Semiconductor package with barrier layer
A packaged integrated circuit device includes a frame having a cavity therein and an inner semiconductor chip within the cavity. A lower re-distribution layer is provided, which extends adjacent lower surfaces of the frame and the inner semiconductor chip. The lower re-distribution layer has an opening therein which at least partially exposes the lower surface of the inner semiconductor chip. A lower semiconductor chip is provided, which extends adjacent the lower surface of the inner semiconductor chip, and within the opening in the lower re-distribution layer. This lower re-distribution layer includes: (i) an insulating layer covering the lower surface of the frame, (ii) a re-distribution pattern disposed on the insulating layer, and (iii) a barrier layer, which is disposed on the insulating layer and surrounds at least a portion of the lower semiconductor chip.
1 . A packaged integrated circuit device, comprising:
a first semiconductor chip;
a lower re-distribution layer extending adjacent lower surface of the first semiconductor chip, said lower re-distribution layer having an opening therein which at least partially exposes the lower surface of the first semiconductor chip;
and a second semiconductor chip adjacent the lower surface of the first semiconductor chip, and within the opening in the lower re-distribution layer, which comprises: (i) an insulating layer, (ii) a re-distribution pattern disposed on the insulating layer;
wherein an upper surface of the opening of the lower re-distribution layer comprises a stepped structure.
2 . The device of claim 1 , wherein the lower re-distribution comprises a barrier layer disposed on the insulating layer and surrounds at least a portion of the second semiconductor chip.
3 . The device of claim 2 , wherein the barrier layer has a generally quadrangular rim shape when viewed from a top plan view perspective.
4 . The device of claim 2 , wherein an upper surface of the opening of the lower re-distribution layer comprises first stepped surface, and
wherein the first stepped surface exposes partially an upper surface of the barrier layer.
5 . The device of claim 4 , wherein the upper surface of the opening of the lower re-distribution layer further comprises a second stepped surface at which an upper surface of the insulating layer is partially exposed.
6 . The device of claim 2 , wherein the barrier layer has an inclined side surface.
7 . The device of claim 2 , wherein an inner side surface of the insulating layer is inclined at an angle of about 60° to about 80°.
8 . The device of claim 1 , wherein the lower semiconductor chip comprises:
a body disposed on the lower surface of the first semiconductor chip;
a solder ball electrically connecting the body and the first semiconductor chip; and
a mold layer extending between the body and the lower re-distribution layer.
9 . The device of claim 8 , wherein the mold layer fills the opening and completely covers a side surface of the body while extending through the lower re-distribution layer.
10 . The device of claim 9 , wherein the mold layer exposes an upper surface of the second semiconductor chip.
11 . The device of claim 1 , further comprising:
an upper re-distribution layer disposed on the first semiconductor chip, the upper re-distribution layer comprising a re-distribution pattern and an insulating layer; and
a third semiconductor chip disposed on the upper re-distribution layer.
12 . The device of claim 11 , further comprising a through-silicon-via, which electrically connects the re-distribution pattern of the lower re-distribution layer and the re-distribution pattern of the upper re-distribution layer.
13 . A packaged semiconductor device, comprising:
a first semiconductor chip;
a lower re-distribution layer extending adjacent lower surface of the first semiconductor chip, said lower re-distribution layer comprising a first insulating layer covering at least a portion of the lower surface of the first semiconductor chip, a re-distribution pattern disposed on the first insulating layer, a second insulating layer disposed on the re-distribution pattern while partially exposing an upper surface of the first insulating layer; and
a second semiconductor chip adjacent the lower surface of the first semiconductor chip;
wherein the first insulating layer, the re-distribution pattern, and the second insulating layer of the lower re-distribution layer comprise a stepped structure.
14 . The device of claim 13 , wherein the stepped structure includes at least four stepped structures surrounding the second semiconductor chip.
15 . The device of claim 13 , wherein the second semiconductor chip comprises:
a body disposed on the lower surface of the first semiconductor chip;
a solder ball electrically connecting the body and the first semiconductor chip; and
a mold layer extending between the body and the lower re-distribution layer.
16 . The device of claim 15 , wherein an upper surface of the mold layer connects an edge of the lower re-distribution layer and an edge of the body of the second semiconductor chip.
17 . The device of claim 15 , wherein an upper surface of the mold layer has an inclination with respect to the lower surface of the first semiconductor chip.
18 . The device of claim 13 , wherein the lower re-distribution layer comprises a barrier layer between the first insulating layer and the second insulating layer,
wherein the second insulating layer exposes partially an upper surface of the barrier layer.
19 . The device of claim 18 , wherein the re-distribution pattern is electrically connected to the first semiconductor chip, and the barrier layer is electrically insulated from the first semiconductor chip.
20 . A packaged integrated circuit device, comprising:
a first semiconductor chip;
a lower re-distribution layer extending adjacent lower surface of the first semiconductor chip, said lower re-distribution layer having an opening therein which at least partially exposes the lower surface of the first semiconductor chip; and
a second semiconductor chip adjacent the lower surface of the first semiconductor chip, and within the opening in the lower re-distribution layer, which comprises: (i) an first insulating layer covering at least a portion of the lower surface of the first semiconductor chip, (ii) a re-distribution pattern disposed on the first the insulating layer; (iii) a second insulating layer disposed on the re-distribution pattern,
wherein the second semiconductor chip comprises:
a body disposed on the lower surface of the first semiconductor chip;
a solder ball electrically connecting the body and the first semiconductor chip, and
a mold layer interposed between the body and the lower re-distribution layer;
wherein an upper surface of the opening of the lower re-distribution layer comprises a stepped structure.