Semiconductor devices including through vias and methods of forming the same
Methods of forming through vias for providing connections between a front-side of a substrate and a backside of the substrate and semiconductor devices including the same are disclosed. In an embodiment, a semiconductor device includes a gate structure on a substrate; a first isolation feature extending partially through the gate structure; a first conductive feature extending through the first isolation feature; and a second conductive feature extending partially through the gate structure, the second conductive feature being electrically coupled to the first conductive feature.
1 . A method comprising:
forming first channel layers and second channel layers on a substrate;
forming a gate structure around the first channel layers and the second channel layers;
forming an isolation feature through the gate structure and between the first channel layers and the second channel layers;
forming a first trench in the isolation feature;
forming a first conductive feature in the first trench;
forming a second trench in the isolation feature; and
forming a second conductive feature in the second trench and electrically coupled to the first conductive feature.
2 . The method of claim 1 , wherein the first trench is formed from a front-side of the substrate, and wherein the second trench is formed from a backside of the substrate opposite the front-side.
3 . The method of claim 1 , further comprising:
forming a mask layer on a first surface of the isolation feature opposite the first conductive feature;
forming an opening through the mask layer exposing the first surface of the isolation feature; and
etching the isolation feature exposed by the opening to form the second trench.
4 . The method of claim 3 , wherein the opening in the mask layer has a first width greater than a second width of the second trench.
5 . The method of claim 1 , wherein the isolation feature has a first width greater than a second width of the first conductive feature.
6 . The method of claim 1 , further comprising:
alternately stacking first epitaxy layers and second epitaxy layers to form a semiconductor stack on the substrate;
patterning the semiconductor stack to form first nanostructures and second nanostructures; and
removing the first epitaxy layers of the first nanostructures and the second nanostructures to form the first channel layers and the second channel layers, respectively.
7 . A method comprising:
growing a first source/drain region and a second source/drain region over a substrate;
depositing an interlayer dielectric over the first source/drain region and the second source/drain region;
forming an isolation feature through the interlayer dielectric and between the first source/drain region and the second source/drain region;
forming a first trench in an upper portion of the isolation feature;
forming a first conductive feature in the first trench;
forming a second trench in a lower portion of the isolation feature; and
forming a second conductive feature in the second trench and electrically coupled to the first conductive feature.
8 . The method of claim 7 , wherein the first trench is formed from a front-side of the substrate, and wherein the second trench is formed from a backside of the substrate opposite the front-side.
9 . The method of claim 7 , further comprising:
forming a mask layer on a first surface of the isolation feature opposite the first conductive feature;
forming an opening through the mask layer exposing the first surface of the isolation feature; and
etching the isolation feature exposed by the opening to form the second trench.
10 . The method of claim 9 , wherein the opening in the mask layer has a first width greater than a second width of the second trench.
11 . The method of claim 7 , wherein the isolation feature has a first width greater than a second width of the first conductive feature.
12 . The method of claim 7 , further comprising:
forming a semiconductor stack on the substrate by alternately stacking first epitaxy layers and second epitaxy layers;
forming first nanostructures and second nanostructures by patterning the semiconductor stack; and
removing the first epitaxy layers of the first nanostructures and the second nanostructures to form first channel layers and second channel layers, respectively, wherein the first source/drain region is grown adjacent to the first channel layers, and the second source/drain region is grown adjacent to the second channel layers.
13 . The method of claim 12 , further comprising:
forming a gate structure around the first channel layers and the second channel layers, wherein the isolation feature is also formed through the gate structure and between the first channel layers and the second channel layers.
14 . A method comprising:
forming a gate structure over an isolation region, the gate structure disposed around a plurality of channel layers;
forming a first portion of a feedthrough via extending through the gate structure;
forming a front-side interconnect structure that is electrically coupled to the feedthrough via and the gate structure;
after forming the front-side interconnect structure, forming a second portion of the feedthrough via extending through the isolation region; and
forming a back-side interconnect structure, the back-side interconnect structure electrically coupled to the feedthrough via, the feedthrough via electrically coupling the front-side interconnect structure to the back-side interconnect structure.
15 . The method of claim 14 , further comprising:
forming a feedthrough isolation structure through the gate structure and the isolation region,
wherein forming the first portion of the feedthrough via comprises forming a first conductive feature in an upper portion of the feedthrough isolation structure, and
wherein forming the second portion of the feedthrough via comprises forming a second conductive feature in a lower portion of the feedthrough isolation structure.
16 . The method of claim 15 , wherein forming the first conductive feature comprises:
forming a first trench in the upper portion of the feedthrough isolation structure; and
forming a first barrier layer and a first fill material in the first trench.
17 . The method of claim 16 , wherein forming the second conductive feature comprises:
forming a second trench in the lower portion of the feedthrough isolation structure, the second trench exposing the first conductive feature; and
forming a second barrier layer and a second fill material in the second trench.
18 . The method of claim 16 , wherein a width of the first trench is smaller than a width of the feedthrough isolation structure.
19 . The method of claim 15 , further comprising:
forming the isolation region over a substrate; and
thinning the substrate to expose the isolation region before forming the second portion of the feedthrough via.
20 . The method of claim 14 , wherein the feedthrough via has a T-shaped structure in a cross-sectional view.