Semiconductor device including bottom isolation structure for preventing current leakage
Provided is a semiconductor device which includes: a substrate; a channel structure on the substrate; a source/drain pattern connected to the channel structure; a gate structure on the channel structure; an inner spacer structure comprising an inner spacer between the source/drain pattern and the gate structure, and an inner spacer residue connected to the inner spacer structure; and an inner isolation structure between the inner spacer residue and a bottom surface of the source/drain pattern.
1 . A semiconductor device comprising:
a substrate;
a channel structure on the substrate;
a source/drain pattern connected to the channel structure;
a gate structure on the channel structure;
an inner spacer structure comprising an inner spacer between the source/drain pattern and the gate structure, and an inner spacer residue connected to the inner spacer structure; and
an inner isolation structure between the inner spacer residue and a bottom surface of the source/drain pattern,
wherein the inner spacer residue extends into the substrate, and
wherein the inner spacer and the inner spacer residue are connected without a connection surface therebetween.
2 . The semiconductor device of claim 1 , wherein the inner spacer and the inner spacer residue comprise a same material composition.
3 . The semiconductor device of claim 1 , wherein the inner spacer residue and the inner isolation structure have different material compositions.
4 . The semiconductor device of claim 1 , wherein the inner spacer residue comprises silicon nitride or a composite thereof, and the inner isolation structure comprises silicon oxide.
5 . The semiconductor device of claim 1 , wherein the inner isolation structure is enclosed by the inner spacer residue and the bottom surface of the source/drain pattern.
6 . The semiconductor device of claim 1 , wherein the channel structure comprises a plurality of channel layers extended in a 1 st direction and arranged in a 2 nd direction on the substrate, the 1 st direction intersecting the 2 nd direction,
wherein the inner spacer structure comprises a plurality of inner spacers arranged in the 2 nd direction,
wherein the inner spacer connected to the inner spacer residue is the lowermost inner spacer among the plurality of inner spacers, and
wherein the inner spacer is connected to the inner spacer residue without a connection surface therebetween.
7 . The semiconductor device of claim 1 , wherein a bottom portion of the inner spacer residue is formed on a bottom surface of a bottom recess in the substrate below the source/drain pattern, and
wherein the inner isolation structure is between the bottom portion of the inner spacer residue and the bottom surface of the source/drain pattern.
8 . The semiconductor device of claim 1 , wherein the inner spacer residue is formed along an inner surface of a bottom recess formed in the substrate below the source/drain pattern and extended to a side surface of the inner spacer.
9 . The semiconductor device of claim 1 , wherein the substrate and the source/drain pattern are isolated by the inner spacer residue and the inner isolation structure.
10 . A semiconductor device comprising:
a substrate;
a 1 st channel structure and a 2 nd channel structure at a side of the 1 st channel structure, on the substrate;
a source/drain pattern between the 1 st channel structure and the 2 nd channel structure;
a 1 st gate structure on the 1 st channel structure, and a 2 nd gate structure on the 2 nd channel structure;
a 1 st inner spacer between the source/drain pattern and the 1 st gate structure, and a 2 nd inner spacer between the source/drain pattern and the 2 nd gate structure; and
an inner spacer residue directly connecting the 1 st inner spacer and the 2 nd inner spacer in the substrate below the source/drain pattern.
11 . The semiconductor device of claim 10 , wherein the 1 st inner spacer, the inner spacer residue, and the 2 nd inner spacer are connected without a connection surface therebetween.
12 . The semiconductor device of claim 10 , wherein the 1 st inner spacer, the inner spacer residue, and the 2 nd inner spacer isolate the source/drain pattern from the substrate.
13 . A semiconductor device comprising:
a substrate;
a 1 st channel structure and a 2 nd channel structure at a side of the 1 st channel structure, on the substrate;
a source/drain pattern between the 1 st channel structure and the 2 nd channel structure;
a 1 4 gate structure on the 1 st channel structure, and a 2 nd gate structure on the 2 nd channel structure;
a 1 st inner spacer between the source/drain pattern and the 1 st gate structure, and a 2 nd inner spacer between the source/drain pattern and the 2 nd gate structure;
an inner spacer residue connecting the 1 st inner spacer and the 2 nd inner spacer; and
an inner isolation structure between a bottom surface of the source/drain pattern and a combination of the 1 st inner spacer, the inner spacer residue and the 2 nd inner spacer, in the substrate,
wherein the 1 st inner spacer is connected to the 2 nd inner spacer through the inner spacer residue in the substrate below the source/drain pattern.
14 . The semiconductor device of claim 13 , wherein the inner isolation structure and the inner spacer residue have different material compositions.
15 . The semiconductor device of claim 10 , wherein the inner spacer residue is formed along an inner surface of a bottom recess formed in the substrate below the source/drain pattern and extended to a side surface of each of the 1 st inner spacer and the 2 nd inner spacer.