Laminate peeling method, laminate, and laminate production method
A laminate debonding method includes producing a laminate by joining a first substrate formed of a semiconductor-forming substrate to a second substrate formed of a support substrate which allows passage of infrared laser light, by the mediation of a first adhesive layer provided on the first substrate and a second adhesive layer provided on the second substrate, wherein the first adhesive layer is obtained by curing an adhesive (A) containing a component which is cured through hydrosilylation, and the second adhesive layer is obtained by use of an adhesive (B) formed of a polymer adhesive having an aromatic ring in at least one of a main chain and a side chain and which allows passage of infrared laser light; and irradiating the laminate with infrared laser light from a second substrate side for debonding the second substrate at the interface between the first and second adhesive layers.
1 . A laminate comprising:
a first substrate formed of a semiconductor-forming substrate, and
a second substrate formed of a support substrate which allows passage of infrared laser light, the first substrate being joined to the second substrate by mediation of a first adhesive layer provided on the first substrate and a second adhesive layer provided on the second substrate,
wherein:
the first adhesive layer is an adhesive layer obtained by curing an adhesive (A) containing a component which is cured through hydrosilylation, and
the second adhesive layer is an adhesive layer which is obtained by use of an adhesive (B) formed of a polymer adhesive having an aromatic ring in at least one of a main chain and a side chain and which allows passage of infrared laser light.
2 . A laminate according to claim 1 ,
wherein the adhesive (A) comprises
a polysiloxane (A1), and
a platinum group metal catalyst (A2); and
wherein the polysiloxane (A1) comprises:
a polyorganosiloxane (a1) having one or more units selected from the group consisting of a siloxane unit represented by SiO 2 (unit Q′), a siloxane unit represented by R 1 ′R 2 ′R 3 ′SiO 1/2 (unit M′), a siloxane unit represented by R 4 ′R 5 ′SiO 2/2 (unit D′), and a siloxane unit represented by R 6 ′SiO 3/2 (unit T′), and at least one unit selected from the group consisting of unit M′, unit D′, and unit T′, wherein each of R 1 ′ to R 6 ′ is a group bonded to a silicon atom and represents an alkyl group or an alkenyl group, and at least one of R 1 ′ to R 6 ′ is an alkenyl group, and
a polyorganosiloxane (a2) having one or more units selected from the group consisting of a siloxane unit represented by SiO 2 (unit Q″), a siloxane unit represented by R 1 ″R 2 ″R 3 ″SiO 1/2 (unit M″), a siloxane unit represented by R 4 ″R 5 ″SiO 2/2 (unit D″), and a siloxane unit represented by R 6 ″SiO 3/2 (unit T″), and at least one unit selected from the group consisting of unit M″, unit D″, and unit T″, wherein each of R 1 ″ to R 6 ″ is a group or an atom bonded to a silicon atom and represents an alkyl group or a hydrogen atom, and at least one of R 1 ″ to R 6 ″ is a hydrogen atom.
3 . A method for producing a laminate as recited in claim 1 , the method comprising:
applying the adhesive (A) onto a surface of the first substrate, to thereby form a first adhesive coating layer;
applying the adhesive (B) onto a surface of the second substrate, to thereby form a second adhesive coating layer; and
applying a load to the first substrate and the second substrate in a thickness direction, to thereby closely adhere the first layer to the second layer, while the first adhesive coating layer of the first substrate and the second adhesive coating layer of the second substrate are subjected to at least one of a heat treatment and a reduced pressure treatment, and then performing a post-heat treatment, to thereby form the laminate.
4 . A method for producing a laminate as recited in claim 2 , the method comprising:
applying the adhesive (A) onto a surface of the first substrate, to thereby form a first adhesive coating layer;
applying the adhesive (B) onto a surface of the second substrate, to thereby form a second adhesive coating layer; and
applying a load to the first substrate and the second substrate in a thickness direction, to thereby closely adhere the first layer to the second layer, while the first adhesive coating layer of the second substrate are subjected to at least one of a heat treatment and a reduced pressure treatment, and then performing a post-heat treatment, to thereby form the laminate.