Granted Patent B2

US 12,393,095 · App. 18/505,860 · Granted Aug 19, 2025

Inventors: Janneke Ravensbergen (Würzburg, DE); Patrick Sebastian Uebel (Marloffstein, DE); Willem Richard Pongers (Veldhoven, NL)

Assignee: ASML NETHERLANDS B.V.

G02F1/3528G02B6/02328G02F1/365G03F9/7034G06F30/392G06F30/398H01S3/06741G06F2119/18

Abstract

Claims (26)

1. A broadband radiation source device comprising a hollow-core photonic crystal fiber (HC-PCF) to generate broadband output radiation upon receipt of pump radiation therein, the HC-PCF comprising at least one structurally varied portion, wherein the at least one structurally varied portion is configured to have radiation pass therethrough and has at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF so as to narrow or widen a hollow core region through which radiation passes.

2. The device as claimed in claim 1 , wherein the at least one structurally varied portion comprises a first structurally varied portion and a second structurally varied portion, wherein a portion of the HC-PCF comprising the first structurally varied portion is configured and located to control a first nonlinear optical process responsible for generation of the broadband output radiation and a portion of the HC-PCF comprising the second structurally varied portion is configured and located to control a second different nonlinear optical process responsible for generation of the broadband output radiation.

3. The device as claimed in claim 2 , wherein the first structurally varied portion is configured and located such that the second nonlinear optical process does not begin in the first structurally varied portion.

4. The device as claimed in claim 3 , wherein the first nonlinear optical process comprises modulation instability and the second nonlinear optical process comprises dispersive wave generation.

5. The device as claimed in claim 1 , wherein the at least structurally varied portion has a taper of the hollow core with a taper gradient selected from the range of 0.01 μm/cm and 10 μm/cm.

6. The device as claimed in claim 1 , wherein a beginning of the at least one structurally varied portion is located downstream of the position along the length of the HC-PCF where the pump radiation will have been spectrally expanded by a modulation instability dominated nonlinear optical process.

7. A metrology device comprising:

a detector; and

the device as claimed in claim 1 .

8. The metrology device as claimed in claim 7 , comprising a scatterometer metrology apparatus, a level sensor or an alignment sensor.

9. A broadband radiation source device comprising a hollow-core photonic crystal fiber (HC-PCF) to generate broadband output radiation upon receipt of pump radiation therein, the HC-PCF comprising at least one structurally varied portion, wherein the at least one structurally varied portion is configured to have radiation pass therethrough and has at least one structural parameter of the HC-PCF varied so as to narrow or widen a hollow core region through which radiation passes so that the hollow core has a taper with a taper gradient selected from the range of 0.01 μm/cm and 10 μm/cm.

10. The device as claimed in claim 9 , wherein the at least one structurally varied portion provides soliton trapping.

11. The device as claimed in claim 10 , further comprising at least one further structurally varied portion, wherein the at least one further structurally varied portion is configured to have radiation pass therethrough, wherein the at least one further structurally varied portion has at least one structural parameter of the HC-PCF varied so as to narrow or widen a hollow core region through which radiation passes, and wherein the at least one further structurally varied portion is configured and located to control a nonlinear optical process separate from soliton trapping.

12. The device as claimed in claim 9 , wherein the taper is configured to provide a temporal overlap between the solution and a dispersive wave with a delay time of less 50 fs.

13. A metrology device comprising:

a detector; and

the device as claimed in claim 9 .

14. The metrology device as claimed in claim 13 , comprising a scatterometer metrology apparatus, a level sensor or an alignment sensor.

15. A broadband radiation source device comprising a hollow-core photonic crystal fiber (HC-PCF) to generate broadband output radiation upon receipt of pump radiation therein, the HC-PCF comprising a first structurally varied portion, a second structurally varied portion and a third structurally varied portions, wherein each of the first, second and third structurally varied portions is configured to have radiation pass therethrough and each has at least one structural parameter of the HC-PCF varied so as to narrow or widen a hollow core region through which radiation passes.

16. The device as claimed in claim 15 , wherein a portion of the HC-PCF comprising the first structurally varied portion is configured and located to control a first nonlinear optical process responsible for generation of the broadband output radiation and a portion of the HC-PCF comprising the second and third structurally varied portions is configured and located to control a second different nonlinear optical process responsible for generation of the broadband output radiation.

17. The device as claimed in claim 16 , wherein the first structurally varied portion is configured and located such that the second nonlinear optical process does not begin in the first structurally varied portion.

18. The device as claimed in claim 17 , wherein the first nonlinear optical process comprises modulation instability and the second nonlinear optical process comprises dispersive wave generation.

19. The device as claimed in claim 15 , wherein the first structurally varied portion is configured to provide a soliton trapping process.

20. A metrology device comprising:

a detector; and

the device as claimed in claim 15 .

Assignments (2)

Priority Claims (2)

Continuity (2)

References Cited (83)