Image sensor and method for manufacturing the same
The present disclosure relates to an image sensor and/or a method for manufacturing the same. The image sensor may include a substrate including a first surface, a second surface opposite the first surface, and a plurality of unit pixel regions in the substrate; a pixel defining pattern; and a micro lens. Each of the plurality of unit pixel regions may include a photoelectric conversion layer. The pixel defining pattern may extend through the substrate in a first direction so as to define each of the unit pixel regions. The micro lens may be on the second surface of the substrate and corresponding to the unit pixel regions. The pixel defining pattern may include a first conductive layer and a second conductive layer spaced apart from the first conductive layer.
1 . An image sensor comprising:
a substrate including a first surface and a second surface opposite each other, the substrate including a plurality of unit pixel regions in the substrate, each of the plurality of unit pixel regions including a photoelectric conversion layer;
a pixel defining pattern extending through the substrate in a first direction, the pixel defining pattern defining each of the plurality of unit pixel regions;
a first pad pattern and a second pad pattern on the second surface of the substrate; and
a micro lens on the second surface of the substrate and corresponding to the plurality of unit pixel regions,
wherein the pixel defining pattern includes a first conductive layer and a second conductive layer spaced apart from the first conductive layer,
wherein the first conductive layer is spaced apart from the first surface, and wherein
the first pad pattern is electrically connected to the first conductive layer,
the second pad pattern is electrically connected to the second conductive layer,
the image sensor includes circuitry,
the circuitry of the image sensor is configured to apply a first voltage to the first conductive layer through the first pad pattern,
the circuitry of the image sensor is configured to apply a second voltage to the second conductive layer through the second pad pattern, and
the first voltage is different from the second voltage.
2 . The image sensor of claim 1 , wherein
the plurality of unit pixel regions include a first pixel region and a second pixel region,
the first pixel region does not include a ground area,
the second pixel region includes a ground area, and
the image sensor is configured to use a signal generated from the second pixel region as information for auto focusing.
3 . The image sensor of claim 2 , wherein
the second pixel region includes a first sub-pixel and a second sub-pixel adjacent to each other,
each of the first sub-pixel and the second sub-pixel include the ground area, and
the first sub-pixel and the second sub-pixel share the micro lens.
4 . The image sensor of claim 1 , wherein an upper surface of the second conductive layer is coplanar with the second surface of the substrate.
5 . The image sensor of claim 1 , wherein
a width in a second direction of the first conductive layer is smaller than a width in the second direction of the second conductive layer, and
the second direction intersects the first direction.
6 . The image sensor of claim 1 , wherein
the substrate includes a first trench and a second trench,
the pixel defining pattern includes a first defining pattern in the first trench and a second conductive layer in the second trench,
the first defining pattern includes a liner film and the first conductive layer on the liner film, and
the liner film is disposed along and on a sidewall of the first trench and a bottom surface of the first trench.
7 . The image sensor of claim 6 , wherein the second conductive layer is a single layer.
8 . The image sensor of claim 6 , wherein
the second conductive layer includes a first portion and a second portion,
the first portion of the second conductive layer is disposed along and on a sidewall of the second trench, and
the second portion of the second conductive layer is surrounded by the first portion of the second conductive layer.
9 . The image sensor of claim 6 , wherein
at a boundary between the first trench and the second trench, a width in a second direction of the first trench is greater than a width in the second direction of the second trench, and
the second direction intersects the first direction.
