Package assembly including a package lid having a step region and method of making the same
A package assembly includes an interposer module on a package substrate, a thermal interface material (TIM) film on the interposer module, and a package lid that includes a plate portion on the TIM film and a step region projecting away from the plate portion and located over the TIM film and over an edge region of the interposer module.
1 . A package assembly, comprising:
an interposer module including an edge region comprising a molding material layer on a package substrate;
a thermal interface material (TIM) film on the interposer module; and
a package lid comprising a plate portion on the TIM film, wherein the plate portion comprises:
a central region over a central portion of the interposer module and having a width less than a width of an uppermost surface of the interposer module; and
a step region located over the TIM film and over the edge region of the interposer module and extending laterally beyond an outer sidewall of the molding material layer, wherein the step region adjoins the central region around an entire periphery of the central region and a thickness of the plate portion at the step region is greater than a thickness of the plate portion at the central region.
2 . The package assembly of claim 1 , wherein a width of a portion of the step region over the edge region of the interposer module is greater than a width of a portion of the step region extending laterally beyond an outer sidewall of the molding material layer.
3 . The package assembly of claim 2 , wherein the step region comprises a bottom step region that is located on a bottom surface of the plate portion, and projects away from the bottom surface in a first direction toward the interposer module.
4 . The package assembly of claim 2 , wherein the step region comprises an upper step region that is located on an upper surface of the plate portion.
5 . The package assembly of claim 2 , wherein the step region comprises:
a bottom step region that is located on a bottom surface of the plate portion, and projects away from the bottom surface in a first direction toward the interposer module; and
an upper step region that is located on an upper surface of the plate portion, wherein an edge of the bottom step region and an edge of the upper step region are substantially aligned in the first direction.
6 . The package assembly of claim 1 , wherein the TIM film comprises a graphite TIM film.
7 . The package assembly of claim 1 , wherein the TIM film comprises a carbon nanotube TIM film.
8 . The package assembly of claim 1 , wherein the TIM film comprises a TIM film edge region that covers the edge region of the interposer module, and the TIM film edge region is compressed between the step region of the package lid and the edge region of the interposer module.
9 . The package assembly of claim 8 , wherein the TIM film edge region is formed around an entire perimeter of the TIM film, and the TIM film edge region is compressed between the step region of the package lid and the edge region of the interposer module around the entire perimeter of the TIM film.
10 . The package assembly of claim 1 , wherein the interposer module comprises an interposer dielectric layer and a plurality of semiconductor dies located on the interposer dielectric layer.
11 . The package assembly of claim 10 , wherein the molding material layer is formed on the plurality of semiconductor dies.
12 . The package assembly of claim 1 , wherein the step region comprises a bottom step region including a bottom step region covering portion that covers the edge region of the interposer module and a bottom step region non-covering portion that does not cover the edge region of the interposer module.
13 . A package structure, comprising:
a package substrate;
an interposer module on the package substrate including a plurality of semiconductor devices and a molding material layer on the plurality of semiconductor devices; and
a package lid on the interposer module including a plate portion comprising:
a central region over a central portion of the interposer module and having a width less than a width of an uppermost surface of the interposer module; and
a step region projecting down from the plate portion over an edge region of the interposer module, wherein the step region extends laterally beyond an outer sidewall of the molding material layer, wherein the step region adjoins the central region around an entire periphery of the central region and a thickness of the plate portion at the step region is greater than a thickness of the plate portion at the central region.
14 . The package structure of claim 13 , wherein a width of a portion of the step region over the edge region of the interposer module is greater than a width of a portion of the step region extending laterally beyond an outer sidewall of the molding material layer.
15 . The package structure of claim 14 , wherein the width of the central region of the plate portion is greater than a width of the step region.
16 . The package structure of claim 14 , further comprising:
a thermal interface material (TIM) film on the interposer module, wherein the plate portion of the package lid is on the TIM film, and a center of the TIM film is aligned with a center of the central region of the plate portion.
17 . The package structure of claim 16 , wherein the height of the step region is less than a thickness of the TIM film.
18 . The package structure of claim 17 , wherein the height of the step region is less than 0.3 times the thickness of the TIM film.
19 . A package structure, comprising:
a package substrate;
an interposer module on the package substrate including a plurality of semiconductor devices and a molding material layer on the plurality of semiconductor devices; and
a package lid, comprising:
a sidewall portion attached to the package substrate;
a plate portion on the sidewall portion, comprising:
a central region over a central portion of the interposer module and having a width less than a width of an uppermost surface of the interposer module; and
a frame-shaped step region projecting down from the plate portion over an edge region of the interposer module, wherein a width of the frame-shaped step region is less than a distance between the frame-shaped step region and the sidewall portion, the step region extends laterally beyond an outer sidewall of the molding material layer and adjoins the central region around an entire periphery of the central region, and a thickness of the plate portion at the step region is greater than a thickness of the plate portion at the central region.
20 . The package structure of claim 19 , wherein the width of the central region is greater than the distance between the frame-shaped step region and the sidewall portion.