IP Library › Granted Patent US 12,449,166
Granted Patent B2
US 12,449,166 · App. 17/860,923 · Granted Oct 21, 2025

Integrated dilution refrigerators

Inventors: Corban I. Tillemann-Dick (Denver, CO); Kyle J. Thompson (Boulder, CO); Steven William Harris (Denver, CO); Jonathan Michael Byars (Golden, CO)
Assignee: Maybell Quantum Industries, Inc.
F25B9/12F25B9/10F25B9/145F25B25/005F25D19/006H05K7/208B33Y80/00F25B2500/13H05K7/20827
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Quick Facts
Patent No.
US 12,449,166
App. No.
17/860,923
Granted
Oct 21, 2025
Kind
B2
Abstract

A dilution refrigerator is provided. The dilution refrigerator includes a first thermal stage configured to be cooled to a first temperature, a second thermal stage configured to be cooled to a second temperature lower than the first temperature, and a vacuum chamber housing the first thermal stage and the second thermal stage. The dilution refrigerator also includes a first suspension system configured to suspend the first thermal stage from the vacuum chamber, and a second suspension system configured to suspend the second thermal stage from the vacuum chamber independently from the first thermal stage.

Claims (28)

1. A dilution refrigerator comprising:

a first thermal stage configured to be cooled to a first temperature;

a second thermal stage configured to be cooled to a second temperature lower than the first temperature;

a vacuum chamber housing the first thermal stage and the second thermal stage;

a first suspension system configured to suspend the first thermal stage from the vacuum chamber; and

a second suspension system configured to suspend the second thermal stage from the vacuum chamber, the second suspension system comprising one or more springs configured to movably couple the second thermal stage to the vacuum chamber, wherein:

the first and second suspension systems are configured to provide vibration isolation to the first and second thermal stages, respectively, and to mechanically decouple the first thermal stage from the second thermal stage; and

the one or more springs comprise:

a first spring configured to provide vibration isolation of the second thermal stage along a first axis; and

a second spring configured to provide vibration isolation of the second thermal stage in a plane perpendicular to the first axis.

2. The dilution refrigerator of claim 1 , wherein the first suspension system comprises rods configured to rigidly couple the first thermal stage to the vacuum chamber.

3. The dilution refrigerator of claim 2 , wherein the rods comprise carbon fiber or stainless steel.

4. The dilution refrigerator of claim 1 , wherein the one or more springs comprise a spring configured to provide constant tension under different loads.

5. The dilution refrigerator of claim 1 , wherein the first spring comprises a leaf spring.

6. The dilution refrigerator of claim 5 , wherein the leaf spring comprises stainless steel and/or spring steel.

7. The dilution refrigerator of claim 6 , wherein the second spring comprises a soft rod.

8. The dilution refrigerator of claim 7 , wherein the first spring is coupled to the second thermal stage by the soft rod.

9. The dilution refrigerator of claim 7 , wherein the soft rod comprises a polymer.

10. The dilution refrigerator of claim 9 , wherein the polymer comprises Delrin.

11. The dilution refrigerator of claim 5 , wherein the leaf spring comprises two spring leaves, and wherein a tension of the leaf spring is determined based on a length of the two spring leaves.

12. The dilution refrigerator of claim 11 , wherein the leaf spring comprises two spring leaves, and wherein a tension of the leaf spring is determined based on a pre-tensioning of the two spring leaves.

13. The dilution refrigerator of claim 1 , further comprising a third thermal stage configured to be cooled to a third temperature between the first temperature and the second temperature, wherein:

the first suspension system is further configured to suspend the third thermal stage from the first thermal stage.

14. The dilution refrigerator of claim 13 , further comprising:

a fourth thermal stage configured to be cooled to a fourth temperature lower than the second temperature; and

a third suspension system configured to suspend the fourth thermal stage from the second thermal stage.

15. The dilution refrigerator of claim 14 , wherein the third suspension system comprises rods configured to rigidly couple the fourth thermal stage to the second thermal stage.

