Read-only memory for chip security that is MOSFET process compatible
View Patent ↗A semiconductor device is provided. The semiconductor device includes a metal-oxide-semiconductor field-effect-transistor (MOSFET) device electrically attachable to a first data line and a read-only memory (ROM) element. The ROM element is electrically interposable between the MOSFET device and a second data line. The ROM element includes first and second sets of memory cells in high and low resistance states, respectively, to form a secure identifier (ID).
1. A semiconductor device, comprising:
a metal-oxide-semiconductor field-effect-transistor (MOSFET) device electrically attached to a first data line; and
a read-only memory (ROM) element electrically interposed between the MOSFET device and a second data line,
the ROM element comprising:
a first set of memory cells disposed in a high resistance state; and
a second set of the memory cells disposed in a low resistance state,
wherein the first set of the memory cells disposed in the high resistance state and the second set of the memory cells disposed in the low resistance state are arranged together forming a secure identifier (ID), and
wherein each memory cell comprises a vertical transistor structure comprising a pillar, a fin on the pillar, a doped silicon germanium (SiGe) layer on the fin, a metal contact and an intervening layer of germanium and boron (GeB) intervening between the doped SiGe layer and the metal contact.
2. The semiconductor device according to claim 1 , wherein the MOSFET device comprises a p-type MOSFET.
3. The semiconductor device according to claim 1 , wherein:
the intervening layer in each memory cell of the first set of memory cells in the high resistance state comprising undoped GeB, and
the intervening layer in each memory cell of the second set of the memory cells in the low resistant state comprising doped GeB.
4. The semiconductor device according to claim 3 , wherein the low resistance state is characterized in that a dopant is homogenously distributed in the intervening layer in each memory cell of the second set of the memory cells.
5. The semiconductor device according to claim 4 , wherein the first set and the second sets of the memory cells are arranged as bits of the secure ID in the ROM element that cannot be removed without irreparably damaging the MOSFET device.
6. A semiconductor device, comprising:
a word line;
a bit line;
a metal-oxide-semiconductor field-effect-transistor (MOSFET) device, which comprises a gate line electrically connected to the word line and a source line and which is electrically attached to the word line; and
a read-only memory (ROM) element electrically interposed between the source line of the MOSFET device and the bit line,
the ROM element comprising:
a first set of memory cells disposed in a high resistance state; and
a second set of the memory cells disposed in a low resistance state,
wherein the first set of the memory cells disposed in the high resistance state and the second set of the memory cells disposed in the low resistance state are arranged together forming a secure identifier (ID), and
wherein each memory cell comprises a vertical transistor structure comprising a pillar, a fin on the pillar, a doped silicon germanium (SiGe) layer on the fin, a metal contact and an intervening layer of germanium and boron (GeB) intervening between the doped SiGe layer and the metal contact.
7. The semiconductor device according to claim 6 , wherein the MOSFET device comprises a p-type MOSFET.
8. The semiconductor device according to claim 6 , wherein:
the intervening layer in each memory cell of the first set of memory cells in the high resistance state comprising undoped GeB, and
the intervening layer in each memory cell of the second set of the memory cells in the low resistant state comprising doped GeB.
9. The semiconductor device according to claim 8 , wherein the low resistance state is characterized in that a dopant is homogenously distributed in the intervening layer in each memory cell of the second set of the memory cells.
10. The semiconductor device according to claim 9 , wherein the first set and the second sets of the memory cells are arranged as bits of the secure ID in the ROM element that cannot be removed without irreparably damaging the MOSFET device.