Granted Patent B2

US 12,406,830 · App. 17/547,303 · Granted Sep 2, 2025

Inventors: Sun Ryum Lee (Chungcheongnam-do, KR); Loung Sue Chang (Chungcheongnam-do, KR); Jung Yoon Yang (Chungcheongnam-do, KR); In Seong Lim (Gyeonggi-do, KR); Seung Hoon Jeon (Gyeonggi-do, KR)

Assignee: SEMES CO., LTD.

H01J37/3222H01J37/3244

Abstract

Claims (37)

1. An apparatus for treating a substrate comprising: a process chamber configured to have a processing space therein; a support configured to support the substrate in the process chamber; a gas supply configured to supply processing gas to the processing space; and a microwave application unit configured to generate plasma from the processing gas supplied to the processing space, wherein the microwave application unit includes: a transmissive plate configured to transmit a microwave to the processing space; an antenna plate disposed on the support unit transmissive plate and having a plurality of slots; a power supply configured to apply the microwave to the antenna plate; a dielectric plate disposed above the antenna plate to face the antenna plate; and an upper plate disposed above the dielectric plate, wherein an adjustment groove is formed on a lower surface of the upper plate and configured to adjust an electric field, wherein the adjustment groove is configured to affect the size and width of the electric field by adjusting a depth and width of the adjustment groove.

2. The apparatus for treating the substrate of claim 1 , wherein the adjustment groove is provided in a region facing the plurality of slots formed in the antenna plate.

3. The apparatus for treating the substrate of claim 1 , wherein the adjustment groove is provided in a ring shape surrounding a center of the antenna plate when viewed from the top.

4. The apparatus for treating the substrate of claim 1 , wherein the adjustment groove is provided in a region facing an edge region of the antenna plate.

5. The apparatus for treating the substrate of claim 1 , wherein the plurality of slots are arranged to form one ring or a plurality of rings surrounding the center of the antenna plate, and

wherein the adjustment groove is provided in regions overlapping with the plurality of slots when viewed from the top, respectively.

6. The apparatus for treating the substrate of claim 1 , wherein the plurality of slots are arranged to form one ring or a plurality of rings to surround the center of the antenna plate, and

wherein the adjustment groove is provided so that depths thereof are different from each other according to a distance from the center of the antenna plate.

7. The apparatus for treating the substrate of claim 6 , wherein the adjustment grooves are provided so that the depths thereof are increased as being far away from the center of the antenna plate.

8. The apparatus for treating the substrate of claim 1 , wherein the upper plate includes

a base plate having a through hole; and

an adjustment plate disposed in the through hole and provided to be movable in a vertical direction to the base plate,

wherein a lower region of the adjustment plate among the through hole is provided as the adjustment groove, and

wherein the depth of the adjustment groove is provided to be changeable along the movement in the vertical direction of the adjustment plate.

9. The apparatus for treating the substrate of claim 8 , wherein the upper plate further includes a driver configured to drive the adjustment plate in a vertical direction.

10. The apparatus for treating the substrate of claim 8 , wherein the adjustment plate is screwed with the base plate.

11. The apparatus for treating the substrate of claim 1 , wherein the upper plate and the dielectric plate are disposed in contact with each other.

12. An apparatus for treating a substrate comprising:

a process chamber configured to have a processing space therein;

a support configured to support the substrate in the process chamber;

an antenna plate disposed above the support unit and having a plurality of slots penetrated in a vertical direction;

a power supply configured to apply a microwave to the antenna plate;

a dielectric plate disposed above the antenna plate to face the antenna plate;

an upper plate disposed above the dielectric plate and including a cooling flow channel to cool the dielectric plate;

a transmissive plate provided below the antenna plate and configured to transmit the microwave to the processing space; and

a gas supply configured to supply processing gas to the processing space,

wherein a ring-shaped adjustment groove is formed on a lower surface of the upper and configured to adjust an electric field.

13. The apparatus for treating the substrate of claim 12 , wherein the antenna plate includes a first region and a second region which are provided with the plurality of slots, respectively, and have ring shapes which are concentric with the center of the antenna plate,

wherein the first region is a region which is farther away from the center of the antenna plate than the second region, and

wherein the ring-shaped adjustment groove includes a first groove provided in a region facing the first region.

14. The apparatus for treating the substrate of claim 13 , wherein the ring-shaped adjustment groove further includes a second groove provided in a region facing the second region.

15. The apparatus for treating the substrate of claim 14 , wherein a depth of the first groove is provided larger than a depth of the second groove.

16. The apparatus for treating the substrate of claim 12 , wherein the adjustment groove is provided in a region facing the plurality of slots.

17. The apparatus for the substrate of claim 12 , wherein the upper plate includes

a base plate provided with a through hole; and

an adjustment plate disposed in the through hole and provided to be movable in a vertical direction to the base plate,

wherein the depth of the adjustment groove is provided to be changeable along the movement in the vertical direction of the adjustment plate.

Assignments (1)

Priority Claims (1)

Continuity (1)

References Cited (17)