16. The dilution refrigerator of claim 1 , wherein the first suspension system comprises rods configured to rigidly couple the first thermal stage to the vacuum chamber.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 22, 2024
From: TILLEMANN-DICK, CORBAN I.; THOMPSON, KYLE J.; HARRIS, STEVEN WILLIAM; BYARS, JONATHAN MICHAEL
To: MAYBELL QUANTUM INDUSTRIES, INC.
Reel/Frame 066532/0098 →
Continuity (3)
Provisional Application 63319248 · Mar 11, 2022
Provisional Application 63219795 · Jul 8, 2021
Related Publication 20230010758A1 · Jan 12, 2023
References Cited (88)
US 4296609A · Severijns et al. · 1981 [cited by applicant]
US 4672823A · Benoit · 1987 [cited by examiner]
US 4986077A · Saho et al. · 1991 [cited by applicant]
US 5172554A · Swift et al. · 1992 [cited by applicant]
US 5207674A · Hamilton · 1993 [cited by applicant]
US 6202439B1 · Mikheev · 2001 [cited by applicant]
US 6788386B2 · Cox · 2004 [cited by examiner]
US 12000640B2 · Tillemann-Dick et al. · 2024 [cited by applicant]
US 20030168209A1 · Walther · 2003 [cited by applicant]
US 20040223300A1 · Fink et al. · 2004 [cited by applicant]
US 20050223714A1 · Li et al. · 2005 [cited by applicant]
US 20050229620A1 · Kirichek · 2005 [cited by examiner]
US 20050268641A1 · Dekiya · 2005 [cited by applicant]
US 20070273074A1 · Mizuno · 2007 [cited by examiner]
US 20090206229A1 · Nesch · 2009 [cited by examiner]
US 20090275476A1 · Atrey · 2009 [cited by examiner]
US 20100083940A1 · Vrazel · 2010 [cited by applicant]
US 20110315354A1 · Johnson · 2011 [cited by applicant]
US 20130014518A1 · Aigouy · 2013 [cited by applicant]
US 20140202179A1 · Batey · 2014 [cited by applicant]
US 20150160702A1 · Franz · 2015 [cited by applicant]
US 20150196221A1 · Garside · 2015 [cited by applicant]
US 20160291652A1 · Rossi · 2016 [cited by applicant]
US 20170167475A1 · Mori · 2017 [cited by applicant]
US 20180045471A1 · Dietrich · 2018 [cited by applicant]
US 20180051937A1 · Thiers et al. · 2018 [cited by applicant]
US 20180216684A1 · Gruss · 2018 [cited by applicant]
US 20190226724A1 · Kotsubo et al. · 2019 [cited by applicant]
US 20190383525A1 · Matthews et al. · 2019 [cited by applicant]
US 20200262013A1 · Nishio · 2020 [cited by applicant]
US 20200370792A1 · Matthews · 2020 [cited by applicant]
US 20210076530A1 · Hart et al. · 2021 [cited by applicant]
US 20210402407A1 · Hoehne · 2021 [cited by examiner]
US 20220221108A1 · Corcoles-Gonzalez et al. · 2022 [cited by applicant]
US 20230008279A1 · Tillemann-Dick et al. · 2023 [cited by applicant]
US 20230009670A1 · Tillemann-Dick et al. · 2023 [cited by applicant]
US 20230010758A1 · Tillemann-Dick et al. · 2023 [cited by applicant]
US 20230010920A1 · Tillemann-Dick et al. · 2023 [cited by applicant]
US 20230012324A1 · Tillemann-Dick et al. · 2023 [cited by applicant]
US 20240295347A1 · Tillemann-Dick et al. · 2024 [cited by applicant]
US 20240295348A1 · Tillemann-Dick et al. · 2024 [cited by applicant]
CN 111089436A · 2020 [cited by applicant]
FR 2184536A1 · 1973 [cited by applicant]
GB 2282437A · 1995 [cited by examiner]
GB 2493553A · 2013 [cited by applicant]
JP 2006138851A · 2006 [cited by applicant]
JP 2007048973A · 2007 [cited by applicant]
JP 2012182176A · 2012 [cited by applicant]
WO WO2015004904A1 · 2015 [cited by applicant]
WO WO2022200761A1 · 2022 [cited by applicant]
International Search Report and Written Opinion mailed Nov. 23, 202, in connection with International Application No. PCT/US2022/036531. [cited by applicant]
Invitation to Pay Additional Fees mailed Sep. 16, 2022, in connection with Application No. PCT/US2022/036531. [cited by applicant]
Pobell, Matter and Methods at Low Temperatures. Springer Berlin. Feb. 15, 2007:468 pages. [cited by applicant]
Smith et al., Flexible Coaxial Ribbon Cable for High-Density Superconducting Microwave Device Arrays. arXiv. Jul. 13, 2020:6 pages. [cited by applicant]
U.S. Appl. No. 18/182,244, filed Mar. 10, 2023, Tillemann-Dick et al. [cited by applicant]
International Search Report and Written Opinion mailed Aug. 6, 2024, in connection with International Application No. PCT/US2024/018062. [cited by applicant]
Invitation to Pay Additional Fees mailed May 28, 2024, in connection with International Application No. PCT/US2024/018062. [cited by applicant]
International Preliminary Report on Patentability dated Dec. 14, 2023, in connection with International Application No. PCT/US2022/036531. [cited by applicant]
Korean Notice of Preliminary Rejection dated Nov. 26, 2024, in connection with Korean Application No. 10-2024-7004190, with English translation. [cited by applicant]
[No Author Listed], Cryogenics Manual. leidencryogenics.com 2009. 28 Pages. [cited by applicant]
