Semiconductor memory device and manufacturing method thereof
A semiconductor memory device includes a first region where a plurality of conductive layers, a plurality of insulating layers, a semiconductor layer, and a gate insulating layer are formed and a second region different from the first region above a substrate. The plurality of conductive layers include a plurality of first conductive layers and a plurality of second conductive layers. The semiconductor memory device includes a plurality of first films different from the first conductive layers disposed in same layers as the plurality of first conductive layers in the second region and a plurality of second films different from the second conductive layers and the first films disposed in same layers as the plurality of second conductive layers in the second region.
1 . A semiconductor memory device comprising:
a substrate;
a plurality of conductive layers that are disposed in a first direction intersecting with a surface of the substrate and extend in a second direction intersecting with the first direction;
a plurality of insulating layers each disposed between corresponding adjacent two conductive layers of the plurality of conductive layers;
a semiconductor layer that extends in the first direction and is opposed to the plurality of conductive layers and the plurality of insulating layers; and
a gate insulating layer disposed between the plurality of conductive layers and the semiconductor layer,
a first region being provided above the substrate, where the plurality of conductive layers, the plurality of insulating layers, the semiconductor layer, and the gate insulating layer are formed,
a second region different from the first region being provided above the substrate, and
a third region between the first region and the second region being provided above the substrate, wherein
the plurality of conductive layers include a plurality of first conductive layers and a plurality of second conductive layers,
at least one first conductive layer of the plurality of first conductive layers functions as a gate of a first memory cell at a portion opposed to the semiconductor layer and at least one second conductive layer of the plurality of second conductive layers functions as a gate of a second memory cell at a portion opposed to the semiconductor layer,
a plurality of first films different from the first conductive layers are disposed in the second region in same layers as the plurality of first conductive layers in the first region,
a plurality of second films different from the second conductive layers are disposed in the second region in same layers as the plurality of second conductive layers in the first region,
the plurality of first conductive layers are disposed across the first region and the third region, and
the plurality of second films are disposed across the second region and the third region.
2 . The semiconductor memory device according to claim 1 , wherein
in the third region, each of an upper surface and a lower surface of one second film of the plurality of second films abuts an insulating layer adjacent to the respective upper surface or to the respective lower surface of the one second film.
3 . The semiconductor memory device according to claim 1 , wherein
above the substrate, the second region among the first region to the third region is disposed on an outer region side of a memory cell array including the first and second memory cells.
4 . The semiconductor memory device according to claim 1 , wherein
in the third region, a part of the plurality of second films is disposed above the plurality of first conductive layers, and another part of the plurality of second films is disposed below the plurality of first conductive layers.
5 . The semiconductor memory device according to claim 1 , wherein
the plurality of second films include silicon nitride.
6 . The semiconductor memory device according to claim 5 , wherein
the plurality of insulating layers include silicon oxide.
7 . The semiconductor memory device according to claim 3 , wherein
the plurality of insulating layers are disposed across the first region, the second region, and the third region.
8 . The semiconductor memory device according to claim 7 , wherein
the plurality of insulating layers, the plurality of first films, and the plurality of second films are terminated at an outer edge of the second region on the outer region side of the memory cell array.
9 . The semiconductor memory device according to claim 1 , wherein
an etching rate of the plurality of first films with respect to phosphoric acid is different from an etching rate of the plurality of second films with respect to phosphoric acid.
10 . A semiconductor memory device comprising:
a substrate;
a plurality of conductive layers that are disposed in a first direction intersecting with a surface of the substrate and extend in a second direction intersecting with the first direction;
a plurality of insulating layers each disposed between corresponding adjacent two conductive layers of the plurality of conductive layers;
a semiconductor layer that extends in the first direction and is opposed to the plurality of conductive layers and the plurality of insulating layers;
a gate insulating layer disposed between the plurality of conductive layers and the semiconductor layer; and
a plurality of insulating portions that extend in the first direction and in the second direction inside the plurality of conductive layers and are arranged in a third direction intersecting with both of the first direction and the second direction,
a first region being provided above the substrate and between two insulating portions adjacent in the third direction of the plurality of insulating portions, where the plurality of conductive layers, the plurality of insulating layers, the semiconductor layer, and the gate insulating layer are formed,
a second region different from the first region being provided above the substrate, and
a third region being provided above the substrate and between the first region and the second region in the third direction, wherein
the plurality of conductive layers include a plurality of first conductive layers and a plurality of second conductive layers,
in the first region, the plurality of first conductive layers and the plurality of second conductive layers have a width in the third direction corresponding to a distance between the two insulating portions,
a plurality of first films different from the first conductive layers are disposed in the second region in same layers as the plurality of first conductive layers in the first region,
a plurality of second films different from the second conductive layers are disposed in the second region in same layers as the plurality of second conductive layers in the first region,
the plurality of first conductive layers are disposed across the first region and the third region, and
the plurality of second films are disposed across the second region and the third region.
11 . The semiconductor memory device according to claim 10 , wherein
in the third region, each of an upper surface and a lower surface of one second film of the plurality of second films abuts an insulating layer adjacent to the respective upper surface or to the respective lower surface of the one second film.
12 . The semiconductor memory device according to claim 10 , wherein
a plurality of memory cells are comprised of the plurality of conductive layers, the semiconductor layer, and the gate insulating layer, and
above the substrate, the second region among the first region to the third region is disposed on an outer region side of a memory cell array including the plurality of memory cells.
13 . The semiconductor memory device according to claim 10 , wherein
in the third region, a part of the plurality of second films is disposed above the plurality of first conductive layers, and another part of the plurality of second films is disposed below the plurality of first conductive layers.
14 . The semiconductor memory device according to claim 10 , wherein
the plurality of second films include silicon nitride.
15 . The semiconductor memory device according to claim 14 , wherein
the plurality of insulating layers include silicon oxide.
16 . The semiconductor memory device according to claim 12 , wherein
the plurality of insulating layers are disposed across the first region, the second region, and the third region.
17 . The semiconductor memory device according to claim 16 , wherein
the plurality of insulating layers, the plurality of first films, and the plurality of second films are terminated at an outer edge of the second region on the outer region side of the memory cell array.
18 . The semiconductor memory device according to claim 10 , wherein
an etching rate of the plurality of first films with respect to phosphoric acid is different from an etching rate of the plurality of second films with respect to phosphoric acid.