IP Library › Granted Patent US 12,423,498
Granted Patent B2
US 12,423,498 · App. 18/361,815 · Granted Sep 23, 2025

Semiconductor device

Inventors: Yu-Jen Chen (Hsinchu, TW); Ling-Sung Wang (Hsinchu, TW); I-Shan Huang (Hsinchu, TW); Chan-yu Hung (Hsinchu, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
G06F30/392G03F1/36G03F1/70G06F30/39G06F30/398H01L21/28123H10D64/519H10D84/834H10D84/85H10D89/10G03F1/30G03F1/32G03F7/2002G03F7/2037G06F2111/20G06F2119/18H01L21/0274H10B10/12H10D84/0135H10D84/0158H10D84/0172H10D84/0193H10D84/038H10D84/853
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Quick Facts
Patent No.
US 12,423,498
App. No.
18/361,815
Granted
Sep 23, 2025
Kind
B2
Abstract

A semiconductor structure includes first and second active regions extending in a first direction. The semiconductor structure further includes gate electrodes extending in a second direction perpendicular to the first direction. Each of the gate electrodes includes a first segment over at least one of the first active region or the second active region; a gate extension extending beyond each of the first active region and the second active region, wherein the gate extension has a uniform width in the first direction, and a conductive element, wherein a width of the conductive element in the first direction increases as a distance from the gate extension increases along an entirety of the conductive element in the second direction.

Claims (36)

1. A semiconductor structure comprising:

first and second active regions extending in a first direction;

gate electrodes extending in a second direction perpendicular to the first direction, wherein each of the gate electrodes comprises:

a first segment over at least one of the first active region or the second active region;

a gate extension extending beyond each of the first active region and the second active region, wherein the gate extension has a uniform width in the first direction, and

a conductive element, wherein a width of the conductive element in the first direction increases as a distance from the gate extension increases along an entirety of the conductive element in the second direction.

2. The semiconductor structure of claim 1 , wherein a first gate electrode of the gate electrodes extends beyond the first active region on a first side and on a second side, wherein the second side is opposite the first side.

3. The semiconductor structure of claim 1 , wherein a length of the gate extension in the second direction is less than or equal to 50 nanometers (nm).

4. The semiconductor structure of claim 1 , wherein a maximum width of the conductive element ranges from about 100 nm to about 150 nm.

5. The semiconductor structure of claim 1 , wherein a width of the first segment is equal to a width of the gate extension.

6. The semiconductor structure of claim 1 , wherein a first segment over the first active region is aligned with a first segment over the second active region in the first direction.

7. The semiconductor structure of claim 1 , wherein a length of the gate extension in the second direction is less than or equal to a width of the gate extension in the first direction.

8. The semiconductor structure of claim 1 , wherein a width of the first segment is less than or equal to 50 nm.

9. A semiconductor structure comprising:

an active region extending in a first direction;

a gate electrode extending in a second direction perpendicular to the first direction, wherein the gate electrode comprises:

a first segment over the active region;

a gate extension extending beyond the active region, wherein the gate extension has a uniform width in the first direction, and

a conductive element, wherein a width of the conductive element in the first direction increases as a distance from the gate extension increases along an entirety of the conductive element in the second direction.

10. The semiconductor structure of claim 9 , wherein the gate electrode further comprises a rear extension extending beyond the active region on an opposite side from the gate extension.

11. The semiconductor structure of claim 10 , wherein a width of the rear extension is uniform along an entire length of the rear extension.

12. The semiconductor structure of claim 9 , further comprising a second active region spaced from the first active region in the second direction.

13. The semiconductor structure of claim 12 , wherein the gate extension extends toward the second active region.

14. The semiconductor structure of claim 9 , wherein the conductive element comprises a curved surface.

15. A semiconductor structure comprising:

an active region extending in a first direction;

a gate electrode extending in a second direction perpendicular to the first direction, wherein the gate electrode comprises:

a first segment over the active region;

a first gate extension extending beyond a first edge of the active region, wherein the first gate extension has a uniform width in the first direction,

a second gate extension extending beyond a second edge of the active region, wherein the first edge is opposite the second edge, and the second gate extension has a uniform width in the first direction, and

a conductive element, wherein a width of the conductive element in the first direction increases as a distance from the first gate extension increases along an entirety of the conductive element in the second direction.

16. The semiconductor structure of claim 15 , wherein the uniform width of the first gate extension is equal to the uniform width of the second gate extension.

17. The semiconductor structure of claim 15 , wherein the uniform width of the first gate extension is equal to a width of the first segment.

18. The semiconductor structure of claim 15 , wherein a length of the first gate extension is less than or equal to the uniform width of the first gate extension.

19. The semiconductor structure of claim 15 , wherein the conductive element comprises a curved surface.

20. The semiconductor structure of claim 15 , wherein the width of the conductive element increases in a constant manner as the distance from the first gate extension increases.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 31, 2023
From: CHEN, YU-JEN; WANG, LING-SUNG; HUANG, I-SHAN; HUNG, CHAN-YU
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 064435/0402 →
Continuity (5)
Division 17815668 · Jul 28, 2022
Continuation 16557054 · Aug 30, 2019
Division 15949804 · Apr 10, 2018
Provisional Application 62511481 · May 26, 2017
Related Publication 20230385508A1 · Nov 30, 2023
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