[No Author Listed], Ideal Vacuum products. Modular Vacuum Chambers. [Retrieved online Sep. 2, 2025, www.idealvac.com] 3 Pages. [cited by applicant]
[No Author Listed], Project: Universal testing cryostat-Cryoworld. [Retrieved online Sep. 2, 2025, www.cryoworld.com] 3 Pages. [cited by applicant]
[No Author Listed], RC102 & RC110 Sample in Vacuum Continuous-Flow Cryogenic Workstation Cryostats. Product brochure. 2012. 8 Pages. [cited by applicant]
[No Author Listed], Thermal Vacuum Chamber (TVC). Cryogenic and High Vacuum Technologies. criotec.com.May 6, 2021. 8 Pages. [cited by applicant]
[No Author Listed], Vacuum Chamber Technical Notes. The Kurt J. Lesker Company. May 14, 2021. 3 Pages. [cited by applicant]
Adams et al., Cryogenic Accelerated Fatigue Tester for addictive manufactured polymer composite mechanical property measurement. IOP Conference Series: Materials Science and Engineering. CEC 2021. 9 Pages. [cited by applicant]
Baev et al., XMCD going ultra-cold: Experiments at 100 mK and 7 T. Journal of Physics: Conference Series. 2017. 2 Pages. [cited by applicant]
Batey et al., Special Dilution Refrigerator Systems for Milli-Kelvin Detector Experiments. Journal of Low Temperature Physics. 1993(93):3/4. 5 Pages. [cited by applicant]
Borisov et al., Deuteron frozen-spin-polarized target for Nd experiments at the VdG accelerator of Charles University. ScienceDirect. Nuclear Instruments and Methods in Physics Research A. May 24, 2008. 6 Pages. [cited by applicant]
Doriese et al., A practical superconducting-microcalorimeter X-ray spectrometer for beamline and laboratory science. Review orf Scientific Instruments. May 16, 2017. 24 Pages. [cited by applicant]
Gandla et al., Mobile refrigeration system for precool and warm up of superconducting magnets. IOP Conference Series: Materials Science and Engineering. 2017. 8 Pages. [cited by applicant]
Green, Cryogenic Refrigeration Requirements for Superconducting Insertion Devices in a Light Source. Lawrence Berkeley National Laboratory Report (SCMAG 823). 2003. 51 Pages. [cited by applicant]
Hunt, CRyogenic Accelerated Fatigue Testing (CRAFT) system. Washington State University HYPER Laboratory. Apr. 18, 2021. 12 Pages. [cited by applicant]
Janos et al., The Bern Cryogenic Detector System for dark matter search. Science Direct. Nuclear Instruments and Methods in Physics Research A. May 16, 2005. 9 Pages. [cited by applicant]
Junquera et al., Design of a New Horizontal Test Cryostat for Scrafacvities of Uppsala University. Proceedings of the 16th International Conference on RF Superconductivity. 2014. 4 Pages. [cited by applicant]
Kappler et al., Ultralow-temperature device dedicated to soft X-ray magnetic circular dichroism experiments. Journal of Synchrotron Radiation. Sep. 7, 2018. pp. 1727-35. [cited by applicant]
Kingsley et al., Review of recently supplied Oxford Instruments UHV/ULT cryostats. Journal of Physics: Conference Series. 2012. 7 Pages. [cited by applicant]
Magnard et al., Microwave Quantum Link between Superconducting Circuits Housed in Spatially Separated Cyrogenic Systems. arXiv:2008.01642v1. Aug. 4, 2020. 13 Pages. [cited by applicant]
Matheny, et al., Direct Thermodynamic Measurements of the Energetics of Information Processing. Technical Report. Aug. 10, 2017. 10 Pages. [cited by applicant]
Matsui et al., Development of a new ULT Scanning Tunneling Microscope at University of Tokyo. Journal of Low Temperature Physics. 2000:121(5/6). 6 Pages. [cited by applicant]
Nichols, IBM's Goldeneye: Behind the scenes at the world's largest dilution refrigerator. ZDNET. Feb. 2, 2021. 8 Pages. [cited by applicant]
Partanen et al., Quantum sensing with superconducting microwave circuits. Bulletin of the American Physical Society. APS March Meeting 2020. 1 Page. [cited by applicant]
Roukes, Final Report: Direct thermodynamic measurements of the energetics of information processing. California Institute of Technology. US Army Research Office. Aug. 8, 2017. 13 Pages. [cited by applicant]
Strickland et al., A 1 kA-class cryogen-free critical current characterization system for superconducting coated conductors. Review of Scientific Instruments. Nov. 25, 2014. 12 Pages. [cited by applicant]
Uhlig et al., Cryogen-free dilution refrigerators. Journal of Physics: Conference Series. 2012. 11 Pages. [cited by applicant]
Uhlig, Concepts for a low-vibration and cryogen-free tabletop dilution refrigerator. ScienceDirect. Aug. 23, 2017. 6 Pages. [cited by applicant]
Wikus, Dilution Refrigeration of Multi-Ton Cold Masses. Research Gate. 2007. Jan. 175 Pages. [cited by applicant]
Zbasnik et al., ALS Superbend Magnet System. IEEE Transactions on Applied Superconductivity. Mar. 2001. 1(11):2531-34. [cited by applicant]