Stopper bump structures for MEMS device
Various embodiments of the present disclosure are directed towards an integrated chip (IC) including a substrate. A plurality of adhesive structures is disposed on the substrate. A microelectromechanical systems (MEMS) structure is disposed on the adhesive structures. The MEMS structure comprises a movable element disposed within a cavity. A first plurality of stopper bumps is disposed between the movable element and the substrate.
1 . An integrated chip (IC), comprising:
a substrate comprising a plurality of sidewalls defining a plurality of recesses extending into a top surface of the substrate;
a plurality of adhesive structures disposed on the substrate;
a microelectromechanical systems (MEMS) structure disposed on the adhesive structures, wherein the MEMS structure comprises a movable element disposed within a cavity; and
a first plurality of stopper bumps disposed in the plurality of recesses and between the movable element and the substrate,
wherein the first plurality of stopper bumps contact the top surface of the substrate,
wherein the first plurality of stopper bumps directly contact a respective pair of sidewalls in the plurality of sidewalls at one or more interfaces,
wherein the one or more interfaces are regions where a first material of the substrate directly contacts a second material of the first plurality of stopper bumps.
2 . The IC of claim 1 , wherein the first plurality of stopper bumps directly underlies the movable element.
3 . The IC of claim 1 , wherein the first plurality of stopper bumps directly contacts the substrate and the MEMS structure, and wherein the adhesive structures respectively surround and contact a stopper bump in the first plurality of stopper bumps.
4 . The IC of claim 1 , further comprising:
a housing structure overlying the MEMS structure, wherein the housing structure is disposed on the substrate and laterally surrounds the MEMS structure; and
a second plurality of stopper bumps disposed between a lower surface of the housing structure and a top surface of the MEMS structure.
5 . The IC of claim 4 , wherein the second plurality of stopper bumps comprises the second material.
6 . The IC of claim 4 , wherein the second plurality of stopper bumps directly contacts the top surface of the MEMS structure.
7 . The IC of claim 4 , wherein the first plurality of stopper bumps and the second plurality of stopper bumps respectively comprise a polymer.
8 . The IC of claim 4 , further comprising:
an upper semiconductor die disposed on the MEMS structure, wherein the second plurality of stopper bumps is disposed between the upper semiconductor die and the top surface of the MEMS structure.
9 . An integrated chip (IC), comprising:
a substrate;
a housing structure overlying the substrate, wherein a cavity is defined between a top surface of the substrate and a lower surface of the housing structure;
a microelectromechanical systems (MEMS) structure overlying the substrate, wherein the MEMS structure comprises a movable element suspended in the cavity; and
a plurality of upper stopper bumps disposed between a top surface of the movable element and the lower surface of the housing structure, wherein the upper stopper bumps each comprise a first segment having a first height in the movable element and a second segment having a second height above the top surface of the movable element, wherein the first height is less than the second height, wherein a first vertical distance between a top surface of the plurality of upper stopper bumps and the lower surface of the housing structure is less than the second height.
10 . The IC of claim 9 , further comprising:
a plurality of metal pads disposed on the top surface of the substrate; and
a plurality of lower stopper bumps directly contacting the top surface of the substrate, wherein the lower stopper bumps directly underlie the movable element, wherein the lower stopper bumps comprise a same material as the upper stopper bumps.
11 . An integrated chip (IC), comprising:
a housing structure overlying a substrate;
a microelectromechanical systems (MEMS) structure disposed between the substrate and a lower surface of the housing structure;
a first plurality of stopper structures disposed between the substrate and a lower surface of the MEMS structure; and
a second plurality of stopper structures disposed between the lower surface of the housing structure and an upper surface of the MEMS structure, wherein first segments of the second plurality of stopper structures are embedded in the housing structure and are above the lower surface of the housing structure, wherein second segments of the second plurality of stopper structures underlie the first segments and contact the lower surface of the housing structure, wherein widths of the first segments are less than widths of the second segments.
12 . The IC of claim 11 , wherein the first plurality of stopper structures comprises stopper structures arranged in an array comprising at least two rows and at least two columns.
13 . The IC of claim 11 , further comprising:
a first contact pad arranged on the substrate;
a second contact pad arranged over the MEMS structure; and
a conductive wire extending from the first contact pad to the second contact pad.
14 . The IC of claim 11 , wherein a height of the first plurality of stopper structures is less than a height of the second plurality of stopper structures.
15 . The IC of claim 9 , wherein the movable element comprises an upper surface below the top surface of the movable element and a sidewall extending from the top surface of the movable element to the upper surface, wherein the first segment of an individual upper stopper bump in the plurality of upper stopper bumps continuously extends along and contacts the sidewall and the upper surface of the movable element.
16 . The IC of claim 8 , wherein the second plurality of stopper bumps is arranged on the movable element, wherein a vertical distance between a top surface of the second plurality of stopper bumps and a bottommost surface of the upper semiconductor die is less than a height of the second plurality of stopper bumps.
17 . The IC of claim 16 , wherein a width of each stopper bump in the first plurality of stopper bumps is equal to or greater than a width of a corresponding recess in the plurality of recesses.
18 . The IC of claim 16 , wherein a lateral surface of an individual stopper bump in the first plurality of stopper bumps contacting the top surface of the substrate is ring shaped.
19 . The IC of claim 16 , wherein the first material is different from the second material.
20 . The IC of claim 16 , wherein a vertical distance between a top surface of the first plurality of stopper bumps and a bottom surface of the movable element is less than a height of the first plurality of stopper bumps.