Method for fabricating semiconductor structure and semiconductor structure
Embodiments relate to the field of semiconductor manufacturing technology, and more particularly, to a method for fabricating a semiconductor structure and a semiconductor structure. The fabricating method includes: providing a substrate including an array region and a peripheral region; and forming, on the substrate, a first mask layer covering the array region and the peripheral region, the first mask layer having a first device structure pattern directly facing the array region and a second device structure pattern directly facing the peripheral region. Through the method for fabricating a semiconductor structure, the first mask layer having the first device structure pattern and the second device structure pattern is formed on the substrate, and then the substrate is etched by using the first device structure pattern and the second device structure pattern as mask layer to synchronously form a peripheral region structure and an array region structure on the substrate.
1. A method for fabricating a semiconductor structure, comprising:
providing a substrate comprising an array region and a peripheral region;
forming, on the substrate, a first mask layer covering the array region and the peripheral region, such that the first mask layer has a first device structure pattern over the peripheral region and a second device structure pattern over the array region; and
etching the substrate by using the first device structure pattern and the second device structure pattern as mask layer to form a peripheral region structure and an array region structure, respectively,
wherein the forming, on the substrate, a first mask layer covering the array region and the peripheral region, such that the first mask layer has a first device structure pattern directly facing the peripheral region and a second device structure pattern directly facing the array region comprises:
forming a first mask pattern on the first mask layer;
forming a first dielectric layer on the first mask layer and the first mask pattern;
forming a second mask layer on the first dielectric layer;
forming a second mask pattern on the array region; and forming the second device structure pattern on the first mask layer by using the second mask pattern as mask layer;
forming a third mask layer on the second device structure pattern; and
forming a third mask pattern on the peripheral region; and forming the first device structure pattern on the first mask layer by using the third mask pattern as mask layer.
2. The method for fabricating a semiconductor structure according to claim 1 , wherein the first mask layer comprises an eleventh mask layer and a twelfth mask layer, the eleventh mask layer being positioned on the twelfth mask layer;
etching the eleventh mask layer above the array region by using the second mask pattern as mask layer to form the second device structure pattern; and
etching the eleventh mask layer on the peripheral region by using the third mask pattern as mask layer to form the first device structure pattern.
3. The method for fabricating a semiconductor structure according to claim 2 , wherein the first mask layer further comprises a thirteenth mask layer positioned between the twelfth mask layer and the substrate; and
before etching the substrate by using the first device structure pattern and the second device structure pattern as mask layer, the twelfth mask layer and the thirteenth mask layer are etched in sequence by using the first device structure pattern and the second device structure pattern as mask layer.
4. The method for fabricating a semiconductor structure according to claim 1 , wherein the forming a second mask pattern on the array region comprises:
removing a part of the second mask layer on the array region and the first dielectric layer positioned on a sidewall of the first mask pattern on the array region to form the second mask pattern.
5. The method for fabricating a semiconductor structure according to claim 4 , wherein the second mask layer comprises a twenty-first mask layer and a twenty-second mask layer, the twenty-first mask layer covering a top surface and a sidewall of the first dielectric layer, and the twenty-second mask layer being positioned on the twenty-first mask layer.
6. The method for fabricating a semiconductor structure according to claim 5 , wherein the twenty-second mask layer on the array region, the twenty-first mask layer and the first dielectric on a top of the first mask pattern are removed; and
the first dielectric layer positioned on the sidewall of the first mask pattern on the array region is removed to form the second mask pattern.
7. The method for fabricating a semiconductor structure according to claim 1 , wherein the forming a third mask pattern on the peripheral region comprises:
removing the first mask pattern and a part of the first dielectric layer on the peripheral region, and retaining the first dielectric layer positioned on a sidewall of the first mask pattern to form the third mask pattern.
8. The method for fabricating a semiconductor structure according to claim 1 , wherein the forming a first dielectric layer on the first mask layer and the first mask pattern comprises:
covering, by the first mask pattern, a part of surface of the first mask layer; and
conformally covering, by the first dielectric layer, a top surface and a sidewall of the first mask pattern and an exposed surface of the first mask layer.
9. The method for fabricating a semiconductor structure according to claim 1 , wherein before etching the substrate by using the first device structure pattern and the second device structure pattern as mask layer, the method further comprises:
removing the third mask layer.
10. The method for fabricating a semiconductor structure according to claim 1 , wherein a pattern density of the first device structure pattern is smaller than a pattern density of the second device structure pattern.
11. The method for fabricating a semiconductor structure according to claim 1 , wherein a pattern density of the first mask pattern on the array region is the same as a pattern density of the first mask pattern on the peripheral region.
12. The method for fabricating a semiconductor structure according to claim 11 , wherein the first mask pattern comprises an elongated pattern.
13. The method for fabricating a semiconductor structure according to claim 1 , wherein after etching the substrate by using the first device structure pattern and the second device structure pattern as mask layer, the method further comprises:
forming a first storage structure and a second storage structure on the array region structure.
14. A semiconductor structure being formed by means of a method, wherein the method comprises:
providing a substrate comprising an array region and a peripheral region;
forming, on the substrate, a first mask layer covering the array region and the peripheral region, such that the first mask layer has a first device structure pattern over the peripheral region and a second device structure pattern over the array region; and
etching the substrate by using the first device structure pattern and the second device structure pattern as mask layer to form a peripheral region structure and an array region structure, respectively, wherein the forming, on the substrate, a first mask layer covering the array region and the peripheral region, such that the first mask layer has a first device structure pattern directly facing the peripheral region and a second device structure pattern directly facing the array region comprises:
forming a first mask pattern on the first mask layer;
forming a first dielectric layer on the first mask layer and the first mask pattern;
forming a second mask layer on the first dielectric layer;
forming a second mask pattern on the array region; and forming the second device structure pattern on the first mask layer by using the second mask pattern as mask layer;
forming a third mask layer on the second device structure pattern; and
forming a third mask pattern on the peripheral region; and forming the first device structure pattern on the first mask layer by using the third mask pattern as mask layer.