System and method for correcting non-ideal wafer topography
A scanner includes a light source configured to apply a light to a backside of a wafer. The light is reflected from the backside of the wafer. A first mirror is configured to receive the light from the backside of the wafer and reflect the light. A sensor is configured to receive the light from the first mirror and generate an output signal indicative of a backside topography of the wafer.
1. A scanner comprising:
a light source configured to apply a light to a surface of a wafer at a first incident angle;
a first mirror positioned to receive light reflected from a first portion of the surface of the wafer, wherein a change in the first incident angle corresponds to a movement of the first mirror, wherein the first mirror is configured to be adjusted in position to apply the reflected light to a second portion of the surface of the wafer; and
a sensor positioned to receive light reflected from the first mirror when the light source is applied to the first portion of the surface of the wafer.
2. The scanner of claim 1 , wherein the light source is moveable on a first horizontal axis.
3. The scanner of claim 2 , wherein the first mirror reflects the light at a second incident angle with respect to the first horizontal axis.
4. The scanner of claim 1 , comprising a second mirror positioned to receive the light reflected from the first mirror and reflect the light to the sensor when the light is applied to the surface of the wafer.
5. The scanner of claim 4 , wherein the second mirror is horizontally aligned with the first mirror.
6. The scanner of claim 4 , wherein the second mirror is fixed.
7. The scanner of claim 1 , comprising a processor configured to receive an output signal from the sensor and generate a corrected overlay map.
8. The scanner of claim 7 , wherein the corrected overlay map is configured to correct for at least one non-linear overlay error.
9. The scanner of claim 7 , wherein the corrected overlay map is generated by combining an uncorrected overlay map and a topographical map, wherein the topographical map is generated from the output signal of the sensor.
10. The scanner of claim 1 , wherein the light is reflected from the surface of the wafer at a first angle and reflected from the first mirror at a second angle.
11. A method, comprising:
applying a light from a light source to a first portion of a surface of a wafer at a first incident angle;
reflecting the light applied at the first incident angle from the surface of the wafer to a sensor;
generating, by the sensor, a signal indicative of a surface topography of the wafer;
generating a corrected overlay map based on the signal indicative of the surface topography of the wafer;
adjusting at least one of a position of the light source or a first mirror;
applying the light to a second portion of the surface of the wafer; and
reflecting the light from the second portion of the surface of the wafer to the sensor.
12. The method of claim 11 , wherein the light is reflected from the surface of the wafer at a first angle and reflected from the first mirror at a second angle.
13. The method of claim 11 , comprising manufacturing one or more circuits on the wafer using the corrected overlay map.
14. The method of claim 11 , comprising:
reflecting the light from the first mirror to a second mirror; and
reflecting the light from the second mirror to the sensor.
15. The method of claim 14 , wherein the second mirror is horizontally aligned with the first mirror.
16. A system, comprising:
a scanner comprising:
a light source configured to apply a light to a surface of a semiconductor wafer at a first incident angle;
a first mirror positioned to receive light reflected from a first portion of the surface of the semiconductor wafer when the light source is applied to the semiconductor wafer and reflect the light, wherein a change in the first incident angle corresponds to a movement of the first mirror, wherein the first mirror is configured to be adjusted in position to apply the reflected light to a second portion of the surface of the semiconductor wafer; and
a sensor configured to receive the light reflected from the first mirror when the light source is applied to the semiconductor wafer and generate an output signal indicative of a topography of the semiconductor wafer;
a wafer table configured to support the semiconductor wafer thereon; and
a processor configured to receive the output signal from the sensor and generate a corrected overlay map based on at least the output signal.
17. The system of claim 16 , wherein the light source is moveable on a first horizontal axis.
18. The system of claim 16 , wherein the wafer table is configured to support the semiconductor wafer with a backside of the semiconductor wafer oriented toward the scanner.
19. The system of claim 18 , comprising a second mirror configured to receive the light from the first mirror and reflect the light to the sensor, wherein the second mirror is horizontally aligned with the first mirror.
20. The system of claim 16 , wherein the corrected overlay map is generated by combining an uncorrected overlay map and a topographical map, wherein the topographical map is generated from the output signal of the sensor.