Method for manufacturing a laminated body
Provided are a laminated body and a laminated body manufacturing method that can improve adhesiveness between a resin layer and a seed layer. The laminated body has a substrate, a first wiring layer, a resin layer, and a second wiring layer in this order, and the second wiring layer includes at least an adhesive layer and a seed layer in this order.
1. A laminated body manufacturing method comprising:
a first step of forming a titanium film on a resin layer;
after the first step, a second step of forming a titanium carbide layer, as a part of an adhesive layer, on the resin layer by applying energy to the titanium film;
after the second step, a third step of forming a titanium layer as another part of the adhesive layer on the titanium carbide layer; and
after the third step, a fourth step of forming a seed layer on the titanium layer,
wherein the titanium carbide layer is a layer formed with titanium from the titanium film and carbon from the resin layer, which are covalently bonded by applying the energy in a state where the titanium film is formed on the resin layer.
2. The laminated body manufacturing method according to claim 1 , wherein the second step applies the energy to the titanium film by ion irradiation in a state where the titanium film was formed on the resin layer and forms the titanium carbide layer from the titanium film.
3. The laminated body manufacturing method according to claim 1 , wherein the second step applies a high-frequency voltage to a substrate to generate plasma, the resin layer being formed on the substrate, draws ions by a self-bias voltage occurring on the substrate, applies the energy to the titanium film, and forms the titanium carbide layer from the titanium film.
4. The laminated body manufacturing method according to claim 1 , wherein the second step applies a negative bias voltage to a substrate, the resin layer being formed on the substrate, draws ions by the negative bias voltage, applies the energy to the titanium film, and forms the titanium carbide layer from the titanium film.
5. The laminated body manufacturing method according to claim 1 , comprising applying a negative bias voltage to a substrate on which the resin layer is formed and depositing the titanium film while applying energy by ion irradiation with the negative bias voltage.
6. The laminated body manufacturing method according to claim 1 , wherein the second step applies the energy to the titanium film to modify a surface of the resin layer and forms the titanium carbide layer on at least a portion of the titanium film, the portion being on a resin layer side.
7. The laminated body manufacturing method according to claim 1 , further comprising, before the first step, an etching step of etching a first wiring layer and the resin layer in which a via hole reaching the first wiring layer is formed.
8. The laminated body manufacturing method according to claim 7 , wherein the first step forms the titanium film on the first wiring layer and on the resin layer.
9. The laminated body manufacturing method according to claim 8 , wherein the third step forms the titanium layer on a surface of the first wiring layer and on a surface of the titanium carbide layer.