more vertical-cavity surface-emitting lasers to one or more of the input micromirrors using an anisotropic conductive film;

depositing one or more metal traces on the second layer of the first polymer; and

releasing the photonic platform from the substrate.

10. The method of claim 9 wherein the first polymer is PDMS and the second polymer is Parylene C.

11. The method of claim 9 wherein the substrate is silicon.

12. The method of claim 9 further comprising:

depositing a conformal layer of the second polymer onto the one or more waveguides prior to depositing the layer of the second polymer to cover the one or more waveguides.

13. The method of claim 9 wherein defining one or more trenches in the substrate comprises:

coating the substrate with a thermal oxide layer;

etching the thermal oxide layer to form an etching mask on the substrate;

etching the one or more trenches in the surface of the substrate; and

removing the etching mask.

14. The method of claim 9 wherein releasing the photonic platform comprises:

removing the substrate by etching; and

removing the sacrificial oxide layer by etching.

15. The method of claim 9 wherein depositing a layer of a reflective metal comprises:

depositing a thin layer of Parylene C on the first layer or the first polymer;

depositing a layer of photoresist and patterning the location of the micromirrors in the photoresist;

depositing a layer of Platinum;

depositing layer of Aluminum over the layer of Platinum; and

removing the photoresist.

16. The method of claim 9 wherein depositing a layer of a reflective metal comprises:

depositing an adhesion layer;

depositing a layer of Platinum on the adhesion layer; and

depositing layer of Aluminum over the layer of Platinum.

17. The method of claim 9 wherein depositing a layer of a reflective metal comprises:

functionalizing the surface of the angled wall;

depositing a layer of Platinum on the angled wall; and

depositing layer of Aluminum over the layer of Platinum.

18. The method of claim 9 further comprising:

bonding an optical fiber to an input port of one or more of the waveguides using an optical epoxy.

19. The device of claim 3 wherein the light source is a vertical-cavity surface-emitting laser bonded to one or more of the input micromirrors using an anisotropic conductive film.

Assignments (2)

Continuity (2)

References Cited (111)