Semiconductor test apparatus and semiconductor test method
A semiconductor test apparatus includes a chuck top on which a semiconductor wafer is mounted, and contact probes that contact measurement points of semiconductor chips formed on the semiconductor wafer, the chuck top includes a conductor that contacts a lower surface of the semiconductor wafer, a mounting table arranged below the conductor, and a first vacuum tube and a second vacuum tube connected to the mounting table, the conductor has a plurality of suction holes that are arranged in a spiral form in top view, in the mounting table, a flow pass communicating with the plurality of suction holes and having a spiral form in top view, the first vacuum tube is connected to an inner circumference portion of the flow pass, and the second vacuum tube is connected to an outer circumference portion of the flow pass.
1. A semiconductor test apparatus comprising:
a chuck top on which a semiconductor wafer is mounted; and
contact probes that contact measurement points of semiconductor chips formed on the semiconductor wafer, wherein
the chuck top includes a conductor that contacts a lower surface of the semiconductor wafer, a mounting table arranged below the conductor, and a vacuum tube connected to the mounting table,
the conductor has a plurality of suction holes arranged in a spiral form in top view,
in the mounting table, a flow pass communicating with the plurality of suction holes and having a spiral form in top view is formed,
the vacuum tube is connected to an inner circumference portion of the flow pass, and
cross-sectional shapes of the flow pass are larger on an outer circumferential side than on an inner circumferential side.
2. The semiconductor test apparatus according to claim 1 , wherein
sizes of the plurality of suction holes are larger on an outer circumferential side than on an inner circumferential side.
3. A semiconductor test method using the semiconductor test apparatus according to claim 1 , comprising the steps of:
(d) mounting the semiconductor wafer on the chuck top;
(e) sucking the semiconductor wafer by the vacuum tube; and
(f) bringing the contact probes into contact with the measurement portions of the semiconductor chips to measure electrical characteristics of the semiconductor chips.
4. A semiconductor test apparatus comprising:
a chuck top on which a semiconductor wafer is mounted; and
contact probes that contact measurement points of semiconductor chips formed on the semiconductor wafer, wherein
the chuck top includes a conductor that contacts a lower surface of the semiconductor wafer, a mounting table arranged below the conductor, and a vacuum tube connected to the mounting table,
the conductor has a plurality of suction holes,
in the mounting table, a cavity extends continuously across an upper surface of the mounting table and adjacent to the plurality of suction holes to communicate with the plurality of suction holes, and
the vacuum tube communicates with the plurality of suction holes through the cavity.
5. The semiconductor test apparatus according to claim 4 , wherein
the mounting table has a tapered shape in which a lower end portion is thinner than an upper end portion in cross-sectional view.
6. A semiconductor test method using the semiconductor test apparatus according to claim 4 , comprising the steps of:
(d) mounting the semiconductor wafer on the chuck top;
(e) sucking the semiconductor wafer by the vacuum tube; and
(f) bringing the contact probes into contact with the measurement portions of the semiconductor chips to measure electrical characteristics of the semiconductor chips.
7. The semiconductor test apparatus according to claim 4 , wherein
the conductor has a planar upper surface portion that includes the plurality of suction holes, the planar upper surface portion being configured to hold and directly contact the lower surface of the semiconductor wafer.