Conductive structures with bottom-less barriers and liners
A blocking material is selectively deposited on a bottom surface of a back end of line (BEOL) conductive structure such that a barrier layer is selectively deposited on sidewalls of the BEOL conductive structure but not the bottom surface. The blocking material is etched such that copper from a conductive structure underneath is exposed, and a ruthenium layer is deposited on the barrier layer but less ruthenium is deposited on the exposed copper. Accordingly, the barrier layer prevents diffusion of metal ions from the BEOL conductive structure and is substantially absent from the bottom surface as compared to the sidewalls in order to reduce contact resistance. Additionally, the ruthenium layer reduces surface roughness within the BEOL conductive structure and is thinner at the bottom surface as compared to the sidewalls in order to reduce contact resistance.
1 . A method, comprising:
forming a recessed portion in a dielectric layer above a first conductive structure;
depositing, selectively, a blocking layer at a bottom surface of the recessed portion;
depositing at least one barrier layer over sidewalls of the recessed portion, wherein the bottom surface of the recessed portion is substantially free of the at least one barrier layer;
removing the blocking layer;
depositing, after removing the blocking layer, at least one liner layer over the at least one barrier layer and over the bottom surface of the recessed portion, wherein the at least one liner layer is thinner at the bottom surface of the recessed portion than at the sidewalls of the recessed portion; and
forming a second conductive structure over the at least one liner layer in the recessed portion, wherein the second conductive structure is electrically connected to the first conductive structure through the at least one liner layer.
2 . The method of claim 1 , wherein forming the recessed portion comprises:
forming the recessed portion using a dual damascene process, wherein the recessed portion includes a first portion and a second portion, the first portion being lower in the dielectric layer relative to the second portion.
3 . The method of claim 1 , wherein the at least one barrier layer is deposited on at least a portion of a top surface of the dielectric layer.
4 . The method of claim 3 , further comprising:
etching the at least one barrier layer from the top surface of the dielectric layer.
5 . The method of claim 1 , wherein the at least one liner layer is deposited on at least a portion of a top surface of the dielectric layer.
6 . The method of claim 5 , further comprising:
etching the at least one liner layer from the top surface of the dielectric layer.
7 . The method of claim 1 , wherein removing the blocking layer comprises:
etching the blocking layer using a hydrogen or ammonia plasma.
8 . The method of claim 1 , wherein forming the second conductive structure comprises:
flowing copper into the recessed portion; and
planarizing the copper using a chemical mechanical planarization (CMP).
9 . A method, comprising:
forming a recessed portion in a dielectric layer;
depositing a blocking layer at a bottom surface of the recessed portion;
depositing at least one barrier layer over sidewalls of the recessed portion;
removing the blocking layer;
depositing, after removing the blocking layer, at least one liner layer over the at least one barrier layer and over the bottom surface of the recessed portion; and
forming a conductive structure over the at least one liner layer.
10 . The method of claim 9 , further comprising:
planarizing the conductive structure.
11 . The method of claim 10 , wherein a portion of the at least one barrier layer, formed over the dielectric layer, is removed based on planarizing the conductive structure.
12 . The method of claim 10 , wherein a recessed portion is formed in the conductive structure based on planarizing the conductive structure.
13 . The method of claim 12 , further comprising:
forming a cap in the recessed portion of the conductive structure.
14 . The method of claim 13 , wherein the cap comprises cobalt.
15 . The method of claim 13 , wherein the cap is formed on a top surface of the conductive structure.
16 . A method, comprising:
forming a recessed portion in a dielectric layer;
depositing a blocking layer at a bottom surface of the recessed portion;
depositing at least one barrier layer over sidewalls of the recessed portion;
removing the blocking layer;
depositing, after removing the blocking layer, a first liner layer over the at least one barrier layer and over the bottom surface of the recessed portion,
wherein the first liner layer is thinner at the bottom surface of the recessed portion than at the at least one barrier layer;
depositing at least one second liner layer over the first liner layer; and
forming a conductive structure over the at least one second liner layer.
17 . The method of claim 16 , further comprising:
forming a recessed portion in the conductive structure.
18 . The method of claim 17 , further comprising:
forming a cap in the recessed portion of the conductive structure.
19 . The method of claim 18 , wherein the cap is formed on a top surface of the conductive structure.
20 . The method of claim 17 , wherein a portion of the at least one barrier layer, a portion of the first liner layer, and a portion of the at least one second liner layer formed over the dielectric layer are removed based on forming the recessed portion in the conductive structure.