10 . An image sensor comprising:
a substrate including a first region, a second region, a first surface, and a second surface opposite the first surface, the substrate including a plurality of unit pixel regions in the substrate, each of the plurality of unit pixel regions including a photoelectric conversion layer;
a pixel defining pattern extending through the substrate in a first direction, the pixel defining pattern defining each of the plurality of unit pixel regions, the pixel defining pattern including a first defining pattern and a second conductive layer aligned with each other in the first direction such that the first defining pattern and the second conductive layer vertically overlap each other;
a micro lens on the second surface of the substrate in the first region of the substrate, the micro lens corresponding to the plurality of unit pixel regions;
a first pad pattern on the second surface of the substrate in the second region of the substrate, the first pad pattern being electrically connected to the first defining pattern; and
a second pad pattern on the second surface of the substrate in the second region of the substrate, the second pad pattern being electrically connected to the second conductive layer, wherein
the second conductive layer is in contact with the substrate,
the image sensor includes circuitry,
the circuitry of the image sensor is configured to apply a first voltage to the first defining pattern through the first pad pattern,
the circuitry of the image sensor is configured to apply a second voltage to the second conductive layer through the second pad pattern, and
the second voltage is different from the first voltage.
11 . The image sensor of claim 10 , wherein
the first defining pattern includes a first conductive layer connected to the first pad pattern,
the second conductive layer is electrically insulated from the first conductive layer and connected to the second pad pattern, and
an uppermost surface of the first conductive layer is spaced apart from a lowermost surface of the second conductive layer in the first direction.
12 . The image sensor of claim 10 , further comprising:
a contact on the first surface of the substrate, wherein
the image sensor includes circuitry,
the second region of the substrate includes a dummy unit pixel region,
the dummy unit pixel region includes a ground area and is free of the photoelectric conversion layer,
the contact is connected to the ground area,
the circuitry of the image sensor is configured to apply a well bias voltage to the ground area through the contact.
13 . The image sensor of claim 10 , wherein
a vertical level of a bottom surface of the first pad pattern based on the first surface of the substrate is lower than a vertical level of a bottom surface of the second pad pattern based on the first surface of the substrate.
14 . The image sensor of claim 10 , wherein
the plurality of unit pixel regions in the first region include a first pixel region and a second pixel region,
the first pixel region does not include a ground area,
the second pixel region includes the ground area, and
the image sensor is configured to use a signal generated from the second pixel region as information for auto focusing.
15 . An image sensor comprising:
a substrate including a first region, a second region, a first surface, a second surface opposite the first surface, a first trench, and a second trench,
the substrate including a plurality of unit pixel regions in the substrate, each of the plurality of unit pixel regions including a photoelectric conversion layer,
the second region of the substrate including a dummy unit pixel region in the substrate,
the dummy unit pixel region including a ground area and being free of the photoelectric conversion layer;
a pixel defining pattern extending through the substrate, the pixel defining pattern defining each of the plurality of unit pixel regions and the dummy unit pixel region,
the pixel defining pattern including a first defining pattern in the first trench and a second conductive layer in the second trench,
the first defining pattern includes a liner film and a first conductive layer on the liner film,
the liner film being disposed along and on a sidewall of the first trench and a bottom surface of the first trench;
a micro lens on the second surface of the substrate in the first region of the substrate, the micro lens corresponding to the plurality of unit pixel regions;
a first pad pattern on the second surface of the substrate in the second region of the substrate, the first pad pattern being electrically connected to the first conductive layer; and
a second pad pattern on the second surface of the substrate in the second region of the substrate, the second pad pattern being electrically connected to the second conductive layer, wherein
the image sensor includes circuitry,
the circuitry of the image sensor is configured to apply a first voltage to the first conductive layer through the first pad pattern,
the circuitry of the image sensor is configured to apply a second voltage to the second conductive layer through the second pad pattern, and
the circuitry of the image sensor is configured to apply the second voltage to the ground area of the dummy unit pixel region.
16 . The image sensor of claim 15 , wherein the first voltage is a negative voltage and the second voltage is a well bias voltage.
17 . The image sensor of claim 15 , wherein
the plurality of unit pixel regions in the first region include a first pixel region and a second pixel region,
the first pixel region is free of a ground area,
the second pixel region includes the ground area, and
the image sensor is configured to use a signal generated from the second pixel region as information for auto focusing.
18 . The image sensor of claim 17 , wherein
the second pixel region includes a first sub-pixel and a second sub-pixel adjacent to each other,
each of the first sub-pixel and the second sub-pixel include the ground area, and
the first sub-pixel and the second sub-pixel share the micro lens with each other.